1/27/2013	4:08:51 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/27/2013	4:08:52 PM	Recipe started at 4:08 PM
1/27/2013	4:08:52 PM	Helium valve closed
1/27/2013	4:08:52 PM	H2 valve closed
1/27/2013	4:08:52 PM	BCl3 valve closed
1/27/2013	4:08:52 PM	PH3 valve closed
1/27/2013	4:08:52 PM	SiCl4 pre valve closed
1/27/2013	4:08:52 PM	SiCl4 post valve closed
1/27/2013	4:08:52 PM	Main Vac valve closed
1/27/2013	4:08:52 PM	Bypass valve closed
1/27/2013	4:08:52 PM	Bubbler valve closed
1/27/2013	4:08:52 PM	Helium MFC set to  0.000000
1/27/2013	4:08:52 PM	H2 MFC set to  0.000000
1/27/2013	4:08:52 PM	BCl3 MFC set to  0.000000
1/27/2013	4:08:52 PM	PH3 MFC set to  0.000000
1/27/2013	4:08:52 PM	SiCl4 MFC set to  0.000000
1/27/2013	4:08:52 PM	Bypass solenoid MFC set to  0.000000
1/27/2013	4:08:52 PM	Tube furnace set to 0
1/27/2013	4:08:55 PM	H2 valve closed
1/27/2013	4:08:55 PM	BCl3 valve closed
1/27/2013	4:08:55 PM	PH3 valve closed
1/27/2013	4:08:55 PM	SiCl4 pre valve closed
1/27/2013	4:08:55 PM	SiCl4 post valve closed
1/27/2013	4:08:55 PM	Main Vac valve closed
1/27/2013	4:08:55 PM	Bypass valve closed
1/27/2013	4:08:55 PM	Bubbler valve closed
1/27/2013	4:08:55 PM	Helium valve opened
1/27/2013	4:08:55 PM	Helium MFC set to  500.000000
1/27/2013	4:08:55 PM	H2 MFC set to  0.000000
1/27/2013	4:08:55 PM	BCl3 MFC set to  0.000000
1/27/2013	4:08:55 PM	PH3 MFC set to  0.000000
1/27/2013	4:08:55 PM	SiCl4 MFC set to  0.000000
1/27/2013	4:08:55 PM	Bypass solenoid MFC set to  0.000000
1/27/2013	4:08:55 PM	Tube furnace set to 0
1/27/2013	4:10:08 PM	Helium valve closed
1/27/2013	4:10:08 PM	H2 valve closed
1/27/2013	4:10:08 PM	BCl3 valve closed
1/27/2013	4:10:08 PM	PH3 valve closed
1/27/2013	4:10:08 PM	SiCl4 pre valve closed
1/27/2013	4:10:08 PM	SiCl4 post valve closed
1/27/2013	4:10:08 PM	Main Vac valve closed
1/27/2013	4:10:08 PM	Bypass valve closed
1/27/2013	4:10:08 PM	Bubbler valve closed
1/27/2013	4:10:08 PM	Helium MFC set to  0.000000
1/27/2013	4:10:08 PM	H2 MFC set to  0.000000
1/27/2013	4:10:08 PM	BCl3 MFC set to  0.000000
1/27/2013	4:10:08 PM	PH3 MFC set to  0.000000
1/27/2013	4:10:08 PM	SiCl4 MFC set to  0.000000
1/27/2013	4:10:08 PM	Bypass solenoid MFC set to  0.000000
1/27/2013	4:10:08 PM	Tube furnace set to 0
1/27/2013	4:10:09 PM	Run finished at 4:10 PM
1/27/2013	4:10:09 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/27/2013	4:16:44 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/27/2013	4:16:44 PM	Recipe started at 4:16 PM
1/27/2013	4:16:44 PM	Helium valve closed
1/27/2013	4:16:44 PM	H2 valve closed
1/27/2013	4:16:44 PM	BCl3 valve closed
1/27/2013	4:16:44 PM	PH3 valve closed
1/27/2013	4:16:44 PM	SiCl4 pre valve closed
1/27/2013	4:16:44 PM	SiCl4 post valve closed
1/27/2013	4:16:44 PM	Main Vac valve closed
1/27/2013	4:16:44 PM	Bubbler valve closed
1/27/2013	4:16:44 PM	Bypass valve opened
1/27/2013	4:16:44 PM	Helium MFC set to  0.000000
1/27/2013	4:16:44 PM	H2 MFC set to  0.000000
1/27/2013	4:16:45 PM	BCl3 MFC set to  0.000000
1/27/2013	4:16:45 PM	PH3 MFC set to  0.000000
1/27/2013	4:16:45 PM	SiCl4 MFC set to  0.000000
1/27/2013	4:16:45 PM	Bypass solenoid MFC set to  0.000000
1/27/2013	4:16:45 PM	Tube furnace set to 0
1/27/2013	4:17:59 PM	Helium valve closed
1/27/2013	4:17:59 PM	H2 valve closed
1/27/2013	4:17:59 PM	BCl3 valve closed
1/27/2013	4:17:59 PM	PH3 valve closed
1/27/2013	4:17:59 PM	SiCl4 pre valve closed
1/27/2013	4:17:59 PM	SiCl4 post valve closed
1/27/2013	4:17:59 PM	Main Vac valve closed
1/27/2013	4:17:59 PM	Bubbler valve closed
1/27/2013	4:17:59 PM	Bypass valve opened
1/27/2013	4:17:59 PM	Helium MFC set to  0.000000
1/27/2013	4:17:59 PM	H2 MFC set to  0.000000
1/27/2013	4:17:59 PM	BCl3 MFC set to  0.000000
1/27/2013	4:17:59 PM	PH3 MFC set to  0.000000
1/27/2013	4:17:59 PM	SiCl4 MFC set to  0.000000
1/27/2013	4:17:59 PM	Bypass solenoid MFC set to  0.000000
1/27/2013	4:18:00 PM	Tube furnace set to 0
1/27/2013	4:19:00 PM	Helium valve closed
1/27/2013	4:19:00 PM	H2 valve closed
1/27/2013	4:19:00 PM	BCl3 valve closed
1/27/2013	4:19:00 PM	PH3 valve closed
1/27/2013	4:19:00 PM	SiCl4 pre valve closed
1/27/2013	4:19:00 PM	SiCl4 post valve closed
1/27/2013	4:19:00 PM	Bypass valve closed
1/27/2013	4:19:00 PM	Bubbler valve closed
1/27/2013	4:19:00 PM	Main Vac valve opened
1/27/2013	4:19:00 PM	Helium MFC set to  0.000000
1/27/2013	4:19:00 PM	H2 MFC set to  0.000000
1/27/2013	4:19:00 PM	BCl3 MFC set to  0.000000
1/27/2013	4:19:00 PM	PH3 MFC set to  0.000000
1/27/2013	4:19:00 PM	SiCl4 MFC set to  0.000000
1/27/2013	4:19:00 PM	Bypass solenoid MFC set to  0.000000
1/27/2013	4:19:00 PM	Tube furnace set to 0
1/27/2013	4:19:01 PM	Run finished at 4:19 PM
1/27/2013	4:19:01 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/27/2013	4:19:58 PM	Recipe started at 4:19 PM
1/27/2013	4:19:58 PM	Helium valve closed
1/27/2013	4:19:58 PM	H2 valve closed
1/27/2013	4:19:58 PM	BCl3 valve closed
1/27/2013	4:19:58 PM	PH3 valve closed
1/27/2013	4:19:58 PM	SiCl4 pre valve closed
1/27/2013	4:19:58 PM	SiCl4 post valve closed
1/27/2013	4:19:58 PM	Bypass valve closed
1/27/2013	4:19:58 PM	Bubbler valve closed
1/27/2013	4:19:58 PM	Main Vac valve opened
1/27/2013	4:19:58 PM	Helium MFC set to  0.000000
1/27/2013	4:19:58 PM	H2 MFC set to  0.000000
1/27/2013	4:19:58 PM	BCl3 MFC set to  0.000000
1/27/2013	4:19:58 PM	PH3 MFC set to  0.000000
1/27/2013	4:19:58 PM	SiCl4 MFC set to  0.000000
1/27/2013	4:19:58 PM	Bypass solenoid MFC set to  0.000000
1/27/2013	4:19:58 PM	Tube furnace set to 150
1/27/2013	4:20:28 PM	H2 valve closed
1/27/2013	4:20:28 PM	BCl3 valve closed
1/27/2013	4:20:28 PM	PH3 valve closed
1/27/2013	4:20:28 PM	SiCl4 pre valve closed
1/27/2013	4:20:28 PM	SiCl4 post valve closed
1/27/2013	4:20:28 PM	Bypass valve closed
1/27/2013	4:20:28 PM	Bubbler valve closed
1/27/2013	4:20:28 PM	Helium valve opened
1/27/2013	4:20:28 PM	Main Vac valve opened
1/27/2013	4:20:28 PM	Helium MFC set to  20.000000
1/27/2013	4:20:28 PM	H2 MFC set to  0.000000
1/27/2013	4:20:29 PM	BCl3 MFC set to  0.000000
1/27/2013	4:20:29 PM	PH3 MFC set to  0.000000
1/27/2013	4:20:29 PM	SiCl4 MFC set to  0.000000
1/27/2013	4:20:29 PM	Bypass solenoid MFC set to  0.000000
1/27/2013	4:20:29 PM	Tube furnace set to 150
1/27/2013	4:20:59 PM	Helium valve closed
1/27/2013	4:20:59 PM	H2 valve closed
1/27/2013	4:20:59 PM	BCl3 valve closed
1/27/2013	4:20:59 PM	PH3 valve closed
1/27/2013	4:20:59 PM	SiCl4 pre valve closed
1/27/2013	4:20:59 PM	SiCl4 post valve closed
1/27/2013	4:20:59 PM	Bypass valve closed
1/27/2013	4:20:59 PM	Bubbler valve closed
1/27/2013	4:20:59 PM	Main Vac valve opened
1/27/2013	4:20:59 PM	Helium MFC set to  0.000000
1/27/2013	4:20:59 PM	H2 MFC set to  0.000000
1/27/2013	4:20:59 PM	BCl3 MFC set to  0.000000
1/27/2013	4:20:59 PM	PH3 MFC set to  0.000000
1/27/2013	4:20:59 PM	SiCl4 MFC set to  0.000000
1/27/2013	4:20:59 PM	Bypass solenoid MFC set to  0.000000
1/27/2013	4:20:59 PM	Tube furnace set to 150
1/27/2013	4:21:29 PM	H2 valve closed
1/27/2013	4:21:29 PM	BCl3 valve closed
1/27/2013	4:21:29 PM	PH3 valve closed
1/27/2013	4:21:29 PM	SiCl4 pre valve closed
1/27/2013	4:21:29 PM	SiCl4 post valve closed
1/27/2013	4:21:29 PM	Bypass valve closed
1/27/2013	4:21:29 PM	Bubbler valve closed
1/27/2013	4:21:29 PM	Helium valve opened
1/27/2013	4:21:29 PM	Main Vac valve opened
1/27/2013	4:21:29 PM	Helium MFC set to  20.000000
1/27/2013	4:21:29 PM	H2 MFC set to  0.000000
1/27/2013	4:21:29 PM	BCl3 MFC set to  0.000000
1/27/2013	4:21:29 PM	PH3 MFC set to  0.000000
1/27/2013	4:21:29 PM	SiCl4 MFC set to  0.000000
1/27/2013	4:21:29 PM	Bypass solenoid MFC set to  0.000000
1/27/2013	4:21:29 PM	Tube furnace set to 150
1/27/2013	4:21:59 PM	Helium valve closed
1/27/2013	4:21:59 PM	H2 valve closed
1/27/2013	4:21:59 PM	BCl3 valve closed
1/27/2013	4:21:59 PM	PH3 valve closed
1/27/2013	4:21:59 PM	SiCl4 pre valve closed
1/27/2013	4:21:59 PM	SiCl4 post valve closed
1/27/2013	4:21:59 PM	Bypass valve closed
1/27/2013	4:21:59 PM	Bubbler valve closed
1/27/2013	4:21:59 PM	Main Vac valve opened
1/27/2013	4:21:59 PM	Helium MFC set to  0.000000
1/27/2013	4:21:59 PM	H2 MFC set to  0.000000
1/27/2013	4:21:59 PM	BCl3 MFC set to  0.000000
1/27/2013	4:21:59 PM	PH3 MFC set to  0.000000
1/27/2013	4:21:59 PM	SiCl4 MFC set to  0.000000
1/27/2013	4:21:59 PM	Bypass solenoid MFC set to  0.000000
1/27/2013	4:21:59 PM	Tube furnace set to 150
1/27/2013	4:22:29 PM	H2 valve closed
1/27/2013	4:22:29 PM	BCl3 valve closed
1/27/2013	4:22:29 PM	PH3 valve closed
1/27/2013	4:22:29 PM	SiCl4 pre valve closed
1/27/2013	4:22:29 PM	SiCl4 post valve closed
1/27/2013	4:22:29 PM	Bypass valve closed
1/27/2013	4:22:29 PM	Bubbler valve closed
1/27/2013	4:22:29 PM	Helium valve opened
1/27/2013	4:22:29 PM	Main Vac valve opened
1/27/2013	4:22:29 PM	Helium MFC set to  20.000000
1/27/2013	4:22:29 PM	H2 MFC set to  0.000000
1/27/2013	4:22:29 PM	BCl3 MFC set to  0.000000
1/27/2013	4:22:29 PM	PH3 MFC set to  0.000000
1/27/2013	4:22:29 PM	SiCl4 MFC set to  0.000000
1/27/2013	4:22:29 PM	Bypass solenoid MFC set to  0.000000
1/27/2013	4:22:30 PM	Tube furnace set to 150
1/27/2013	4:24:30 PM	Helium valve closed
1/27/2013	4:24:30 PM	H2 valve closed
1/27/2013	4:24:30 PM	BCl3 valve closed
1/27/2013	4:24:30 PM	PH3 valve closed
1/27/2013	4:24:30 PM	SiCl4 pre valve closed
1/27/2013	4:24:30 PM	SiCl4 post valve closed
1/27/2013	4:24:30 PM	Bypass valve closed
1/27/2013	4:24:30 PM	Bubbler valve closed
1/27/2013	4:24:30 PM	Main Vac valve opened
1/27/2013	4:24:30 PM	Helium MFC set to  0.000000
1/27/2013	4:24:30 PM	H2 MFC set to  0.000000
1/27/2013	4:24:30 PM	BCl3 MFC set to  0.000000
1/27/2013	4:24:30 PM	PH3 MFC set to  0.000000
1/27/2013	4:24:30 PM	SiCl4 MFC set to  0.000000
1/27/2013	4:24:30 PM	Bypass solenoid MFC set to  0.000000
1/27/2013	4:24:30 PM	Tube furnace set to 150
1/27/2013	4:25:00 PM	H2 valve closed
1/27/2013	4:25:00 PM	BCl3 valve closed
1/27/2013	4:25:00 PM	PH3 valve closed
1/27/2013	4:25:00 PM	SiCl4 pre valve closed
1/27/2013	4:25:00 PM	SiCl4 post valve closed
1/27/2013	4:25:00 PM	Bypass valve closed
1/27/2013	4:25:00 PM	Bubbler valve closed
1/27/2013	4:25:00 PM	Helium valve opened
1/27/2013	4:25:00 PM	Main Vac valve opened
1/27/2013	4:25:00 PM	Helium MFC set to  20.000000
1/27/2013	4:25:00 PM	H2 MFC set to  0.000000
1/27/2013	4:25:00 PM	BCl3 MFC set to  0.000000
1/27/2013	4:25:00 PM	PH3 MFC set to  0.000000
1/27/2013	4:25:00 PM	SiCl4 MFC set to  0.000000
1/27/2013	4:25:00 PM	Bypass solenoid MFC set to  0.000000
1/27/2013	4:25:00 PM	Tube furnace set to 150
1/27/2013	4:25:30 PM	Helium valve closed
1/27/2013	4:25:30 PM	H2 valve closed
1/27/2013	4:25:30 PM	BCl3 valve closed
1/27/2013	4:25:30 PM	PH3 valve closed
1/27/2013	4:25:30 PM	SiCl4 pre valve closed
1/27/2013	4:25:30 PM	SiCl4 post valve closed
1/27/2013	4:25:30 PM	Bypass valve closed
1/27/2013	4:25:30 PM	Bubbler valve closed
1/27/2013	4:25:30 PM	Main Vac valve opened
1/27/2013	4:25:30 PM	Helium MFC set to  0.000000
1/27/2013	4:25:30 PM	H2 MFC set to  0.000000
1/27/2013	4:25:30 PM	BCl3 MFC set to  0.000000
1/27/2013	4:25:30 PM	PH3 MFC set to  0.000000
1/27/2013	4:25:30 PM	SiCl4 MFC set to  0.000000
1/27/2013	4:25:30 PM	Bypass solenoid MFC set to  0.000000
1/27/2013	4:25:30 PM	Tube furnace set to 150
1/27/2013	4:26:00 PM	H2 valve closed
1/27/2013	4:26:00 PM	BCl3 valve closed
1/27/2013	4:26:00 PM	PH3 valve closed
1/27/2013	4:26:00 PM	SiCl4 pre valve closed
1/27/2013	4:26:00 PM	SiCl4 post valve closed
1/27/2013	4:26:00 PM	Bypass valve closed
1/27/2013	4:26:00 PM	Bubbler valve closed
1/27/2013	4:26:00 PM	Helium valve opened
1/27/2013	4:26:00 PM	Main Vac valve opened
1/27/2013	4:26:00 PM	Helium MFC set to  20.000000
1/27/2013	4:26:00 PM	H2 MFC set to  0.000000
1/27/2013	4:26:00 PM	BCl3 MFC set to  0.000000
1/27/2013	4:26:00 PM	PH3 MFC set to  0.000000
1/27/2013	4:26:00 PM	SiCl4 MFC set to  0.000000
1/27/2013	4:26:00 PM	Bypass solenoid MFC set to  0.000000
1/27/2013	4:26:01 PM	Tube furnace set to 150
1/27/2013	4:26:31 PM	Helium valve closed
1/27/2013	4:26:31 PM	H2 valve closed
1/27/2013	4:26:31 PM	BCl3 valve closed
1/27/2013	4:26:31 PM	PH3 valve closed
1/27/2013	4:26:31 PM	SiCl4 pre valve closed
1/27/2013	4:26:31 PM	SiCl4 post valve closed
1/27/2013	4:26:31 PM	Bypass valve closed
1/27/2013	4:26:31 PM	Bubbler valve closed
1/27/2013	4:26:31 PM	Main Vac valve opened
1/27/2013	4:26:31 PM	Helium MFC set to  0.000000
1/27/2013	4:26:31 PM	H2 MFC set to  0.000000
1/27/2013	4:26:31 PM	BCl3 MFC set to  0.000000
1/27/2013	4:26:31 PM	PH3 MFC set to  0.000000
1/27/2013	4:26:31 PM	SiCl4 MFC set to  0.000000
1/27/2013	4:26:31 PM	Bypass solenoid MFC set to  0.000000
1/27/2013	4:26:31 PM	Tube furnace set to 150
1/27/2013	4:27:01 PM	H2 valve closed
1/27/2013	4:27:01 PM	BCl3 valve closed
1/27/2013	4:27:01 PM	PH3 valve closed
1/27/2013	4:27:01 PM	SiCl4 pre valve closed
1/27/2013	4:27:01 PM	SiCl4 post valve closed
1/27/2013	4:27:01 PM	Bypass valve closed
1/27/2013	4:27:01 PM	Bubbler valve closed
1/27/2013	4:27:01 PM	Helium valve opened
1/27/2013	4:27:01 PM	Main Vac valve opened
1/27/2013	4:27:01 PM	Helium MFC set to  20.000000
1/27/2013	4:27:01 PM	H2 MFC set to  0.000000
1/27/2013	4:27:01 PM	BCl3 MFC set to  0.000000
1/27/2013	4:27:01 PM	PH3 MFC set to  0.000000
1/27/2013	4:27:01 PM	SiCl4 MFC set to  0.000000
1/27/2013	4:27:01 PM	Bypass solenoid MFC set to  0.000000
1/27/2013	4:27:01 PM	Tube furnace set to 150
1/27/2013	4:29:01 PM	Helium valve closed
1/27/2013	4:29:01 PM	H2 valve closed
1/27/2013	4:29:01 PM	BCl3 valve closed
1/27/2013	4:29:01 PM	PH3 valve closed
1/27/2013	4:29:01 PM	SiCl4 pre valve closed
1/27/2013	4:29:01 PM	SiCl4 post valve closed
1/27/2013	4:29:01 PM	Bypass valve closed
1/27/2013	4:29:01 PM	Bubbler valve closed
1/27/2013	4:29:01 PM	Main Vac valve opened
1/27/2013	4:29:01 PM	Helium MFC set to  0.000000
1/27/2013	4:29:01 PM	H2 MFC set to  0.000000
1/27/2013	4:29:01 PM	BCl3 MFC set to  0.000000
1/27/2013	4:29:01 PM	PH3 MFC set to  0.000000
1/27/2013	4:29:01 PM	SiCl4 MFC set to  0.000000
1/27/2013	4:29:01 PM	Bypass solenoid MFC set to  0.000000
1/27/2013	4:29:01 PM	Tube furnace set to 150
1/27/2013	4:29:31 PM	H2 valve closed
1/27/2013	4:29:31 PM	BCl3 valve closed
1/27/2013	4:29:31 PM	PH3 valve closed
1/27/2013	4:29:31 PM	SiCl4 pre valve closed
1/27/2013	4:29:31 PM	SiCl4 post valve closed
1/27/2013	4:29:31 PM	Bypass valve closed
1/27/2013	4:29:31 PM	Bubbler valve closed
1/27/2013	4:29:31 PM	Helium valve opened
1/27/2013	4:29:31 PM	Main Vac valve opened
1/27/2013	4:29:31 PM	Helium MFC set to  20.000000
1/27/2013	4:29:31 PM	H2 MFC set to  0.000000
1/27/2013	4:29:31 PM	BCl3 MFC set to  0.000000
1/27/2013	4:29:31 PM	PH3 MFC set to  0.000000
1/27/2013	4:29:31 PM	SiCl4 MFC set to  0.000000
1/27/2013	4:29:31 PM	Bypass solenoid MFC set to  0.000000
1/27/2013	4:29:32 PM	Tube furnace set to 150
1/27/2013	4:30:02 PM	Helium valve closed
1/27/2013	4:30:02 PM	H2 valve closed
1/27/2013	4:30:02 PM	BCl3 valve closed
1/27/2013	4:30:02 PM	PH3 valve closed
1/27/2013	4:30:02 PM	SiCl4 pre valve closed
1/27/2013	4:30:02 PM	SiCl4 post valve closed
1/27/2013	4:30:02 PM	Bypass valve closed
1/27/2013	4:30:02 PM	Bubbler valve closed
1/27/2013	4:30:02 PM	Main Vac valve opened
1/27/2013	4:30:02 PM	Helium MFC set to  0.000000
1/27/2013	4:30:02 PM	H2 MFC set to  0.000000
1/27/2013	4:30:02 PM	BCl3 MFC set to  0.000000
1/27/2013	4:30:02 PM	PH3 MFC set to  0.000000
1/27/2013	4:30:02 PM	SiCl4 MFC set to  0.000000
1/27/2013	4:30:02 PM	Bypass solenoid MFC set to  0.000000
1/27/2013	4:30:02 PM	Tube furnace set to 150
1/27/2013	4:30:32 PM	H2 valve closed
1/27/2013	4:30:32 PM	BCl3 valve closed
1/27/2013	4:30:32 PM	PH3 valve closed
1/27/2013	4:30:32 PM	SiCl4 pre valve closed
1/27/2013	4:30:32 PM	SiCl4 post valve closed
1/27/2013	4:30:32 PM	Bypass valve closed
1/27/2013	4:30:32 PM	Bubbler valve closed
1/27/2013	4:30:32 PM	Helium valve opened
1/27/2013	4:30:32 PM	Main Vac valve opened
1/27/2013	4:30:32 PM	Helium MFC set to  20.000000
1/27/2013	4:30:32 PM	H2 MFC set to  0.000000
1/27/2013	4:30:32 PM	BCl3 MFC set to  0.000000
1/27/2013	4:30:32 PM	PH3 MFC set to  0.000000
1/27/2013	4:30:32 PM	SiCl4 MFC set to  0.000000
1/27/2013	4:30:32 PM	Bypass solenoid MFC set to  0.000000
1/27/2013	4:30:32 PM	Tube furnace set to 150
1/27/2013	4:32:32 PM	Helium valve closed
1/27/2013	4:32:32 PM	H2 valve closed
1/27/2013	4:32:32 PM	BCl3 valve closed
1/27/2013	4:32:32 PM	PH3 valve closed
1/27/2013	4:32:32 PM	SiCl4 pre valve closed
1/27/2013	4:32:32 PM	SiCl4 post valve closed
1/27/2013	4:32:32 PM	Bypass valve closed
1/27/2013	4:32:32 PM	Bubbler valve closed
1/27/2013	4:32:32 PM	Main Vac valve opened
1/27/2013	4:32:32 PM	Helium MFC set to  0.000000
1/27/2013	4:32:32 PM	H2 MFC set to  0.000000
1/27/2013	4:32:32 PM	BCl3 MFC set to  0.000000
1/27/2013	4:32:32 PM	PH3 MFC set to  0.000000
1/27/2013	4:32:32 PM	SiCl4 MFC set to  0.000000
1/27/2013	4:32:32 PM	Bypass solenoid MFC set to  0.000000
1/27/2013	4:32:32 PM	Tube furnace set to 150
1/27/2013	4:33:02 PM	H2 valve closed
1/27/2013	4:33:02 PM	BCl3 valve closed
1/27/2013	4:33:02 PM	PH3 valve closed
1/27/2013	4:33:02 PM	SiCl4 pre valve closed
1/27/2013	4:33:02 PM	SiCl4 post valve closed
1/27/2013	4:33:02 PM	Bypass valve closed
1/27/2013	4:33:02 PM	Bubbler valve closed
1/27/2013	4:33:02 PM	Helium valve opened
1/27/2013	4:33:02 PM	Main Vac valve opened
1/27/2013	4:33:02 PM	Helium MFC set to  20.000000
1/27/2013	4:33:02 PM	H2 MFC set to  0.000000
1/27/2013	4:33:02 PM	BCl3 MFC set to  0.000000
1/27/2013	4:33:02 PM	PH3 MFC set to  0.000000
1/27/2013	4:33:02 PM	SiCl4 MFC set to  0.000000
1/27/2013	4:33:02 PM	Bypass solenoid MFC set to  0.000000
1/27/2013	4:33:03 PM	Tube furnace set to 150
1/27/2013	4:33:33 PM	Helium valve closed
1/27/2013	4:33:33 PM	H2 valve closed
1/27/2013	4:33:33 PM	BCl3 valve closed
1/27/2013	4:33:33 PM	PH3 valve closed
1/27/2013	4:33:33 PM	SiCl4 pre valve closed
1/27/2013	4:33:33 PM	SiCl4 post valve closed
1/27/2013	4:33:33 PM	Bypass valve closed
1/27/2013	4:33:33 PM	Bubbler valve closed
1/27/2013	4:33:33 PM	Main Vac valve opened
1/27/2013	4:33:33 PM	Helium MFC set to  0.000000
1/27/2013	4:33:33 PM	H2 MFC set to  0.000000
1/27/2013	4:33:33 PM	BCl3 MFC set to  0.000000
1/27/2013	4:33:33 PM	PH3 MFC set to  0.000000
1/27/2013	4:33:33 PM	SiCl4 MFC set to  0.000000
1/27/2013	4:33:33 PM	Bypass solenoid MFC set to  0.000000
1/27/2013	4:33:33 PM	Tube furnace set to 150
1/27/2013	4:34:03 PM	H2 valve closed
1/27/2013	4:34:03 PM	BCl3 valve closed
1/27/2013	4:34:03 PM	PH3 valve closed
1/27/2013	4:34:03 PM	SiCl4 pre valve closed
1/27/2013	4:34:03 PM	SiCl4 post valve closed
1/27/2013	4:34:03 PM	Bypass valve closed
1/27/2013	4:34:03 PM	Bubbler valve closed
1/27/2013	4:34:03 PM	Helium valve opened
1/27/2013	4:34:03 PM	Main Vac valve opened
1/27/2013	4:34:03 PM	Helium MFC set to  20.000000
1/27/2013	4:34:03 PM	H2 MFC set to  0.000000
1/27/2013	4:34:03 PM	BCl3 MFC set to  0.000000
1/27/2013	4:34:03 PM	PH3 MFC set to  0.000000
1/27/2013	4:34:03 PM	SiCl4 MFC set to  0.000000
1/27/2013	4:34:03 PM	Bypass solenoid MFC set to  0.000000
1/27/2013	4:34:03 PM	Tube furnace set to 150
1/27/2013	4:36:03 PM	Helium valve closed
1/27/2013	4:36:03 PM	H2 valve closed
1/27/2013	4:36:03 PM	BCl3 valve closed
1/27/2013	4:36:03 PM	PH3 valve closed
1/27/2013	4:36:03 PM	SiCl4 pre valve closed
1/27/2013	4:36:03 PM	SiCl4 post valve closed
1/27/2013	4:36:03 PM	Bypass valve closed
1/27/2013	4:36:03 PM	Bubbler valve closed
1/27/2013	4:36:03 PM	Main Vac valve opened
1/27/2013	4:36:03 PM	Helium MFC set to  0.000000
1/27/2013	4:36:03 PM	H2 MFC set to  0.000000
1/27/2013	4:36:03 PM	BCl3 MFC set to  0.000000
1/27/2013	4:36:03 PM	PH3 MFC set to  0.000000
1/27/2013	4:36:03 PM	SiCl4 MFC set to  0.000000
1/27/2013	4:36:03 PM	Bypass solenoid MFC set to  0.000000
1/27/2013	4:36:03 PM	Tube furnace set to 150
1/27/2013	4:36:04 PM	Run finished at 4:36 PM
1/27/2013	4:36:41 PM	Recipe started at 4:36 PM
1/27/2013	4:36:41 PM	Helium valve closed
1/27/2013	4:36:41 PM	H2 valve closed
1/27/2013	4:36:41 PM	BCl3 valve closed
1/27/2013	4:36:41 PM	PH3 valve closed
1/27/2013	4:36:41 PM	SiCl4 pre valve closed
1/27/2013	4:36:41 PM	SiCl4 post valve closed
1/27/2013	4:36:41 PM	Bypass valve closed
1/27/2013	4:36:41 PM	Bubbler valve closed
1/27/2013	4:36:41 PM	Main Vac valve opened
1/27/2013	4:36:41 PM	Helium MFC set to  0.000000
1/27/2013	4:36:41 PM	H2 MFC set to  0.000000
1/27/2013	4:36:41 PM	BCl3 MFC set to  0.000000
1/27/2013	4:36:41 PM	PH3 MFC set to  0.000000
1/27/2013	4:36:41 PM	SiCl4 MFC set to  0.000000
1/27/2013	4:36:41 PM	Bypass solenoid MFC set to  0.000000
1/27/2013	4:36:41 PM	Tube furnace set to 150
1/27/2013	4:37:11 PM	H2 valve closed
1/27/2013	4:37:11 PM	BCl3 valve closed
1/27/2013	4:37:11 PM	PH3 valve closed
1/27/2013	4:37:11 PM	SiCl4 pre valve closed
1/27/2013	4:37:11 PM	SiCl4 post valve closed
1/27/2013	4:37:11 PM	Bypass valve closed
1/27/2013	4:37:11 PM	Bubbler valve closed
1/27/2013	4:37:11 PM	Helium valve opened
1/27/2013	4:37:11 PM	Main Vac valve opened
1/27/2013	4:37:11 PM	Helium MFC set to  20.000000
1/27/2013	4:37:11 PM	H2 MFC set to  0.000000
1/27/2013	4:37:11 PM	BCl3 MFC set to  0.000000
1/27/2013	4:37:11 PM	PH3 MFC set to  0.000000
1/27/2013	4:37:11 PM	SiCl4 MFC set to  0.000000
1/27/2013	4:37:11 PM	Bypass solenoid MFC set to  0.000000
1/27/2013	4:37:11 PM	Tube furnace set to 150
1/27/2013	4:37:41 PM	Helium valve closed
1/27/2013	4:37:42 PM	H2 valve closed
1/27/2013	4:37:42 PM	BCl3 valve closed
1/27/2013	4:37:42 PM	PH3 valve closed
1/27/2013	4:37:42 PM	SiCl4 pre valve closed
1/27/2013	4:37:42 PM	SiCl4 post valve closed
1/27/2013	4:37:42 PM	Bypass valve closed
1/27/2013	4:37:42 PM	Bubbler valve closed
1/27/2013	4:37:42 PM	Main Vac valve opened
1/27/2013	4:37:42 PM	Helium MFC set to  0.000000
1/27/2013	4:37:42 PM	H2 MFC set to  0.000000
1/27/2013	4:37:42 PM	BCl3 MFC set to  0.000000
1/27/2013	4:37:42 PM	PH3 MFC set to  0.000000
1/27/2013	4:37:42 PM	SiCl4 MFC set to  0.000000
1/27/2013	4:37:42 PM	Bypass solenoid MFC set to  0.000000
1/27/2013	4:37:42 PM	Tube furnace set to 150
1/27/2013	4:38:12 PM	H2 valve closed
1/27/2013	4:38:12 PM	BCl3 valve closed
1/27/2013	4:38:12 PM	PH3 valve closed
1/27/2013	4:38:12 PM	SiCl4 pre valve closed
1/27/2013	4:38:12 PM	SiCl4 post valve closed
1/27/2013	4:38:12 PM	Bypass valve closed
1/27/2013	4:38:12 PM	Bubbler valve closed
1/27/2013	4:38:12 PM	Helium valve opened
1/27/2013	4:38:12 PM	Main Vac valve opened
1/27/2013	4:38:12 PM	Helium MFC set to  20.000000
1/27/2013	4:38:12 PM	H2 MFC set to  0.000000
1/27/2013	4:38:12 PM	BCl3 MFC set to  0.000000
1/27/2013	4:38:12 PM	PH3 MFC set to  0.000000
1/27/2013	4:38:12 PM	SiCl4 MFC set to  0.000000
1/27/2013	4:38:12 PM	Bypass solenoid MFC set to  0.000000
1/27/2013	4:38:12 PM	Tube furnace set to 150
1/27/2013	4:38:42 PM	Helium valve closed
1/27/2013	4:38:42 PM	H2 valve closed
1/27/2013	4:38:42 PM	BCl3 valve closed
1/27/2013	4:38:42 PM	PH3 valve closed
1/27/2013	4:38:42 PM	SiCl4 pre valve closed
1/27/2013	4:38:42 PM	SiCl4 post valve closed
1/27/2013	4:38:42 PM	Bypass valve closed
1/27/2013	4:38:42 PM	Bubbler valve closed
1/27/2013	4:38:42 PM	Main Vac valve opened
1/27/2013	4:38:42 PM	Helium MFC set to  0.000000
1/27/2013	4:38:42 PM	H2 MFC set to  0.000000
1/27/2013	4:38:42 PM	BCl3 MFC set to  0.000000
1/27/2013	4:38:42 PM	PH3 MFC set to  0.000000
1/27/2013	4:38:42 PM	SiCl4 MFC set to  0.000000
1/27/2013	4:38:42 PM	Bypass solenoid MFC set to  0.000000
1/27/2013	4:38:42 PM	Tube furnace set to 150
1/27/2013	4:39:12 PM	H2 valve closed
1/27/2013	4:39:12 PM	BCl3 valve closed
1/27/2013	4:39:12 PM	PH3 valve closed
1/27/2013	4:39:12 PM	SiCl4 pre valve closed
1/27/2013	4:39:12 PM	SiCl4 post valve closed
1/27/2013	4:39:12 PM	Bypass valve closed
1/27/2013	4:39:12 PM	Bubbler valve closed
1/27/2013	4:39:12 PM	Helium valve opened
1/27/2013	4:39:12 PM	Main Vac valve opened
1/27/2013	4:39:12 PM	Helium MFC set to  20.000000
1/27/2013	4:39:12 PM	H2 MFC set to  0.000000
1/27/2013	4:39:12 PM	BCl3 MFC set to  0.000000
1/27/2013	4:39:12 PM	PH3 MFC set to  0.000000
1/27/2013	4:39:12 PM	SiCl4 MFC set to  0.000000
1/27/2013	4:39:12 PM	Bypass solenoid MFC set to  0.000000
1/27/2013	4:39:12 PM	Tube furnace set to 150
1/27/2013	4:41:12 PM	Helium valve closed
1/27/2013	4:41:12 PM	H2 valve closed
1/27/2013	4:41:12 PM	BCl3 valve closed
1/27/2013	4:41:12 PM	PH3 valve closed
1/27/2013	4:41:12 PM	SiCl4 pre valve closed
1/27/2013	4:41:13 PM	SiCl4 post valve closed
1/27/2013	4:41:13 PM	Bypass valve closed
1/27/2013	4:41:13 PM	Bubbler valve closed
1/27/2013	4:41:13 PM	Main Vac valve opened
1/27/2013	4:41:13 PM	Helium MFC set to  0.000000
1/27/2013	4:41:13 PM	H2 MFC set to  0.000000
1/27/2013	4:41:13 PM	BCl3 MFC set to  0.000000
1/27/2013	4:41:13 PM	PH3 MFC set to  0.000000
1/27/2013	4:41:13 PM	SiCl4 MFC set to  0.000000
1/27/2013	4:41:13 PM	Bypass solenoid MFC set to  0.000000
1/27/2013	4:41:13 PM	Tube furnace set to 150
1/27/2013	4:41:43 PM	H2 valve closed
1/27/2013	4:41:43 PM	BCl3 valve closed
1/27/2013	4:41:43 PM	PH3 valve closed
1/27/2013	4:41:43 PM	SiCl4 pre valve closed
1/27/2013	4:41:43 PM	SiCl4 post valve closed
1/27/2013	4:41:43 PM	Bypass valve closed
1/27/2013	4:41:43 PM	Bubbler valve closed
1/27/2013	4:41:43 PM	Helium valve opened
1/27/2013	4:41:43 PM	Main Vac valve opened
1/27/2013	4:41:43 PM	Helium MFC set to  20.000000
1/27/2013	4:41:43 PM	H2 MFC set to  0.000000
1/27/2013	4:41:43 PM	BCl3 MFC set to  0.000000
1/27/2013	4:41:43 PM	PH3 MFC set to  0.000000
1/27/2013	4:41:43 PM	SiCl4 MFC set to  0.000000
1/27/2013	4:41:43 PM	Bypass solenoid MFC set to  0.000000
1/27/2013	4:41:43 PM	Tube furnace set to 150
1/27/2013	4:42:13 PM	Helium valve closed
1/27/2013	4:42:13 PM	H2 valve closed
1/27/2013	4:42:13 PM	BCl3 valve closed
1/27/2013	4:42:13 PM	PH3 valve closed
1/27/2013	4:42:13 PM	SiCl4 pre valve closed
1/27/2013	4:42:13 PM	SiCl4 post valve closed
1/27/2013	4:42:13 PM	Bypass valve closed
1/27/2013	4:42:13 PM	Bubbler valve closed
1/27/2013	4:42:13 PM	Main Vac valve opened
1/27/2013	4:42:13 PM	Helium MFC set to  0.000000
1/27/2013	4:42:13 PM	H2 MFC set to  0.000000
1/27/2013	4:42:13 PM	BCl3 MFC set to  0.000000
1/27/2013	4:42:13 PM	PH3 MFC set to  0.000000
1/27/2013	4:42:13 PM	SiCl4 MFC set to  0.000000
1/27/2013	4:42:13 PM	Bypass solenoid MFC set to  0.000000
1/27/2013	4:42:13 PM	Tube furnace set to 150
1/27/2013	4:42:43 PM	H2 valve closed
1/27/2013	4:42:43 PM	BCl3 valve closed
1/27/2013	4:42:43 PM	PH3 valve closed
1/27/2013	4:42:43 PM	SiCl4 pre valve closed
1/27/2013	4:42:43 PM	SiCl4 post valve closed
1/27/2013	4:42:43 PM	Bypass valve closed
1/27/2013	4:42:43 PM	Bubbler valve closed
1/27/2013	4:42:43 PM	Helium valve opened
1/27/2013	4:42:43 PM	Main Vac valve opened
1/27/2013	4:42:43 PM	Helium MFC set to  20.000000
1/27/2013	4:42:43 PM	H2 MFC set to  0.000000
1/27/2013	4:42:43 PM	BCl3 MFC set to  0.000000
1/27/2013	4:42:43 PM	PH3 MFC set to  0.000000
1/27/2013	4:42:43 PM	SiCl4 MFC set to  0.000000
1/27/2013	4:42:43 PM	Bypass solenoid MFC set to  0.000000
1/27/2013	4:42:43 PM	Tube furnace set to 150
1/27/2013	4:43:13 PM	Helium valve closed
1/27/2013	4:43:13 PM	H2 valve closed
1/27/2013	4:43:13 PM	BCl3 valve closed
1/27/2013	4:43:13 PM	PH3 valve closed
1/27/2013	4:43:13 PM	SiCl4 pre valve closed
1/27/2013	4:43:13 PM	SiCl4 post valve closed
1/27/2013	4:43:13 PM	Bypass valve closed
1/27/2013	4:43:13 PM	Bubbler valve closed
1/27/2013	4:43:13 PM	Main Vac valve opened
1/27/2013	4:43:13 PM	Helium MFC set to  0.000000
1/27/2013	4:43:14 PM	H2 MFC set to  0.000000
1/27/2013	4:43:14 PM	BCl3 MFC set to  0.000000
1/27/2013	4:43:14 PM	PH3 MFC set to  0.000000
1/27/2013	4:43:14 PM	SiCl4 MFC set to  0.000000
1/27/2013	4:43:14 PM	Bypass solenoid MFC set to  0.000000
1/27/2013	4:43:14 PM	Tube furnace set to 150
1/27/2013	4:43:44 PM	H2 valve closed
1/27/2013	4:43:44 PM	BCl3 valve closed
1/27/2013	4:43:44 PM	PH3 valve closed
1/27/2013	4:43:44 PM	SiCl4 pre valve closed
1/27/2013	4:43:44 PM	SiCl4 post valve closed
1/27/2013	4:43:44 PM	Bypass valve closed
1/27/2013	4:43:44 PM	Bubbler valve closed
1/27/2013	4:43:44 PM	Helium valve opened
1/27/2013	4:43:44 PM	Main Vac valve opened
1/27/2013	4:43:44 PM	Helium MFC set to  20.000000
1/27/2013	4:43:44 PM	H2 MFC set to  0.000000
1/27/2013	4:43:44 PM	BCl3 MFC set to  0.000000
1/27/2013	4:43:44 PM	PH3 MFC set to  0.000000
1/27/2013	4:43:44 PM	SiCl4 MFC set to  0.000000
1/27/2013	4:43:44 PM	Bypass solenoid MFC set to  0.000000
1/27/2013	4:43:44 PM	Tube furnace set to 150
1/27/2013	4:45:44 PM	Helium valve closed
1/27/2013	4:45:44 PM	H2 valve closed
1/27/2013	4:45:44 PM	BCl3 valve closed
1/27/2013	4:45:44 PM	PH3 valve closed
1/27/2013	4:45:44 PM	SiCl4 pre valve closed
1/27/2013	4:45:44 PM	SiCl4 post valve closed
1/27/2013	4:45:44 PM	Bypass valve closed
1/27/2013	4:45:44 PM	Bubbler valve closed
1/27/2013	4:45:44 PM	Main Vac valve opened
1/27/2013	4:45:44 PM	Helium MFC set to  0.000000
1/27/2013	4:45:44 PM	H2 MFC set to  0.000000
1/27/2013	4:45:44 PM	BCl3 MFC set to  0.000000
1/27/2013	4:45:44 PM	PH3 MFC set to  0.000000
1/27/2013	4:45:44 PM	SiCl4 MFC set to  0.000000
1/27/2013	4:45:44 PM	Bypass solenoid MFC set to  0.000000
1/27/2013	4:45:44 PM	Tube furnace set to 150
1/27/2013	4:46:14 PM	H2 valve closed
1/27/2013	4:46:14 PM	BCl3 valve closed
1/27/2013	4:46:14 PM	PH3 valve closed
1/27/2013	4:46:14 PM	SiCl4 pre valve closed
1/27/2013	4:46:14 PM	SiCl4 post valve closed
1/27/2013	4:46:14 PM	Bypass valve closed
1/27/2013	4:46:14 PM	Bubbler valve closed
1/27/2013	4:46:14 PM	Helium valve opened
1/27/2013	4:46:14 PM	Main Vac valve opened
1/27/2013	4:46:14 PM	Helium MFC set to  20.000000
1/27/2013	4:46:14 PM	H2 MFC set to  0.000000
1/27/2013	4:46:14 PM	BCl3 MFC set to  0.000000
1/27/2013	4:46:14 PM	PH3 MFC set to  0.000000
1/27/2013	4:46:14 PM	SiCl4 MFC set to  0.000000
1/27/2013	4:46:14 PM	Bypass solenoid MFC set to  0.000000
1/27/2013	4:46:14 PM	Tube furnace set to 150
1/27/2013	4:46:44 PM	Helium valve closed
1/27/2013	4:46:44 PM	H2 valve closed
1/27/2013	4:46:44 PM	BCl3 valve closed
1/27/2013	4:46:44 PM	PH3 valve closed
1/27/2013	4:46:44 PM	SiCl4 pre valve closed
1/27/2013	4:46:44 PM	SiCl4 post valve closed
1/27/2013	4:46:44 PM	Bypass valve closed
1/27/2013	4:46:44 PM	Bubbler valve closed
1/27/2013	4:46:44 PM	Main Vac valve opened
1/27/2013	4:46:44 PM	Helium MFC set to  0.000000
1/27/2013	4:46:44 PM	H2 MFC set to  0.000000
1/27/2013	4:46:44 PM	BCl3 MFC set to  0.000000
1/27/2013	4:46:44 PM	PH3 MFC set to  0.000000
1/27/2013	4:46:44 PM	SiCl4 MFC set to  0.000000
1/27/2013	4:46:44 PM	Bypass solenoid MFC set to  0.000000
1/27/2013	4:46:45 PM	Tube furnace set to 150
1/27/2013	4:47:15 PM	H2 valve closed
1/27/2013	4:47:15 PM	BCl3 valve closed
1/27/2013	4:47:15 PM	PH3 valve closed
1/27/2013	4:47:15 PM	SiCl4 pre valve closed
1/27/2013	4:47:15 PM	SiCl4 post valve closed
1/27/2013	4:47:15 PM	Bypass valve closed
1/27/2013	4:47:15 PM	Bubbler valve closed
1/27/2013	4:47:15 PM	Helium valve opened
1/27/2013	4:47:15 PM	Main Vac valve opened
1/27/2013	4:47:15 PM	Helium MFC set to  20.000000
1/27/2013	4:47:15 PM	H2 MFC set to  0.000000
1/27/2013	4:47:15 PM	BCl3 MFC set to  0.000000
1/27/2013	4:47:15 PM	PH3 MFC set to  0.000000
1/27/2013	4:47:15 PM	SiCl4 MFC set to  0.000000
1/27/2013	4:47:15 PM	Bypass solenoid MFC set to  0.000000
1/27/2013	4:47:15 PM	Tube furnace set to 150
1/27/2013	4:49:15 PM	Helium valve closed
1/27/2013	4:49:15 PM	H2 valve closed
1/27/2013	4:49:15 PM	BCl3 valve closed
1/27/2013	4:49:15 PM	PH3 valve closed
1/27/2013	4:49:15 PM	SiCl4 pre valve closed
1/27/2013	4:49:15 PM	SiCl4 post valve closed
1/27/2013	4:49:15 PM	Bypass valve closed
1/27/2013	4:49:15 PM	Bubbler valve closed
1/27/2013	4:49:15 PM	Main Vac valve opened
1/27/2013	4:49:15 PM	Helium MFC set to  0.000000
1/27/2013	4:49:15 PM	H2 MFC set to  0.000000
1/27/2013	4:49:15 PM	BCl3 MFC set to  0.000000
1/27/2013	4:49:15 PM	PH3 MFC set to  0.000000
1/27/2013	4:49:15 PM	SiCl4 MFC set to  0.000000
1/27/2013	4:49:15 PM	Bypass solenoid MFC set to  0.000000
1/27/2013	4:49:15 PM	Tube furnace set to 150
1/27/2013	4:49:45 PM	H2 valve closed
1/27/2013	4:49:45 PM	BCl3 valve closed
1/27/2013	4:49:45 PM	PH3 valve closed
1/27/2013	4:49:45 PM	SiCl4 pre valve closed
1/27/2013	4:49:45 PM	SiCl4 post valve closed
1/27/2013	4:49:45 PM	Bypass valve closed
1/27/2013	4:49:45 PM	Bubbler valve closed
1/27/2013	4:49:45 PM	Helium valve opened
1/27/2013	4:49:45 PM	Main Vac valve opened
1/27/2013	4:49:45 PM	Helium MFC set to  20.000000
1/27/2013	4:49:45 PM	H2 MFC set to  0.000000
1/27/2013	4:49:45 PM	BCl3 MFC set to  0.000000
1/27/2013	4:49:45 PM	PH3 MFC set to  0.000000
1/27/2013	4:49:45 PM	SiCl4 MFC set to  0.000000
1/27/2013	4:49:45 PM	Bypass solenoid MFC set to  0.000000
1/27/2013	4:49:45 PM	Tube furnace set to 150
1/27/2013	4:50:15 PM	Helium valve closed
1/27/2013	4:50:15 PM	H2 valve closed
1/27/2013	4:50:15 PM	BCl3 valve closed
1/27/2013	4:50:15 PM	PH3 valve closed
1/27/2013	4:50:15 PM	SiCl4 pre valve closed
1/27/2013	4:50:15 PM	SiCl4 post valve closed
1/27/2013	4:50:15 PM	Bypass valve closed
1/27/2013	4:50:15 PM	Bubbler valve closed
1/27/2013	4:50:15 PM	Main Vac valve opened
1/27/2013	4:50:15 PM	Helium MFC set to  0.000000
1/27/2013	4:50:15 PM	H2 MFC set to  0.000000
1/27/2013	4:50:15 PM	BCl3 MFC set to  0.000000
1/27/2013	4:50:15 PM	PH3 MFC set to  0.000000
1/27/2013	4:50:15 PM	SiCl4 MFC set to  0.000000
1/27/2013	4:50:15 PM	Bypass solenoid MFC set to  0.000000
1/27/2013	4:50:16 PM	Tube furnace set to 150
1/27/2013	4:50:46 PM	H2 valve closed
1/27/2013	4:50:46 PM	BCl3 valve closed
1/27/2013	4:50:46 PM	PH3 valve closed
1/27/2013	4:50:46 PM	SiCl4 pre valve closed
1/27/2013	4:50:46 PM	SiCl4 post valve closed
1/27/2013	4:50:46 PM	Bypass valve closed
1/27/2013	4:50:46 PM	Bubbler valve closed
1/27/2013	4:50:46 PM	Helium valve opened
1/27/2013	4:50:46 PM	Main Vac valve opened
1/27/2013	4:50:46 PM	Helium MFC set to  20.000000
1/27/2013	4:50:46 PM	H2 MFC set to  0.000000
1/27/2013	4:50:46 PM	BCl3 MFC set to  0.000000
1/27/2013	4:50:46 PM	PH3 MFC set to  0.000000
1/27/2013	4:50:46 PM	SiCl4 MFC set to  0.000000
1/27/2013	4:50:46 PM	Bypass solenoid MFC set to  0.000000
1/27/2013	4:50:46 PM	Tube furnace set to 150
1/27/2013	4:52:46 PM	Helium valve closed
1/27/2013	4:52:46 PM	H2 valve closed
1/27/2013	4:52:46 PM	BCl3 valve closed
1/27/2013	4:52:46 PM	PH3 valve closed
1/27/2013	4:52:46 PM	SiCl4 pre valve closed
1/27/2013	4:52:46 PM	SiCl4 post valve closed
1/27/2013	4:52:46 PM	Bypass valve closed
1/27/2013	4:52:46 PM	Bubbler valve closed
1/27/2013	4:52:46 PM	Main Vac valve opened
1/27/2013	4:52:46 PM	Helium MFC set to  0.000000
1/27/2013	4:52:46 PM	H2 MFC set to  0.000000
1/27/2013	4:52:46 PM	BCl3 MFC set to  0.000000
1/27/2013	4:52:46 PM	PH3 MFC set to  0.000000
1/27/2013	4:52:46 PM	SiCl4 MFC set to  0.000000
1/27/2013	4:52:46 PM	Bypass solenoid MFC set to  0.000000
1/27/2013	4:52:46 PM	Tube furnace set to 150
1/27/2013	4:52:47 PM	Run finished at 4:52 PM
1/27/2013	4:54:42 PM	Recipe started at 4:54 PM
1/27/2013	4:54:42 PM	Helium valve closed
1/27/2013	4:54:42 PM	H2 valve closed
1/27/2013	4:54:42 PM	BCl3 valve closed
1/27/2013	4:54:42 PM	PH3 valve closed
1/27/2013	4:54:42 PM	SiCl4 pre valve closed
1/27/2013	4:54:42 PM	SiCl4 post valve closed
1/27/2013	4:54:42 PM	Main Vac valve closed
1/27/2013	4:54:42 PM	Bypass valve closed
1/27/2013	4:54:43 PM	Bubbler valve closed
1/27/2013	4:54:43 PM	Helium MFC set to  0.000000
1/27/2013	4:54:43 PM	H2 MFC set to  0.000000
1/27/2013	4:54:43 PM	BCl3 MFC set to  0.000000
1/27/2013	4:54:43 PM	PH3 MFC set to  0.000000
1/27/2013	4:54:43 PM	SiCl4 MFC set to  0.000000
1/27/2013	4:54:43 PM	Bypass solenoid MFC set to  0.000000
1/27/2013	4:54:43 PM	Tube furnace set to 0
1/27/2013	4:54:46 PM	Helium valve closed
1/27/2013	4:54:46 PM	BCl3 valve closed
1/27/2013	4:54:46 PM	PH3 valve closed
1/27/2013	4:54:46 PM	SiCl4 pre valve closed
1/27/2013	4:54:46 PM	SiCl4 post valve closed
1/27/2013	4:54:46 PM	Main Vac valve closed
1/27/2013	4:54:46 PM	Bypass valve closed
1/27/2013	4:54:46 PM	Bubbler valve closed
1/27/2013	4:54:46 PM	H2 valve opened
1/27/2013	4:54:46 PM	Helium MFC set to  0.000000
1/27/2013	4:54:46 PM	H2 MFC set to  500.000000
1/27/2013	4:54:46 PM	BCl3 MFC set to  0.000000
1/27/2013	4:54:46 PM	PH3 MFC set to  0.000000
1/27/2013	4:54:46 PM	SiCl4 MFC set to  0.000000
1/27/2013	4:54:46 PM	Bypass solenoid MFC set to  0.000000
1/27/2013	4:54:46 PM	Tube furnace set to 0
1/27/2013	4:55:57 PM	Helium valve closed
1/27/2013	4:55:57 PM	BCl3 valve closed
1/27/2013	4:55:57 PM	PH3 valve closed
1/27/2013	4:55:57 PM	SiCl4 pre valve closed
1/27/2013	4:55:57 PM	SiCl4 post valve closed
1/27/2013	4:55:57 PM	Main Vac valve closed
1/27/2013	4:55:57 PM	Bypass valve closed
1/27/2013	4:55:57 PM	H2 valve opened
1/27/2013	4:55:57 PM	Bubbler valve opened
1/27/2013	4:55:57 PM	Helium MFC set to  0.000000
1/27/2013	4:55:57 PM	H2 MFC set to  500.000000
1/27/2013	4:55:57 PM	BCl3 MFC set to  0.000000
1/27/2013	4:55:57 PM	PH3 MFC set to  0.000000
1/27/2013	4:55:57 PM	SiCl4 MFC set to  0.000000
1/27/2013	4:55:57 PM	Bypass solenoid MFC set to  0.000000
1/27/2013	4:55:57 PM	Tube furnace set to 0
1/27/2013	4:55:58 PM	Helium valve closed
1/27/2013	4:55:58 PM	BCl3 valve closed
1/27/2013	4:55:58 PM	PH3 valve closed
1/27/2013	4:55:58 PM	SiCl4 pre valve closed
1/27/2013	4:55:58 PM	SiCl4 post valve closed
1/27/2013	4:55:58 PM	Main Vac valve closed
1/27/2013	4:55:58 PM	Bypass valve closed
1/27/2013	4:55:58 PM	H2 valve opened
1/27/2013	4:55:58 PM	Bubbler valve opened
1/27/2013	4:55:58 PM	Helium MFC set to  0.000000
1/27/2013	4:55:58 PM	H2 MFC set to  500.000000
1/27/2013	4:55:58 PM	BCl3 MFC set to  0.000000
1/27/2013	4:55:58 PM	PH3 MFC set to  0.000000
1/27/2013	4:55:58 PM	SiCl4 MFC set to  0.000000
1/27/2013	4:55:58 PM	Bypass solenoid MFC set to  0.000000
1/27/2013	4:55:58 PM	Tube furnace set to 1000
1/27/2013	5:15:58 PM	Helium valve closed
1/27/2013	5:15:58 PM	BCl3 valve closed
1/27/2013	5:15:58 PM	PH3 valve closed
1/27/2013	5:15:58 PM	Main Vac valve closed
1/27/2013	5:15:58 PM	Bypass valve closed
1/27/2013	5:15:58 PM	H2 valve opened
1/27/2013	5:15:58 PM	SiCl4 pre valve opened
1/27/2013	5:15:58 PM	SiCl4 post valve opened
1/27/2013	5:15:58 PM	Bubbler valve opened
1/27/2013	5:15:58 PM	Helium MFC set to  0.000000
1/27/2013	5:15:58 PM	H2 MFC set to  500.000000
1/27/2013	5:15:58 PM	BCl3 MFC set to  0.000000
1/27/2013	5:15:58 PM	PH3 MFC set to  0.000000
1/27/2013	5:15:58 PM	SiCl4 MFC set to  50.000000
1/27/2013	5:15:58 PM	Bypass solenoid MFC set to  0.000000
1/27/2013	5:15:58 PM	Tube furnace set to 1000
1/27/2013	5:27:58 PM	Helium valve closed
1/27/2013	5:27:58 PM	BCl3 valve closed
1/27/2013	5:27:58 PM	PH3 valve closed
1/27/2013	5:27:58 PM	SiCl4 pre valve closed
1/27/2013	5:27:58 PM	SiCl4 post valve closed
1/27/2013	5:27:58 PM	Main Vac valve closed
1/27/2013	5:27:58 PM	Bypass valve closed
1/27/2013	5:27:58 PM	H2 valve opened
1/27/2013	5:27:58 PM	Bubbler valve opened
1/27/2013	5:27:58 PM	Helium MFC set to  0.000000
1/27/2013	5:27:58 PM	H2 MFC set to  500.000000
1/27/2013	5:27:58 PM	BCl3 MFC set to  0.000000
1/27/2013	5:27:58 PM	PH3 MFC set to  0.000000
1/27/2013	5:27:58 PM	SiCl4 MFC set to  0.000000
1/27/2013	5:27:58 PM	Bypass solenoid MFC set to  0.000000
1/27/2013	5:27:59 PM	Tube furnace set to 750
1/27/2013	5:32:59 PM	H2 valve closed
1/27/2013	5:32:59 PM	BCl3 valve closed
1/27/2013	5:32:59 PM	PH3 valve closed
1/27/2013	5:32:59 PM	SiCl4 pre valve closed
1/27/2013	5:32:59 PM	SiCl4 post valve closed
1/27/2013	5:32:59 PM	Main Vac valve closed
1/27/2013	5:32:59 PM	Bypass valve closed
1/27/2013	5:32:59 PM	Helium valve opened
1/27/2013	5:32:59 PM	Bubbler valve opened
1/27/2013	5:32:59 PM	Helium MFC set to  500.000000
1/27/2013	5:32:59 PM	H2 MFC set to  0.000000
1/27/2013	5:32:59 PM	BCl3 MFC set to  0.000000
1/27/2013	5:32:59 PM	PH3 MFC set to  0.000000
1/27/2013	5:32:59 PM	SiCl4 MFC set to  0.000000
1/27/2013	5:32:59 PM	Bypass solenoid MFC set to  0.000000
1/27/2013	5:32:59 PM	Tube furnace set to 0
1/27/2013	5:52:59 PM	Helium valve closed
1/27/2013	5:52:59 PM	H2 valve closed
1/27/2013	5:52:59 PM	BCl3 valve closed
1/27/2013	5:52:59 PM	PH3 valve closed
1/27/2013	5:52:59 PM	SiCl4 pre valve closed
1/27/2013	5:52:59 PM	SiCl4 post valve closed
1/27/2013	5:52:59 PM	Main Vac valve closed
1/27/2013	5:52:59 PM	Bypass valve closed
1/27/2013	5:52:59 PM	Bubbler valve closed
1/27/2013	5:52:59 PM	Helium MFC set to  0.000000
1/27/2013	5:52:59 PM	H2 MFC set to  0.000000
1/27/2013	5:52:59 PM	BCl3 MFC set to  0.000000
1/27/2013	5:52:59 PM	PH3 MFC set to  0.000000
1/27/2013	5:52:59 PM	SiCl4 MFC set to  0.000000
1/27/2013	5:52:59 PM	Bypass solenoid MFC set to  0.000000
1/27/2013	5:52:59 PM	Tube furnace set to 0
1/27/2013	5:53:00 PM	Run finished at 5:53 PM
1/27/2013	6:19:11 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/27/2013	6:19:12 PM	Recipe started at 6:19 PM
1/27/2013	6:19:12 PM	Helium valve closed
1/27/2013	6:19:12 PM	H2 valve closed
1/27/2013	6:19:12 PM	BCl3 valve closed
1/27/2013	6:19:12 PM	PH3 valve closed
1/27/2013	6:19:12 PM	SiCl4 pre valve closed
1/27/2013	6:19:12 PM	SiCl4 post valve closed
1/27/2013	6:19:12 PM	Main Vac valve closed
1/27/2013	6:19:12 PM	Bypass valve closed
1/27/2013	6:19:12 PM	Bubbler valve closed
1/27/2013	6:19:12 PM	Helium MFC set to  0.000000
1/27/2013	6:19:12 PM	H2 MFC set to  0.000000
1/27/2013	6:19:12 PM	BCl3 MFC set to  0.000000
1/27/2013	6:19:12 PM	PH3 MFC set to  0.000000
1/27/2013	6:19:12 PM	SiCl4 MFC set to  0.000000
1/27/2013	6:19:12 PM	Bypass solenoid MFC set to  0.000000
1/27/2013	6:19:12 PM	Tube furnace set to 0
1/27/2013	6:19:15 PM	H2 valve closed
1/27/2013	6:19:15 PM	BCl3 valve closed
1/27/2013	6:19:15 PM	PH3 valve closed
1/27/2013	6:19:15 PM	SiCl4 pre valve closed
1/27/2013	6:19:15 PM	SiCl4 post valve closed
1/27/2013	6:19:15 PM	Main Vac valve closed
1/27/2013	6:19:15 PM	Bypass valve closed
1/27/2013	6:19:15 PM	Bubbler valve closed
1/27/2013	6:19:15 PM	Helium valve opened
1/27/2013	6:19:15 PM	Helium MFC set to  500.000000
1/27/2013	6:19:15 PM	H2 MFC set to  0.000000
1/27/2013	6:19:15 PM	BCl3 MFC set to  0.000000
1/27/2013	6:19:15 PM	PH3 MFC set to  0.000000
1/27/2013	6:19:15 PM	SiCl4 MFC set to  0.000000
1/27/2013	6:19:15 PM	Bypass solenoid MFC set to  0.000000
1/27/2013	6:19:15 PM	Tube furnace set to 0
1/27/2013	6:19:18 PM	Helium valve closed
1/27/2013	6:19:18 PM	H2 valve closed
1/27/2013	6:19:18 PM	BCl3 valve closed
1/27/2013	6:19:18 PM	PH3 valve closed
1/27/2013	6:19:18 PM	SiCl4 pre valve closed
1/27/2013	6:19:18 PM	SiCl4 post valve closed
1/27/2013	6:19:18 PM	Main Vac valve closed
1/27/2013	6:19:18 PM	Bypass valve closed
1/27/2013	6:19:18 PM	Bubbler valve closed
1/27/2013	6:19:18 PM	Helium MFC set to  0.000000
1/27/2013	6:19:18 PM	H2 MFC set to  0.000000
1/27/2013	6:19:18 PM	BCl3 MFC set to  0.000000
1/27/2013	6:19:18 PM	PH3 MFC set to  0.000000
1/27/2013	6:19:18 PM	SiCl4 MFC set to  0.000000
1/27/2013	6:19:18 PM	Bypass solenoid MFC set to  0.000000
1/27/2013	6:19:18 PM	Tube furnace set to 0
1/27/2013	6:19:19 PM	Run finished at 6:19 PM
1/27/2013	6:19:19 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/27/2013	6:21:30 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/27/2013	6:21:31 PM	Recipe started at 6:21 PM
1/27/2013	6:21:31 PM	Helium valve closed
1/27/2013	6:21:31 PM	H2 valve closed
1/27/2013	6:21:31 PM	BCl3 valve closed
1/27/2013	6:21:31 PM	PH3 valve closed
1/27/2013	6:21:31 PM	SiCl4 pre valve closed
1/27/2013	6:21:31 PM	SiCl4 post valve closed
1/27/2013	6:21:31 PM	Main Vac valve closed
1/27/2013	6:21:31 PM	Bubbler valve closed
1/27/2013	6:21:31 PM	Bypass valve opened
1/27/2013	6:21:31 PM	Helium MFC set to  0.000000
1/27/2013	6:21:31 PM	H2 MFC set to  0.000000
1/27/2013	6:21:31 PM	BCl3 MFC set to  0.000000
1/27/2013	6:21:31 PM	PH3 MFC set to  0.000000
1/27/2013	6:21:31 PM	SiCl4 MFC set to  0.000000
1/27/2013	6:21:31 PM	Bypass solenoid MFC set to  0.000000
1/27/2013	6:21:31 PM	Tube furnace set to 0
1/27/2013	6:22:36 PM	Helium valve closed
1/27/2013	6:22:36 PM	H2 valve closed
1/27/2013	6:22:36 PM	BCl3 valve closed
1/27/2013	6:22:36 PM	PH3 valve closed
1/27/2013	6:22:36 PM	SiCl4 pre valve closed
1/27/2013	6:22:36 PM	SiCl4 post valve closed
1/27/2013	6:22:36 PM	Main Vac valve closed
1/27/2013	6:22:36 PM	Bubbler valve closed
1/27/2013	6:22:36 PM	Bypass valve opened
1/27/2013	6:22:36 PM	Helium MFC set to  0.000000
1/27/2013	6:22:36 PM	H2 MFC set to  0.000000
1/27/2013	6:22:36 PM	BCl3 MFC set to  0.000000
1/27/2013	6:22:36 PM	PH3 MFC set to  0.000000
1/27/2013	6:22:36 PM	SiCl4 MFC set to  0.000000
1/27/2013	6:22:36 PM	Bypass solenoid MFC set to  0.000000
1/27/2013	6:22:36 PM	Tube furnace set to 0
1/27/2013	6:23:36 PM	Helium valve closed
1/27/2013	6:23:36 PM	H2 valve closed
1/27/2013	6:23:36 PM	BCl3 valve closed
1/27/2013	6:23:36 PM	PH3 valve closed
1/27/2013	6:23:36 PM	SiCl4 pre valve closed
1/27/2013	6:23:36 PM	SiCl4 post valve closed
1/27/2013	6:23:36 PM	Bypass valve closed
1/27/2013	6:23:36 PM	Bubbler valve closed
1/27/2013	6:23:36 PM	Main Vac valve opened
1/27/2013	6:23:36 PM	Helium MFC set to  0.000000
1/27/2013	6:23:36 PM	H2 MFC set to  0.000000
1/27/2013	6:23:36 PM	BCl3 MFC set to  0.000000
1/27/2013	6:23:36 PM	PH3 MFC set to  0.000000
1/27/2013	6:23:36 PM	SiCl4 MFC set to  0.000000
1/27/2013	6:23:36 PM	Bypass solenoid MFC set to  0.000000
1/27/2013	6:23:37 PM	Tube furnace set to 0
1/27/2013	6:23:38 PM	Run finished at 6:23 PM
1/27/2013	6:23:38 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/27/2013	6:24:13 PM	Recipe started at 6:24 PM
1/27/2013	6:24:13 PM	Helium valve closed
1/27/2013	6:24:13 PM	H2 valve closed
1/27/2013	6:24:13 PM	BCl3 valve closed
1/27/2013	6:24:13 PM	PH3 valve closed
1/27/2013	6:24:13 PM	SiCl4 pre valve closed
1/27/2013	6:24:13 PM	SiCl4 post valve closed
1/27/2013	6:24:13 PM	Bypass valve closed
1/27/2013	6:24:13 PM	Bubbler valve closed
1/27/2013	6:24:13 PM	Main Vac valve opened
1/27/2013	6:24:13 PM	Helium MFC set to  0.000000
1/27/2013	6:24:13 PM	H2 MFC set to  0.000000
1/27/2013	6:24:13 PM	BCl3 MFC set to  0.000000
1/27/2013	6:24:13 PM	PH3 MFC set to  0.000000
1/27/2013	6:24:13 PM	SiCl4 MFC set to  0.000000
1/27/2013	6:24:13 PM	Bypass solenoid MFC set to  0.000000
1/27/2013	6:24:14 PM	Tube furnace set to 150
1/27/2013	6:24:44 PM	H2 valve closed
1/27/2013	6:24:44 PM	BCl3 valve closed
1/27/2013	6:24:44 PM	PH3 valve closed
1/27/2013	6:24:44 PM	SiCl4 pre valve closed
1/27/2013	6:24:44 PM	SiCl4 post valve closed
1/27/2013	6:24:44 PM	Bypass valve closed
1/27/2013	6:24:44 PM	Bubbler valve closed
1/27/2013	6:24:44 PM	Helium valve opened
1/27/2013	6:24:44 PM	Main Vac valve opened
1/27/2013	6:24:44 PM	Helium MFC set to  20.000000
1/27/2013	6:24:44 PM	H2 MFC set to  0.000000
1/27/2013	6:24:44 PM	BCl3 MFC set to  0.000000
1/27/2013	6:24:44 PM	PH3 MFC set to  0.000000
1/27/2013	6:24:44 PM	SiCl4 MFC set to  0.000000
1/27/2013	6:24:44 PM	Bypass solenoid MFC set to  0.000000
1/27/2013	6:24:44 PM	Tube furnace set to 150
1/27/2013	6:25:14 PM	Helium valve closed
1/27/2013	6:25:14 PM	H2 valve closed
1/27/2013	6:25:14 PM	BCl3 valve closed
1/27/2013	6:25:14 PM	PH3 valve closed
1/27/2013	6:25:14 PM	SiCl4 pre valve closed
1/27/2013	6:25:14 PM	SiCl4 post valve closed
1/27/2013	6:25:14 PM	Bypass valve closed
1/27/2013	6:25:14 PM	Bubbler valve closed
1/27/2013	6:25:14 PM	Main Vac valve opened
1/27/2013	6:25:14 PM	Helium MFC set to  0.000000
1/27/2013	6:25:14 PM	H2 MFC set to  0.000000
1/27/2013	6:25:14 PM	BCl3 MFC set to  0.000000
1/27/2013	6:25:14 PM	PH3 MFC set to  0.000000
1/27/2013	6:25:14 PM	SiCl4 MFC set to  0.000000
1/27/2013	6:25:14 PM	Bypass solenoid MFC set to  0.000000
1/27/2013	6:25:14 PM	Tube furnace set to 150
1/27/2013	6:25:44 PM	H2 valve closed
1/27/2013	6:25:44 PM	BCl3 valve closed
1/27/2013	6:25:44 PM	PH3 valve closed
1/27/2013	6:25:44 PM	SiCl4 pre valve closed
1/27/2013	6:25:44 PM	SiCl4 post valve closed
1/27/2013	6:25:44 PM	Bypass valve closed
1/27/2013	6:25:44 PM	Bubbler valve closed
1/27/2013	6:25:44 PM	Helium valve opened
1/27/2013	6:25:44 PM	Main Vac valve opened
1/27/2013	6:25:44 PM	Helium MFC set to  20.000000
1/27/2013	6:25:44 PM	H2 MFC set to  0.000000
1/27/2013	6:25:44 PM	BCl3 MFC set to  0.000000
1/27/2013	6:25:44 PM	PH3 MFC set to  0.000000
1/27/2013	6:25:44 PM	SiCl4 MFC set to  0.000000
1/27/2013	6:25:44 PM	Bypass solenoid MFC set to  0.000000
1/27/2013	6:25:44 PM	Tube furnace set to 150
1/27/2013	6:26:14 PM	Helium valve closed
1/27/2013	6:26:14 PM	H2 valve closed
1/27/2013	6:26:14 PM	BCl3 valve closed
1/27/2013	6:26:14 PM	PH3 valve closed
1/27/2013	6:26:14 PM	SiCl4 pre valve closed
1/27/2013	6:26:14 PM	SiCl4 post valve closed
1/27/2013	6:26:14 PM	Bypass valve closed
1/27/2013	6:26:14 PM	Bubbler valve closed
1/27/2013	6:26:14 PM	Main Vac valve opened
1/27/2013	6:26:14 PM	Helium MFC set to  0.000000
1/27/2013	6:26:14 PM	H2 MFC set to  0.000000
1/27/2013	6:26:14 PM	BCl3 MFC set to  0.000000
1/27/2013	6:26:14 PM	PH3 MFC set to  0.000000
1/27/2013	6:26:14 PM	SiCl4 MFC set to  0.000000
1/27/2013	6:26:14 PM	Bypass solenoid MFC set to  0.000000
1/27/2013	6:26:15 PM	Tube furnace set to 150
1/27/2013	6:26:45 PM	H2 valve closed
1/27/2013	6:26:45 PM	BCl3 valve closed
1/27/2013	6:26:45 PM	PH3 valve closed
1/27/2013	6:26:45 PM	SiCl4 pre valve closed
1/27/2013	6:26:45 PM	SiCl4 post valve closed
1/27/2013	6:26:45 PM	Bypass valve closed
1/27/2013	6:26:45 PM	Bubbler valve closed
1/27/2013	6:26:45 PM	Helium valve opened
1/27/2013	6:26:45 PM	Main Vac valve opened
1/27/2013	6:26:45 PM	Helium MFC set to  20.000000
1/27/2013	6:26:45 PM	H2 MFC set to  0.000000
1/27/2013	6:26:45 PM	BCl3 MFC set to  0.000000
1/27/2013	6:26:45 PM	PH3 MFC set to  0.000000
1/27/2013	6:26:45 PM	SiCl4 MFC set to  0.000000
1/27/2013	6:26:45 PM	Bypass solenoid MFC set to  0.000000
1/27/2013	6:26:45 PM	Tube furnace set to 150
1/27/2013	6:28:45 PM	Helium valve closed
1/27/2013	6:28:45 PM	H2 valve closed
1/27/2013	6:28:45 PM	BCl3 valve closed
1/27/2013	6:28:45 PM	PH3 valve closed
1/27/2013	6:28:45 PM	SiCl4 pre valve closed
1/27/2013	6:28:45 PM	SiCl4 post valve closed
1/27/2013	6:28:45 PM	Bypass valve closed
1/27/2013	6:28:45 PM	Bubbler valve closed
1/27/2013	6:28:45 PM	Main Vac valve opened
1/27/2013	6:28:45 PM	Helium MFC set to  0.000000
1/27/2013	6:28:45 PM	H2 MFC set to  0.000000
1/27/2013	6:28:45 PM	BCl3 MFC set to  0.000000
1/27/2013	6:28:45 PM	PH3 MFC set to  0.000000
1/27/2013	6:28:45 PM	SiCl4 MFC set to  0.000000
1/27/2013	6:28:45 PM	Bypass solenoid MFC set to  0.000000
1/27/2013	6:28:45 PM	Tube furnace set to 150
1/27/2013	6:29:15 PM	H2 valve closed
1/27/2013	6:29:15 PM	BCl3 valve closed
1/27/2013	6:29:15 PM	PH3 valve closed
1/27/2013	6:29:15 PM	SiCl4 pre valve closed
1/27/2013	6:29:15 PM	SiCl4 post valve closed
1/27/2013	6:29:15 PM	Bypass valve closed
1/27/2013	6:29:15 PM	Bubbler valve closed
1/27/2013	6:29:15 PM	Helium valve opened
1/27/2013	6:29:15 PM	Main Vac valve opened
1/27/2013	6:29:15 PM	Helium MFC set to  20.000000
1/27/2013	6:29:15 PM	H2 MFC set to  0.000000
1/27/2013	6:29:15 PM	BCl3 MFC set to  0.000000
1/27/2013	6:29:15 PM	PH3 MFC set to  0.000000
1/27/2013	6:29:15 PM	SiCl4 MFC set to  0.000000
1/27/2013	6:29:15 PM	Bypass solenoid MFC set to  0.000000
1/27/2013	6:29:15 PM	Tube furnace set to 150
1/27/2013	6:29:45 PM	Helium valve closed
1/27/2013	6:29:45 PM	H2 valve closed
1/27/2013	6:29:45 PM	BCl3 valve closed
1/27/2013	6:29:45 PM	PH3 valve closed
1/27/2013	6:29:45 PM	SiCl4 pre valve closed
1/27/2013	6:29:45 PM	SiCl4 post valve closed
1/27/2013	6:29:45 PM	Bypass valve closed
1/27/2013	6:29:45 PM	Bubbler valve closed
1/27/2013	6:29:45 PM	Main Vac valve opened
1/27/2013	6:29:45 PM	Helium MFC set to  0.000000
1/27/2013	6:29:45 PM	H2 MFC set to  0.000000
1/27/2013	6:29:45 PM	BCl3 MFC set to  0.000000
1/27/2013	6:29:45 PM	PH3 MFC set to  0.000000
1/27/2013	6:29:45 PM	SiCl4 MFC set to  0.000000
1/27/2013	6:29:45 PM	Bypass solenoid MFC set to  0.000000
1/27/2013	6:29:46 PM	Tube furnace set to 150
1/27/2013	6:30:16 PM	H2 valve closed
1/27/2013	6:30:16 PM	BCl3 valve closed
1/27/2013	6:30:16 PM	PH3 valve closed
1/27/2013	6:30:16 PM	SiCl4 pre valve closed
1/27/2013	6:30:16 PM	SiCl4 post valve closed
1/27/2013	6:30:16 PM	Bypass valve closed
1/27/2013	6:30:16 PM	Bubbler valve closed
1/27/2013	6:30:16 PM	Helium valve opened
1/27/2013	6:30:16 PM	Main Vac valve opened
1/27/2013	6:30:16 PM	Helium MFC set to  20.000000
1/27/2013	6:30:16 PM	H2 MFC set to  0.000000
1/27/2013	6:30:16 PM	BCl3 MFC set to  0.000000
1/27/2013	6:30:16 PM	PH3 MFC set to  0.000000
1/27/2013	6:30:16 PM	SiCl4 MFC set to  0.000000
1/27/2013	6:30:16 PM	Bypass solenoid MFC set to  0.000000
1/27/2013	6:30:16 PM	Tube furnace set to 150
1/27/2013	6:30:46 PM	Helium valve closed
1/27/2013	6:30:46 PM	H2 valve closed
1/27/2013	6:30:46 PM	BCl3 valve closed
1/27/2013	6:30:46 PM	PH3 valve closed
1/27/2013	6:30:46 PM	SiCl4 pre valve closed
1/27/2013	6:30:46 PM	SiCl4 post valve closed
1/27/2013	6:30:46 PM	Bypass valve closed
1/27/2013	6:30:46 PM	Bubbler valve closed
1/27/2013	6:30:46 PM	Main Vac valve opened
1/27/2013	6:30:46 PM	Helium MFC set to  0.000000
1/27/2013	6:30:46 PM	H2 MFC set to  0.000000
1/27/2013	6:30:46 PM	BCl3 MFC set to  0.000000
1/27/2013	6:30:46 PM	PH3 MFC set to  0.000000
1/27/2013	6:30:46 PM	SiCl4 MFC set to  0.000000
1/27/2013	6:30:46 PM	Bypass solenoid MFC set to  0.000000
1/27/2013	6:30:46 PM	Tube furnace set to 150
1/27/2013	6:31:16 PM	H2 valve closed
1/27/2013	6:31:16 PM	BCl3 valve closed
1/27/2013	6:31:16 PM	PH3 valve closed
1/27/2013	6:31:16 PM	SiCl4 pre valve closed
1/27/2013	6:31:16 PM	SiCl4 post valve closed
1/27/2013	6:31:16 PM	Bypass valve closed
1/27/2013	6:31:16 PM	Bubbler valve closed
1/27/2013	6:31:16 PM	Helium valve opened
1/27/2013	6:31:16 PM	Main Vac valve opened
1/27/2013	6:31:16 PM	Helium MFC set to  20.000000
1/27/2013	6:31:16 PM	H2 MFC set to  0.000000
1/27/2013	6:31:16 PM	BCl3 MFC set to  0.000000
1/27/2013	6:31:16 PM	PH3 MFC set to  0.000000
1/27/2013	6:31:16 PM	SiCl4 MFC set to  0.000000
1/27/2013	6:31:16 PM	Bypass solenoid MFC set to  0.000000
1/27/2013	6:31:16 PM	Tube furnace set to 150
1/27/2013	6:33:16 PM	Helium valve closed
1/27/2013	6:33:16 PM	H2 valve closed
1/27/2013	6:33:16 PM	BCl3 valve closed
1/27/2013	6:33:16 PM	PH3 valve closed
1/27/2013	6:33:16 PM	SiCl4 pre valve closed
1/27/2013	6:33:16 PM	SiCl4 post valve closed
1/27/2013	6:33:16 PM	Bypass valve closed
1/27/2013	6:33:16 PM	Bubbler valve closed
1/27/2013	6:33:16 PM	Main Vac valve opened
1/27/2013	6:33:16 PM	Helium MFC set to  0.000000
1/27/2013	6:33:16 PM	H2 MFC set to  0.000000
1/27/2013	6:33:16 PM	BCl3 MFC set to  0.000000
1/27/2013	6:33:16 PM	PH3 MFC set to  0.000000
1/27/2013	6:33:16 PM	SiCl4 MFC set to  0.000000
1/27/2013	6:33:16 PM	Bypass solenoid MFC set to  0.000000
1/27/2013	6:33:17 PM	Tube furnace set to 150
1/27/2013	6:33:47 PM	H2 valve closed
1/27/2013	6:33:47 PM	BCl3 valve closed
1/27/2013	6:33:47 PM	PH3 valve closed
1/27/2013	6:33:47 PM	SiCl4 pre valve closed
1/27/2013	6:33:47 PM	SiCl4 post valve closed
1/27/2013	6:33:47 PM	Bypass valve closed
1/27/2013	6:33:47 PM	Bubbler valve closed
1/27/2013	6:33:47 PM	Helium valve opened
1/27/2013	6:33:47 PM	Main Vac valve opened
1/27/2013	6:33:47 PM	Helium MFC set to  20.000000
1/27/2013	6:33:47 PM	H2 MFC set to  0.000000
1/27/2013	6:33:47 PM	BCl3 MFC set to  0.000000
1/27/2013	6:33:47 PM	PH3 MFC set to  0.000000
1/27/2013	6:33:47 PM	SiCl4 MFC set to  0.000000
1/27/2013	6:33:47 PM	Bypass solenoid MFC set to  0.000000
1/27/2013	6:33:47 PM	Tube furnace set to 150
1/27/2013	6:34:17 PM	Helium valve closed
1/27/2013	6:34:17 PM	H2 valve closed
1/27/2013	6:34:17 PM	BCl3 valve closed
1/27/2013	6:34:17 PM	PH3 valve closed
1/27/2013	6:34:17 PM	SiCl4 pre valve closed
1/27/2013	6:34:17 PM	SiCl4 post valve closed
1/27/2013	6:34:17 PM	Bypass valve closed
1/27/2013	6:34:17 PM	Bubbler valve closed
1/27/2013	6:34:17 PM	Main Vac valve opened
1/27/2013	6:34:17 PM	Helium MFC set to  0.000000
1/27/2013	6:34:17 PM	H2 MFC set to  0.000000
1/27/2013	6:34:17 PM	BCl3 MFC set to  0.000000
1/27/2013	6:34:17 PM	PH3 MFC set to  0.000000
1/27/2013	6:34:17 PM	SiCl4 MFC set to  0.000000
1/27/2013	6:34:17 PM	Bypass solenoid MFC set to  0.000000
1/27/2013	6:34:17 PM	Tube furnace set to 150
1/27/2013	6:34:47 PM	H2 valve closed
1/27/2013	6:34:47 PM	BCl3 valve closed
1/27/2013	6:34:47 PM	PH3 valve closed
1/27/2013	6:34:47 PM	SiCl4 pre valve closed
1/27/2013	6:34:47 PM	SiCl4 post valve closed
1/27/2013	6:34:47 PM	Bypass valve closed
1/27/2013	6:34:47 PM	Bubbler valve closed
1/27/2013	6:34:47 PM	Helium valve opened
1/27/2013	6:34:47 PM	Main Vac valve opened
1/27/2013	6:34:47 PM	Helium MFC set to  20.000000
1/27/2013	6:34:47 PM	H2 MFC set to  0.000000
1/27/2013	6:34:47 PM	BCl3 MFC set to  0.000000
1/27/2013	6:34:47 PM	PH3 MFC set to  0.000000
1/27/2013	6:34:47 PM	SiCl4 MFC set to  0.000000
1/27/2013	6:34:47 PM	Bypass solenoid MFC set to  0.000000
1/27/2013	6:34:47 PM	Tube furnace set to 150
1/27/2013	6:36:47 PM	Helium valve closed
1/27/2013	6:36:47 PM	H2 valve closed
1/27/2013	6:36:47 PM	BCl3 valve closed
1/27/2013	6:36:47 PM	PH3 valve closed
1/27/2013	6:36:47 PM	SiCl4 pre valve closed
1/27/2013	6:36:47 PM	SiCl4 post valve closed
1/27/2013	6:36:47 PM	Bypass valve closed
1/27/2013	6:36:47 PM	Bubbler valve closed
1/27/2013	6:36:47 PM	Main Vac valve opened
1/27/2013	6:36:47 PM	Helium MFC set to  0.000000
1/27/2013	6:36:47 PM	H2 MFC set to  0.000000
1/27/2013	6:36:47 PM	BCl3 MFC set to  0.000000
1/27/2013	6:36:47 PM	PH3 MFC set to  0.000000
1/27/2013	6:36:47 PM	SiCl4 MFC set to  0.000000
1/27/2013	6:36:47 PM	Bypass solenoid MFC set to  0.000000
1/27/2013	6:36:47 PM	Tube furnace set to 150
1/27/2013	6:37:18 PM	H2 valve closed
1/27/2013	6:37:18 PM	BCl3 valve closed
1/27/2013	6:37:18 PM	PH3 valve closed
1/27/2013	6:37:18 PM	SiCl4 pre valve closed
1/27/2013	6:37:18 PM	SiCl4 post valve closed
1/27/2013	6:37:18 PM	Bypass valve closed
1/27/2013	6:37:18 PM	Bubbler valve closed
1/27/2013	6:37:18 PM	Helium valve opened
1/27/2013	6:37:18 PM	Main Vac valve opened
1/27/2013	6:37:18 PM	Helium MFC set to  20.000000
1/27/2013	6:37:18 PM	H2 MFC set to  0.000000
1/27/2013	6:37:18 PM	BCl3 MFC set to  0.000000
1/27/2013	6:37:18 PM	PH3 MFC set to  0.000000
1/27/2013	6:37:18 PM	SiCl4 MFC set to  0.000000
1/27/2013	6:37:18 PM	Bypass solenoid MFC set to  0.000000
1/27/2013	6:37:18 PM	Tube furnace set to 150
1/27/2013	6:37:48 PM	Helium valve closed
1/27/2013	6:37:48 PM	H2 valve closed
1/27/2013	6:37:48 PM	BCl3 valve closed
1/27/2013	6:37:48 PM	PH3 valve closed
1/27/2013	6:37:48 PM	SiCl4 pre valve closed
1/27/2013	6:37:48 PM	SiCl4 post valve closed
1/27/2013	6:37:48 PM	Bypass valve closed
1/27/2013	6:37:48 PM	Bubbler valve closed
1/27/2013	6:37:48 PM	Main Vac valve opened
1/27/2013	6:37:48 PM	Helium MFC set to  0.000000
1/27/2013	6:37:48 PM	H2 MFC set to  0.000000
1/27/2013	6:37:48 PM	BCl3 MFC set to  0.000000
1/27/2013	6:37:48 PM	PH3 MFC set to  0.000000
1/27/2013	6:37:48 PM	SiCl4 MFC set to  0.000000
1/27/2013	6:37:48 PM	Bypass solenoid MFC set to  0.000000
1/27/2013	6:37:48 PM	Tube furnace set to 150
1/27/2013	6:38:18 PM	H2 valve closed
1/27/2013	6:38:18 PM	BCl3 valve closed
1/27/2013	6:38:18 PM	PH3 valve closed
1/27/2013	6:38:18 PM	SiCl4 pre valve closed
1/27/2013	6:38:18 PM	SiCl4 post valve closed
1/27/2013	6:38:18 PM	Bypass valve closed
1/27/2013	6:38:18 PM	Bubbler valve closed
1/27/2013	6:38:18 PM	Helium valve opened
1/27/2013	6:38:18 PM	Main Vac valve opened
1/27/2013	6:38:18 PM	Helium MFC set to  20.000000
1/27/2013	6:38:18 PM	H2 MFC set to  0.000000
1/27/2013	6:38:18 PM	BCl3 MFC set to  0.000000
1/27/2013	6:38:18 PM	PH3 MFC set to  0.000000
1/27/2013	6:38:18 PM	SiCl4 MFC set to  0.000000
1/27/2013	6:38:18 PM	Bypass solenoid MFC set to  0.000000
1/27/2013	6:38:18 PM	Tube furnace set to 150
1/27/2013	6:40:18 PM	Helium valve closed
1/27/2013	6:40:18 PM	H2 valve closed
1/27/2013	6:40:18 PM	BCl3 valve closed
1/27/2013	6:40:18 PM	PH3 valve closed
1/27/2013	6:40:18 PM	SiCl4 pre valve closed
1/27/2013	6:40:18 PM	SiCl4 post valve closed
1/27/2013	6:40:18 PM	Bypass valve closed
1/27/2013	6:40:18 PM	Bubbler valve closed
1/27/2013	6:40:18 PM	Main Vac valve opened
1/27/2013	6:40:18 PM	Helium MFC set to  0.000000
1/27/2013	6:40:18 PM	H2 MFC set to  0.000000
1/27/2013	6:40:18 PM	BCl3 MFC set to  0.000000
1/27/2013	6:40:18 PM	PH3 MFC set to  0.000000
1/27/2013	6:40:18 PM	SiCl4 MFC set to  0.000000
1/27/2013	6:40:18 PM	Bypass solenoid MFC set to  0.000000
1/27/2013	6:40:18 PM	Tube furnace set to 150
1/27/2013	6:40:19 PM	Run finished at 6:40 PM
1/27/2013	6:41:04 PM	Recipe started at 6:41 PM
1/27/2013	6:41:04 PM	Helium valve closed
1/27/2013	6:41:04 PM	H2 valve closed
1/27/2013	6:41:04 PM	BCl3 valve closed
1/27/2013	6:41:04 PM	PH3 valve closed
1/27/2013	6:41:04 PM	SiCl4 pre valve closed
1/27/2013	6:41:04 PM	SiCl4 post valve closed
1/27/2013	6:41:04 PM	Main Vac valve closed
1/27/2013	6:41:04 PM	Bypass valve closed
1/27/2013	6:41:04 PM	Bubbler valve closed
1/27/2013	6:41:04 PM	Helium MFC set to  0.000000
1/27/2013	6:41:04 PM	H2 MFC set to  0.000000
1/27/2013	6:41:04 PM	BCl3 MFC set to  0.000000
1/27/2013	6:41:04 PM	PH3 MFC set to  0.000000
1/27/2013	6:41:04 PM	SiCl4 MFC set to  0.000000
1/27/2013	6:41:04 PM	Bypass solenoid MFC set to  0.000000
1/27/2013	6:41:04 PM	Tube furnace set to 0
1/27/2013	6:41:07 PM	Helium valve closed
1/27/2013	6:41:07 PM	BCl3 valve closed
1/27/2013	6:41:07 PM	PH3 valve closed
1/27/2013	6:41:07 PM	SiCl4 pre valve closed
1/27/2013	6:41:07 PM	SiCl4 post valve closed
1/27/2013	6:41:07 PM	Main Vac valve closed
1/27/2013	6:41:07 PM	Bypass valve closed
1/27/2013	6:41:07 PM	Bubbler valve closed
1/27/2013	6:41:07 PM	H2 valve opened
1/27/2013	6:41:07 PM	Helium MFC set to  0.000000
1/27/2013	6:41:07 PM	H2 MFC set to  500.000000
1/27/2013	6:41:07 PM	BCl3 MFC set to  0.000000
1/27/2013	6:41:07 PM	PH3 MFC set to  0.000000
1/27/2013	6:41:07 PM	SiCl4 MFC set to  0.000000
1/27/2013	6:41:07 PM	Bypass solenoid MFC set to  0.000000
1/27/2013	6:41:07 PM	Tube furnace set to 0
1/27/2013	6:42:18 PM	Helium valve closed
1/27/2013	6:42:18 PM	BCl3 valve closed
1/27/2013	6:42:18 PM	PH3 valve closed
1/27/2013	6:42:18 PM	SiCl4 pre valve closed
1/27/2013	6:42:18 PM	SiCl4 post valve closed
1/27/2013	6:42:18 PM	Main Vac valve closed
1/27/2013	6:42:18 PM	Bypass valve closed
1/27/2013	6:42:18 PM	H2 valve opened
1/27/2013	6:42:18 PM	Bubbler valve opened
1/27/2013	6:42:18 PM	Helium MFC set to  0.000000
1/27/2013	6:42:18 PM	H2 MFC set to  500.000000
1/27/2013	6:42:18 PM	BCl3 MFC set to  0.000000
1/27/2013	6:42:18 PM	PH3 MFC set to  0.000000
1/27/2013	6:42:18 PM	SiCl4 MFC set to  0.000000
1/27/2013	6:42:18 PM	Bypass solenoid MFC set to  0.000000
1/27/2013	6:42:18 PM	Tube furnace set to 0
1/27/2013	6:42:19 PM	Helium valve closed
1/27/2013	6:42:19 PM	BCl3 valve closed
1/27/2013	6:42:19 PM	PH3 valve closed
1/27/2013	6:42:19 PM	SiCl4 pre valve closed
1/27/2013	6:42:19 PM	SiCl4 post valve closed
1/27/2013	6:42:19 PM	Main Vac valve closed
1/27/2013	6:42:19 PM	Bypass valve closed
1/27/2013	6:42:19 PM	H2 valve opened
1/27/2013	6:42:19 PM	Bubbler valve opened
1/27/2013	6:42:19 PM	Helium MFC set to  0.000000
1/27/2013	6:42:19 PM	H2 MFC set to  500.000000
1/27/2013	6:42:19 PM	BCl3 MFC set to  0.000000
1/27/2013	6:42:19 PM	PH3 MFC set to  0.000000
1/27/2013	6:42:19 PM	SiCl4 MFC set to  0.000000
1/27/2013	6:42:19 PM	Bypass solenoid MFC set to  0.000000
1/27/2013	6:42:19 PM	Tube furnace set to 1000
1/27/2013	7:02:19 PM	Helium valve closed
1/27/2013	7:02:19 PM	BCl3 valve closed
1/27/2013	7:02:19 PM	PH3 valve closed
1/27/2013	7:02:19 PM	Main Vac valve closed
1/27/2013	7:02:19 PM	Bypass valve closed
1/27/2013	7:02:19 PM	H2 valve opened
1/27/2013	7:02:19 PM	SiCl4 pre valve opened
1/27/2013	7:02:19 PM	SiCl4 post valve opened
1/27/2013	7:02:19 PM	Bubbler valve opened
1/27/2013	7:02:19 PM	Helium MFC set to  0.000000
1/27/2013	7:02:19 PM	H2 MFC set to  500.000000
1/27/2013	7:02:19 PM	BCl3 MFC set to  0.000000
1/27/2013	7:02:19 PM	PH3 MFC set to  0.000000
1/27/2013	7:02:19 PM	SiCl4 MFC set to  50.000000
1/27/2013	7:02:19 PM	Bypass solenoid MFC set to  0.000000
1/27/2013	7:02:20 PM	Tube furnace set to 1000
1/27/2013	7:14:20 PM	Helium valve closed
1/27/2013	7:14:20 PM	BCl3 valve closed
1/27/2013	7:14:20 PM	PH3 valve closed
1/27/2013	7:14:20 PM	SiCl4 pre valve closed
1/27/2013	7:14:20 PM	SiCl4 post valve closed
1/27/2013	7:14:20 PM	Main Vac valve closed
1/27/2013	7:14:20 PM	Bypass valve closed
1/27/2013	7:14:20 PM	H2 valve opened
1/27/2013	7:14:20 PM	Bubbler valve opened
1/27/2013	7:14:20 PM	Helium MFC set to  0.000000
1/27/2013	7:14:20 PM	H2 MFC set to  500.000000
1/27/2013	7:14:20 PM	BCl3 MFC set to  0.000000
1/27/2013	7:14:20 PM	PH3 MFC set to  0.000000
1/27/2013	7:14:20 PM	SiCl4 MFC set to  0.000000
1/27/2013	7:14:20 PM	Bypass solenoid MFC set to  0.000000
1/27/2013	7:14:20 PM	Tube furnace set to 750
1/27/2013	7:19:20 PM	H2 valve closed
1/27/2013	7:19:20 PM	BCl3 valve closed
1/27/2013	7:19:20 PM	PH3 valve closed
1/27/2013	7:19:20 PM	SiCl4 pre valve closed
1/27/2013	7:19:20 PM	SiCl4 post valve closed
1/27/2013	7:19:20 PM	Main Vac valve closed
1/27/2013	7:19:20 PM	Bypass valve closed
1/27/2013	7:19:20 PM	Helium valve opened
1/27/2013	7:19:20 PM	Bubbler valve opened
1/27/2013	7:19:20 PM	Helium MFC set to  500.000000
1/27/2013	7:19:20 PM	H2 MFC set to  0.000000
1/27/2013	7:19:20 PM	BCl3 MFC set to  0.000000
1/27/2013	7:19:20 PM	PH3 MFC set to  0.000000
1/27/2013	7:19:20 PM	SiCl4 MFC set to  0.000000
1/27/2013	7:19:20 PM	Bypass solenoid MFC set to  0.000000
1/27/2013	7:19:20 PM	Tube furnace set to 0
1/27/2013	7:39:20 PM	Helium valve closed
1/27/2013	7:39:20 PM	H2 valve closed
1/27/2013	7:39:20 PM	BCl3 valve closed
1/27/2013	7:39:20 PM	PH3 valve closed
1/27/2013	7:39:20 PM	SiCl4 pre valve closed
1/27/2013	7:39:20 PM	SiCl4 post valve closed
1/27/2013	7:39:20 PM	Main Vac valve closed
1/27/2013	7:39:20 PM	Bypass valve closed
1/27/2013	7:39:20 PM	Bubbler valve closed
1/27/2013	7:39:20 PM	Helium MFC set to  0.000000
1/27/2013	7:39:20 PM	H2 MFC set to  0.000000
1/27/2013	7:39:20 PM	BCl3 MFC set to  0.000000
1/27/2013	7:39:20 PM	PH3 MFC set to  0.000000
1/27/2013	7:39:20 PM	SiCl4 MFC set to  0.000000
1/27/2013	7:39:20 PM	Bypass solenoid MFC set to  0.000000
1/27/2013	7:39:20 PM	Tube furnace set to 0
1/27/2013	7:39:21 PM	Run finished at 7:39 PM
1/27/2013	8:33:46 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/27/2013	8:33:46 PM	Recipe started at 8:33 PM
1/27/2013	8:33:46 PM	Helium valve closed
1/27/2013	8:33:46 PM	H2 valve closed
1/27/2013	8:33:46 PM	BCl3 valve closed
1/27/2013	8:33:46 PM	PH3 valve closed
1/27/2013	8:33:46 PM	SiCl4 pre valve closed
1/27/2013	8:33:46 PM	SiCl4 post valve closed
1/27/2013	8:33:46 PM	Main Vac valve closed
1/27/2013	8:33:46 PM	Bypass valve closed
1/27/2013	8:33:46 PM	Bubbler valve closed
1/27/2013	8:33:46 PM	Helium MFC set to  0.000000
1/27/2013	8:33:46 PM	H2 MFC set to  0.000000
1/27/2013	8:33:46 PM	BCl3 MFC set to  0.000000
1/27/2013	8:33:46 PM	PH3 MFC set to  0.000000
1/27/2013	8:33:46 PM	SiCl4 MFC set to  0.000000
1/27/2013	8:33:46 PM	Bypass solenoid MFC set to  0.000000
1/27/2013	8:33:47 PM	Tube furnace set to 0
1/27/2013	8:33:50 PM	H2 valve closed
1/27/2013	8:33:50 PM	BCl3 valve closed
1/27/2013	8:33:50 PM	PH3 valve closed
1/27/2013	8:33:50 PM	SiCl4 pre valve closed
1/27/2013	8:33:50 PM	SiCl4 post valve closed
1/27/2013	8:33:50 PM	Main Vac valve closed
1/27/2013	8:33:50 PM	Bypass valve closed
1/27/2013	8:33:50 PM	Bubbler valve closed
1/27/2013	8:33:50 PM	Helium valve opened
1/27/2013	8:33:50 PM	Helium MFC set to  500.000000
1/27/2013	8:33:50 PM	H2 MFC set to  0.000000
1/27/2013	8:33:50 PM	BCl3 MFC set to  0.000000
1/27/2013	8:33:50 PM	PH3 MFC set to  0.000000
1/27/2013	8:33:50 PM	SiCl4 MFC set to  0.000000
1/27/2013	8:33:50 PM	Bypass solenoid MFC set to  0.000000
1/27/2013	8:33:50 PM	Tube furnace set to 0
1/27/2013	8:33:52 PM	Helium valve closed
1/27/2013	8:33:52 PM	H2 valve closed
1/27/2013	8:33:52 PM	BCl3 valve closed
1/27/2013	8:33:52 PM	PH3 valve closed
1/27/2013	8:33:52 PM	SiCl4 pre valve closed
1/27/2013	8:33:52 PM	SiCl4 post valve closed
1/27/2013	8:33:52 PM	Main Vac valve closed
1/27/2013	8:33:52 PM	Bypass valve closed
1/27/2013	8:33:52 PM	Bubbler valve closed
1/27/2013	8:33:52 PM	Helium MFC set to  0.000000
1/27/2013	8:33:52 PM	H2 MFC set to  0.000000
1/27/2013	8:33:52 PM	BCl3 MFC set to  0.000000
1/27/2013	8:33:52 PM	PH3 MFC set to  0.000000
1/27/2013	8:33:52 PM	SiCl4 MFC set to  0.000000
1/27/2013	8:33:52 PM	Bypass solenoid MFC set to  0.000000
1/27/2013	8:33:52 PM	Tube furnace set to 0
1/27/2013	8:33:53 PM	Run finished at 8:33 PM
1/27/2013	8:33:53 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/27/2013	8:35:57 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/27/2013	8:35:58 PM	Recipe started at 8:35 PM
1/27/2013	8:35:58 PM	Helium valve closed
1/27/2013	8:35:58 PM	H2 valve closed
1/27/2013	8:35:58 PM	BCl3 valve closed
1/27/2013	8:35:58 PM	PH3 valve closed
1/27/2013	8:35:58 PM	SiCl4 pre valve closed
1/27/2013	8:35:58 PM	SiCl4 post valve closed
1/27/2013	8:35:58 PM	Main Vac valve closed
1/27/2013	8:35:58 PM	Bubbler valve closed
1/27/2013	8:35:58 PM	Bypass valve opened
1/27/2013	8:35:58 PM	Helium MFC set to  0.000000
1/27/2013	8:35:58 PM	H2 MFC set to  0.000000
1/27/2013	8:35:58 PM	BCl3 MFC set to  0.000000
1/27/2013	8:35:58 PM	PH3 MFC set to  0.000000
1/27/2013	8:35:58 PM	SiCl4 MFC set to  0.000000
1/27/2013	8:35:58 PM	Bypass solenoid MFC set to  0.000000
1/27/2013	8:35:58 PM	Tube furnace set to 0
1/27/2013	8:37:02 PM	Helium valve closed
1/27/2013	8:37:02 PM	H2 valve closed
1/27/2013	8:37:02 PM	BCl3 valve closed
1/27/2013	8:37:02 PM	PH3 valve closed
1/27/2013	8:37:02 PM	SiCl4 pre valve closed
1/27/2013	8:37:02 PM	SiCl4 post valve closed
1/27/2013	8:37:02 PM	Main Vac valve closed
1/27/2013	8:37:02 PM	Bubbler valve closed
1/27/2013	8:37:02 PM	Bypass valve opened
1/27/2013	8:37:02 PM	Helium MFC set to  0.000000
1/27/2013	8:37:02 PM	H2 MFC set to  0.000000
1/27/2013	8:37:02 PM	BCl3 MFC set to  0.000000
1/27/2013	8:37:02 PM	PH3 MFC set to  0.000000
1/27/2013	8:37:02 PM	SiCl4 MFC set to  0.000000
1/27/2013	8:37:02 PM	Bypass solenoid MFC set to  0.000000
1/27/2013	8:37:02 PM	Tube furnace set to 0
1/27/2013	8:38:02 PM	Helium valve closed
1/27/2013	8:38:02 PM	H2 valve closed
1/27/2013	8:38:02 PM	BCl3 valve closed
1/27/2013	8:38:02 PM	PH3 valve closed
1/27/2013	8:38:02 PM	SiCl4 pre valve closed
1/27/2013	8:38:02 PM	SiCl4 post valve closed
1/27/2013	8:38:02 PM	Bypass valve closed
1/27/2013	8:38:02 PM	Bubbler valve closed
1/27/2013	8:38:02 PM	Main Vac valve opened
1/27/2013	8:38:02 PM	Helium MFC set to  0.000000
1/27/2013	8:38:02 PM	H2 MFC set to  0.000000
1/27/2013	8:38:02 PM	BCl3 MFC set to  0.000000
1/27/2013	8:38:02 PM	PH3 MFC set to  0.000000
1/27/2013	8:38:02 PM	SiCl4 MFC set to  0.000000
1/27/2013	8:38:02 PM	Bypass solenoid MFC set to  0.000000
1/27/2013	8:38:02 PM	Tube furnace set to 0
1/27/2013	8:38:03 PM	Run finished at 8:38 PM
1/27/2013	8:38:03 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/27/2013	8:38:17 PM	Recipe started at 8:38 PM
1/27/2013	8:38:17 PM	Helium valve closed
1/27/2013	8:38:17 PM	H2 valve closed
1/27/2013	8:38:17 PM	BCl3 valve closed
1/27/2013	8:38:17 PM	PH3 valve closed
1/27/2013	8:38:17 PM	SiCl4 pre valve closed
1/27/2013	8:38:17 PM	SiCl4 post valve closed
1/27/2013	8:38:17 PM	Bypass valve closed
1/27/2013	8:38:17 PM	Bubbler valve closed
1/27/2013	8:38:17 PM	Main Vac valve opened
1/27/2013	8:38:17 PM	Helium MFC set to  0.000000
1/27/2013	8:38:17 PM	H2 MFC set to  0.000000
1/27/2013	8:38:17 PM	BCl3 MFC set to  0.000000
1/27/2013	8:38:17 PM	PH3 MFC set to  0.000000
1/27/2013	8:38:17 PM	SiCl4 MFC set to  0.000000
1/27/2013	8:38:17 PM	Bypass solenoid MFC set to  0.000000
1/27/2013	8:38:18 PM	Tube furnace set to 150
1/27/2013	8:38:48 PM	H2 valve closed
1/27/2013	8:38:48 PM	BCl3 valve closed
1/27/2013	8:38:48 PM	PH3 valve closed
1/27/2013	8:38:48 PM	SiCl4 pre valve closed
1/27/2013	8:38:48 PM	SiCl4 post valve closed
1/27/2013	8:38:48 PM	Bypass valve closed
1/27/2013	8:38:48 PM	Bubbler valve closed
1/27/2013	8:38:48 PM	Helium valve opened
1/27/2013	8:38:48 PM	Main Vac valve opened
1/27/2013	8:38:48 PM	Helium MFC set to  20.000000
1/27/2013	8:38:48 PM	H2 MFC set to  0.000000
1/27/2013	8:38:48 PM	BCl3 MFC set to  0.000000
1/27/2013	8:38:48 PM	PH3 MFC set to  0.000000
1/27/2013	8:38:48 PM	SiCl4 MFC set to  0.000000
1/27/2013	8:38:48 PM	Bypass solenoid MFC set to  0.000000
1/27/2013	8:38:48 PM	Tube furnace set to 150
1/27/2013	8:39:18 PM	Helium valve closed
1/27/2013	8:39:18 PM	H2 valve closed
1/27/2013	8:39:18 PM	BCl3 valve closed
1/27/2013	8:39:18 PM	PH3 valve closed
1/27/2013	8:39:18 PM	SiCl4 pre valve closed
1/27/2013	8:39:18 PM	SiCl4 post valve closed
1/27/2013	8:39:18 PM	Bypass valve closed
1/27/2013	8:39:18 PM	Bubbler valve closed
1/27/2013	8:39:18 PM	Main Vac valve opened
1/27/2013	8:39:18 PM	Helium MFC set to  0.000000
1/27/2013	8:39:18 PM	H2 MFC set to  0.000000
1/27/2013	8:39:18 PM	BCl3 MFC set to  0.000000
1/27/2013	8:39:18 PM	PH3 MFC set to  0.000000
1/27/2013	8:39:18 PM	SiCl4 MFC set to  0.000000
1/27/2013	8:39:18 PM	Bypass solenoid MFC set to  0.000000
1/27/2013	8:39:18 PM	Tube furnace set to 150
1/27/2013	8:39:48 PM	H2 valve closed
1/27/2013	8:39:48 PM	BCl3 valve closed
1/27/2013	8:39:48 PM	PH3 valve closed
1/27/2013	8:39:48 PM	SiCl4 pre valve closed
1/27/2013	8:39:48 PM	SiCl4 post valve closed
1/27/2013	8:39:48 PM	Bypass valve closed
1/27/2013	8:39:48 PM	Bubbler valve closed
1/27/2013	8:39:48 PM	Helium valve opened
1/27/2013	8:39:48 PM	Main Vac valve opened
1/27/2013	8:39:48 PM	Helium MFC set to  20.000000
1/27/2013	8:39:48 PM	H2 MFC set to  0.000000
1/27/2013	8:39:48 PM	BCl3 MFC set to  0.000000
1/27/2013	8:39:48 PM	PH3 MFC set to  0.000000
1/27/2013	8:39:48 PM	SiCl4 MFC set to  0.000000
1/27/2013	8:39:48 PM	Bypass solenoid MFC set to  0.000000
1/27/2013	8:39:48 PM	Tube furnace set to 150
1/27/2013	8:40:18 PM	Helium valve closed
1/27/2013	8:40:18 PM	H2 valve closed
1/27/2013	8:40:18 PM	BCl3 valve closed
1/27/2013	8:40:18 PM	PH3 valve closed
1/27/2013	8:40:18 PM	SiCl4 pre valve closed
1/27/2013	8:40:18 PM	SiCl4 post valve closed
1/27/2013	8:40:18 PM	Bypass valve closed
1/27/2013	8:40:18 PM	Bubbler valve closed
1/27/2013	8:40:18 PM	Main Vac valve opened
1/27/2013	8:40:18 PM	Helium MFC set to  0.000000
1/27/2013	8:40:18 PM	H2 MFC set to  0.000000
1/27/2013	8:40:18 PM	BCl3 MFC set to  0.000000
1/27/2013	8:40:18 PM	PH3 MFC set to  0.000000
1/27/2013	8:40:18 PM	SiCl4 MFC set to  0.000000
1/27/2013	8:40:18 PM	Bypass solenoid MFC set to  0.000000
1/27/2013	8:40:19 PM	Tube furnace set to 150
1/27/2013	8:40:49 PM	H2 valve closed
1/27/2013	8:40:49 PM	BCl3 valve closed
1/27/2013	8:40:49 PM	PH3 valve closed
1/27/2013	8:40:49 PM	SiCl4 pre valve closed
1/27/2013	8:40:49 PM	SiCl4 post valve closed
1/27/2013	8:40:49 PM	Bypass valve closed
1/27/2013	8:40:49 PM	Bubbler valve closed
1/27/2013	8:40:49 PM	Helium valve opened
1/27/2013	8:40:49 PM	Main Vac valve opened
1/27/2013	8:40:49 PM	Helium MFC set to  20.000000
1/27/2013	8:40:49 PM	H2 MFC set to  0.000000
1/27/2013	8:40:49 PM	BCl3 MFC set to  0.000000
1/27/2013	8:40:49 PM	PH3 MFC set to  0.000000
1/27/2013	8:40:49 PM	SiCl4 MFC set to  0.000000
1/27/2013	8:40:49 PM	Bypass solenoid MFC set to  0.000000
1/27/2013	8:40:49 PM	Tube furnace set to 150
1/27/2013	8:42:49 PM	Helium valve closed
1/27/2013	8:42:49 PM	H2 valve closed
1/27/2013	8:42:49 PM	BCl3 valve closed
1/27/2013	8:42:49 PM	PH3 valve closed
1/27/2013	8:42:49 PM	SiCl4 pre valve closed
1/27/2013	8:42:49 PM	SiCl4 post valve closed
1/27/2013	8:42:49 PM	Bypass valve closed
1/27/2013	8:42:49 PM	Bubbler valve closed
1/27/2013	8:42:49 PM	Main Vac valve opened
1/27/2013	8:42:49 PM	Helium MFC set to  0.000000
1/27/2013	8:42:49 PM	H2 MFC set to  0.000000
1/27/2013	8:42:49 PM	BCl3 MFC set to  0.000000
1/27/2013	8:42:49 PM	PH3 MFC set to  0.000000
1/27/2013	8:42:49 PM	SiCl4 MFC set to  0.000000
1/27/2013	8:42:49 PM	Bypass solenoid MFC set to  0.000000
1/27/2013	8:42:49 PM	Tube furnace set to 150
1/27/2013	8:43:19 PM	H2 valve closed
1/27/2013	8:43:19 PM	BCl3 valve closed
1/27/2013	8:43:19 PM	PH3 valve closed
1/27/2013	8:43:19 PM	SiCl4 pre valve closed
1/27/2013	8:43:19 PM	SiCl4 post valve closed
1/27/2013	8:43:19 PM	Bypass valve closed
1/27/2013	8:43:19 PM	Bubbler valve closed
1/27/2013	8:43:19 PM	Helium valve opened
1/27/2013	8:43:19 PM	Main Vac valve opened
1/27/2013	8:43:19 PM	Helium MFC set to  20.000000
1/27/2013	8:43:19 PM	H2 MFC set to  0.000000
1/27/2013	8:43:19 PM	BCl3 MFC set to  0.000000
1/27/2013	8:43:19 PM	PH3 MFC set to  0.000000
1/27/2013	8:43:19 PM	SiCl4 MFC set to  0.000000
1/27/2013	8:43:19 PM	Bypass solenoid MFC set to  0.000000
1/27/2013	8:43:19 PM	Tube furnace set to 150
1/27/2013	8:43:49 PM	Helium valve closed
1/27/2013	8:43:49 PM	H2 valve closed
1/27/2013	8:43:49 PM	BCl3 valve closed
1/27/2013	8:43:49 PM	PH3 valve closed
1/27/2013	8:43:49 PM	SiCl4 pre valve closed
1/27/2013	8:43:49 PM	SiCl4 post valve closed
1/27/2013	8:43:49 PM	Bypass valve closed
1/27/2013	8:43:49 PM	Bubbler valve closed
1/27/2013	8:43:49 PM	Main Vac valve opened
1/27/2013	8:43:49 PM	Helium MFC set to  0.000000
1/27/2013	8:43:49 PM	H2 MFC set to  0.000000
1/27/2013	8:43:49 PM	BCl3 MFC set to  0.000000
1/27/2013	8:43:49 PM	PH3 MFC set to  0.000000
1/27/2013	8:43:49 PM	SiCl4 MFC set to  0.000000
1/27/2013	8:43:49 PM	Bypass solenoid MFC set to  0.000000
1/27/2013	8:43:50 PM	Tube furnace set to 150
1/27/2013	8:44:20 PM	H2 valve closed
1/27/2013	8:44:20 PM	BCl3 valve closed
1/27/2013	8:44:20 PM	PH3 valve closed
1/27/2013	8:44:20 PM	SiCl4 pre valve closed
1/27/2013	8:44:20 PM	SiCl4 post valve closed
1/27/2013	8:44:20 PM	Bypass valve closed
1/27/2013	8:44:20 PM	Bubbler valve closed
1/27/2013	8:44:20 PM	Helium valve opened
1/27/2013	8:44:20 PM	Main Vac valve opened
1/27/2013	8:44:20 PM	Helium MFC set to  20.000000
1/27/2013	8:44:20 PM	H2 MFC set to  0.000000
1/27/2013	8:44:20 PM	BCl3 MFC set to  0.000000
1/27/2013	8:44:20 PM	PH3 MFC set to  0.000000
1/27/2013	8:44:20 PM	SiCl4 MFC set to  0.000000
1/27/2013	8:44:20 PM	Bypass solenoid MFC set to  0.000000
1/27/2013	8:44:20 PM	Tube furnace set to 150
1/27/2013	8:44:50 PM	Helium valve closed
1/27/2013	8:44:50 PM	H2 valve closed
1/27/2013	8:44:50 PM	BCl3 valve closed
1/27/2013	8:44:50 PM	PH3 valve closed
1/27/2013	8:44:50 PM	SiCl4 pre valve closed
1/27/2013	8:44:50 PM	SiCl4 post valve closed
1/27/2013	8:44:50 PM	Bypass valve closed
1/27/2013	8:44:50 PM	Bubbler valve closed
1/27/2013	8:44:50 PM	Main Vac valve opened
1/27/2013	8:44:50 PM	Helium MFC set to  0.000000
1/27/2013	8:44:50 PM	H2 MFC set to  0.000000
1/27/2013	8:44:50 PM	BCl3 MFC set to  0.000000
1/27/2013	8:44:50 PM	PH3 MFC set to  0.000000
1/27/2013	8:44:50 PM	SiCl4 MFC set to  0.000000
1/27/2013	8:44:50 PM	Bypass solenoid MFC set to  0.000000
1/27/2013	8:44:50 PM	Tube furnace set to 150
1/27/2013	8:45:20 PM	H2 valve closed
1/27/2013	8:45:20 PM	BCl3 valve closed
1/27/2013	8:45:20 PM	PH3 valve closed
1/27/2013	8:45:20 PM	SiCl4 pre valve closed
1/27/2013	8:45:20 PM	SiCl4 post valve closed
1/27/2013	8:45:20 PM	Bypass valve closed
1/27/2013	8:45:20 PM	Bubbler valve closed
1/27/2013	8:45:20 PM	Helium valve opened
1/27/2013	8:45:20 PM	Main Vac valve opened
1/27/2013	8:45:20 PM	Helium MFC set to  20.000000
1/27/2013	8:45:20 PM	H2 MFC set to  0.000000
1/27/2013	8:45:20 PM	BCl3 MFC set to  0.000000
1/27/2013	8:45:20 PM	PH3 MFC set to  0.000000
1/27/2013	8:45:20 PM	SiCl4 MFC set to  0.000000
1/27/2013	8:45:20 PM	Bypass solenoid MFC set to  0.000000
1/27/2013	8:45:20 PM	Tube furnace set to 150
1/27/2013	8:47:20 PM	Helium valve closed
1/27/2013	8:47:20 PM	H2 valve closed
1/27/2013	8:47:20 PM	BCl3 valve closed
1/27/2013	8:47:20 PM	PH3 valve closed
1/27/2013	8:47:20 PM	SiCl4 pre valve closed
1/27/2013	8:47:20 PM	SiCl4 post valve closed
1/27/2013	8:47:20 PM	Bypass valve closed
1/27/2013	8:47:20 PM	Bubbler valve closed
1/27/2013	8:47:20 PM	Main Vac valve opened
1/27/2013	8:47:20 PM	Helium MFC set to  0.000000
1/27/2013	8:47:20 PM	H2 MFC set to  0.000000
1/27/2013	8:47:20 PM	BCl3 MFC set to  0.000000
1/27/2013	8:47:20 PM	PH3 MFC set to  0.000000
1/27/2013	8:47:20 PM	SiCl4 MFC set to  0.000000
1/27/2013	8:47:20 PM	Bypass solenoid MFC set to  0.000000
1/27/2013	8:47:21 PM	Tube furnace set to 150
1/27/2013	8:47:51 PM	H2 valve closed
1/27/2013	8:47:51 PM	BCl3 valve closed
1/27/2013	8:47:51 PM	PH3 valve closed
1/27/2013	8:47:51 PM	SiCl4 pre valve closed
1/27/2013	8:47:51 PM	SiCl4 post valve closed
1/27/2013	8:47:51 PM	Bypass valve closed
1/27/2013	8:47:51 PM	Bubbler valve closed
1/27/2013	8:47:51 PM	Helium valve opened
1/27/2013	8:47:51 PM	Main Vac valve opened
1/27/2013	8:47:51 PM	Helium MFC set to  20.000000
1/27/2013	8:47:51 PM	H2 MFC set to  0.000000
1/27/2013	8:47:51 PM	BCl3 MFC set to  0.000000
1/27/2013	8:47:51 PM	PH3 MFC set to  0.000000
1/27/2013	8:47:51 PM	SiCl4 MFC set to  0.000000
1/27/2013	8:47:51 PM	Bypass solenoid MFC set to  0.000000
1/27/2013	8:47:51 PM	Tube furnace set to 150
1/27/2013	8:48:21 PM	Helium valve closed
1/27/2013	8:48:21 PM	H2 valve closed
1/27/2013	8:48:21 PM	BCl3 valve closed
1/27/2013	8:48:21 PM	PH3 valve closed
1/27/2013	8:48:21 PM	SiCl4 pre valve closed
1/27/2013	8:48:21 PM	SiCl4 post valve closed
1/27/2013	8:48:21 PM	Bypass valve closed
1/27/2013	8:48:21 PM	Bubbler valve closed
1/27/2013	8:48:21 PM	Main Vac valve opened
1/27/2013	8:48:21 PM	Helium MFC set to  0.000000
1/27/2013	8:48:21 PM	H2 MFC set to  0.000000
1/27/2013	8:48:21 PM	BCl3 MFC set to  0.000000
1/27/2013	8:48:21 PM	PH3 MFC set to  0.000000
1/27/2013	8:48:21 PM	SiCl4 MFC set to  0.000000
1/27/2013	8:48:21 PM	Bypass solenoid MFC set to  0.000000
1/27/2013	8:48:21 PM	Tube furnace set to 150
1/27/2013	8:48:51 PM	H2 valve closed
1/27/2013	8:48:51 PM	BCl3 valve closed
1/27/2013	8:48:51 PM	PH3 valve closed
1/27/2013	8:48:51 PM	SiCl4 pre valve closed
1/27/2013	8:48:51 PM	SiCl4 post valve closed
1/27/2013	8:48:51 PM	Bypass valve closed
1/27/2013	8:48:51 PM	Bubbler valve closed
1/27/2013	8:48:51 PM	Helium valve opened
1/27/2013	8:48:51 PM	Main Vac valve opened
1/27/2013	8:48:51 PM	Helium MFC set to  20.000000
1/27/2013	8:48:51 PM	H2 MFC set to  0.000000
1/27/2013	8:48:51 PM	BCl3 MFC set to  0.000000
1/27/2013	8:48:51 PM	PH3 MFC set to  0.000000
1/27/2013	8:48:51 PM	SiCl4 MFC set to  0.000000
1/27/2013	8:48:51 PM	Bypass solenoid MFC set to  0.000000
1/27/2013	8:48:51 PM	Tube furnace set to 150
1/27/2013	8:50:51 PM	Helium valve closed
1/27/2013	8:50:51 PM	H2 valve closed
1/27/2013	8:50:51 PM	BCl3 valve closed
1/27/2013	8:50:51 PM	PH3 valve closed
1/27/2013	8:50:51 PM	SiCl4 pre valve closed
1/27/2013	8:50:51 PM	SiCl4 post valve closed
1/27/2013	8:50:51 PM	Bypass valve closed
1/27/2013	8:50:51 PM	Bubbler valve closed
1/27/2013	8:50:51 PM	Main Vac valve opened
1/27/2013	8:50:51 PM	Helium MFC set to  0.000000
1/27/2013	8:50:51 PM	H2 MFC set to  0.000000
1/27/2013	8:50:51 PM	BCl3 MFC set to  0.000000
1/27/2013	8:50:51 PM	PH3 MFC set to  0.000000
1/27/2013	8:50:51 PM	SiCl4 MFC set to  0.000000
1/27/2013	8:50:51 PM	Bypass solenoid MFC set to  0.000000
1/27/2013	8:50:52 PM	Tube furnace set to 150
1/27/2013	8:51:22 PM	H2 valve closed
1/27/2013	8:51:22 PM	BCl3 valve closed
1/27/2013	8:51:22 PM	PH3 valve closed
1/27/2013	8:51:22 PM	SiCl4 pre valve closed
1/27/2013	8:51:22 PM	SiCl4 post valve closed
1/27/2013	8:51:22 PM	Bypass valve closed
1/27/2013	8:51:22 PM	Bubbler valve closed
1/27/2013	8:51:22 PM	Helium valve opened
1/27/2013	8:51:22 PM	Main Vac valve opened
1/27/2013	8:51:22 PM	Helium MFC set to  20.000000
1/27/2013	8:51:22 PM	H2 MFC set to  0.000000
1/27/2013	8:51:22 PM	BCl3 MFC set to  0.000000
1/27/2013	8:51:22 PM	PH3 MFC set to  0.000000
1/27/2013	8:51:22 PM	SiCl4 MFC set to  0.000000
1/27/2013	8:51:22 PM	Bypass solenoid MFC set to  0.000000
1/27/2013	8:51:22 PM	Tube furnace set to 150
1/27/2013	8:51:52 PM	Helium valve closed
1/27/2013	8:51:52 PM	H2 valve closed
1/27/2013	8:51:52 PM	BCl3 valve closed
1/27/2013	8:51:52 PM	PH3 valve closed
1/27/2013	8:51:52 PM	SiCl4 pre valve closed
1/27/2013	8:51:52 PM	SiCl4 post valve closed
1/27/2013	8:51:52 PM	Bypass valve closed
1/27/2013	8:51:52 PM	Bubbler valve closed
1/27/2013	8:51:52 PM	Main Vac valve opened
1/27/2013	8:51:52 PM	Helium MFC set to  0.000000
1/27/2013	8:51:52 PM	H2 MFC set to  0.000000
1/27/2013	8:51:52 PM	BCl3 MFC set to  0.000000
1/27/2013	8:51:52 PM	PH3 MFC set to  0.000000
1/27/2013	8:51:52 PM	SiCl4 MFC set to  0.000000
1/27/2013	8:51:52 PM	Bypass solenoid MFC set to  0.000000
1/27/2013	8:51:52 PM	Tube furnace set to 150
1/27/2013	8:52:22 PM	H2 valve closed
1/27/2013	8:52:22 PM	BCl3 valve closed
1/27/2013	8:52:22 PM	PH3 valve closed
1/27/2013	8:52:22 PM	SiCl4 pre valve closed
1/27/2013	8:52:22 PM	SiCl4 post valve closed
1/27/2013	8:52:22 PM	Bypass valve closed
1/27/2013	8:52:22 PM	Bubbler valve closed
1/27/2013	8:52:22 PM	Helium valve opened
1/27/2013	8:52:22 PM	Main Vac valve opened
1/27/2013	8:52:22 PM	Helium MFC set to  20.000000
1/27/2013	8:52:22 PM	H2 MFC set to  0.000000
1/27/2013	8:52:22 PM	BCl3 MFC set to  0.000000
1/27/2013	8:52:22 PM	PH3 MFC set to  0.000000
1/27/2013	8:52:22 PM	SiCl4 MFC set to  0.000000
1/27/2013	8:52:22 PM	Bypass solenoid MFC set to  0.000000
1/27/2013	8:52:22 PM	Tube furnace set to 150
1/27/2013	8:54:22 PM	Helium valve closed
1/27/2013	8:54:22 PM	H2 valve closed
1/27/2013	8:54:22 PM	BCl3 valve closed
1/27/2013	8:54:22 PM	PH3 valve closed
1/27/2013	8:54:22 PM	SiCl4 pre valve closed
1/27/2013	8:54:22 PM	SiCl4 post valve closed
1/27/2013	8:54:22 PM	Bypass valve closed
1/27/2013	8:54:22 PM	Bubbler valve closed
1/27/2013	8:54:22 PM	Main Vac valve opened
1/27/2013	8:54:22 PM	Helium MFC set to  0.000000
1/27/2013	8:54:22 PM	H2 MFC set to  0.000000
1/27/2013	8:54:22 PM	BCl3 MFC set to  0.000000
1/27/2013	8:54:22 PM	PH3 MFC set to  0.000000
1/27/2013	8:54:22 PM	SiCl4 MFC set to  0.000000
1/27/2013	8:54:22 PM	Bypass solenoid MFC set to  0.000000
1/27/2013	8:54:23 PM	Tube furnace set to 150
1/27/2013	8:54:24 PM	Run finished at 8:54 PM
1/27/2013	8:54:52 PM	Main Vac valve closed
1/27/2013	8:54:55 PM	Main Vac valve opened
1/27/2013	8:55:14 PM	Main Vac valve closed
1/27/2013	8:55:21 PM	Main Vac valve opened
1/27/2013	8:55:36 PM	Main Vac valve closed
1/27/2013	8:55:42 PM	Main Vac valve opened
1/27/2013	8:56:23 PM	Main Vac valve closed
1/27/2013	8:56:29 PM	Main Vac valve opened
1/27/2013	8:56:47 PM	Recipe started at 8:56 PM
1/27/2013	8:56:47 PM	Helium valve closed
1/27/2013	8:56:47 PM	H2 valve closed
1/27/2013	8:56:47 PM	BCl3 valve closed
1/27/2013	8:56:47 PM	PH3 valve closed
1/27/2013	8:56:47 PM	SiCl4 pre valve closed
1/27/2013	8:56:47 PM	SiCl4 post valve closed
1/27/2013	8:56:47 PM	Bypass valve closed
1/27/2013	8:56:47 PM	Bubbler valve closed
1/27/2013	8:56:47 PM	Main Vac valve opened
1/27/2013	8:56:47 PM	Helium MFC set to  0.000000
1/27/2013	8:56:47 PM	H2 MFC set to  0.000000
1/27/2013	8:56:47 PM	BCl3 MFC set to  0.000000
1/27/2013	8:56:47 PM	PH3 MFC set to  0.000000
1/27/2013	8:56:47 PM	SiCl4 MFC set to  0.000000
1/27/2013	8:56:47 PM	Bypass solenoid MFC set to  0.000000
1/27/2013	8:56:48 PM	Tube furnace set to 150
1/27/2013	8:57:18 PM	H2 valve closed
1/27/2013	8:57:18 PM	BCl3 valve closed
1/27/2013	8:57:18 PM	PH3 valve closed
1/27/2013	8:57:18 PM	SiCl4 pre valve closed
1/27/2013	8:57:18 PM	SiCl4 post valve closed
1/27/2013	8:57:18 PM	Bypass valve closed
1/27/2013	8:57:18 PM	Bubbler valve closed
1/27/2013	8:57:18 PM	Helium valve opened
1/27/2013	8:57:18 PM	Main Vac valve opened
1/27/2013	8:57:18 PM	Helium MFC set to  20.000000
1/27/2013	8:57:18 PM	H2 MFC set to  0.000000
1/27/2013	8:57:18 PM	BCl3 MFC set to  0.000000
1/27/2013	8:57:18 PM	PH3 MFC set to  0.000000
1/27/2013	8:57:18 PM	SiCl4 MFC set to  0.000000
1/27/2013	8:57:18 PM	Bypass solenoid MFC set to  0.000000
1/27/2013	8:57:18 PM	Tube furnace set to 150
1/27/2013	8:57:48 PM	Helium valve closed
1/27/2013	8:57:48 PM	H2 valve closed
1/27/2013	8:57:48 PM	BCl3 valve closed
1/27/2013	8:57:48 PM	PH3 valve closed
1/27/2013	8:57:48 PM	SiCl4 pre valve closed
1/27/2013	8:57:48 PM	SiCl4 post valve closed
1/27/2013	8:57:48 PM	Bypass valve closed
1/27/2013	8:57:48 PM	Bubbler valve closed
1/27/2013	8:57:48 PM	Main Vac valve opened
1/27/2013	8:57:48 PM	Helium MFC set to  0.000000
1/27/2013	8:57:48 PM	H2 MFC set to  0.000000
1/27/2013	8:57:48 PM	BCl3 MFC set to  0.000000
1/27/2013	8:57:48 PM	PH3 MFC set to  0.000000
1/27/2013	8:57:48 PM	SiCl4 MFC set to  0.000000
1/27/2013	8:57:48 PM	Bypass solenoid MFC set to  0.000000
1/27/2013	8:57:48 PM	Tube furnace set to 150
1/27/2013	8:58:18 PM	H2 valve closed
1/27/2013	8:58:18 PM	BCl3 valve closed
1/27/2013	8:58:18 PM	PH3 valve closed
1/27/2013	8:58:18 PM	SiCl4 pre valve closed
1/27/2013	8:58:18 PM	SiCl4 post valve closed
1/27/2013	8:58:18 PM	Bypass valve closed
1/27/2013	8:58:18 PM	Bubbler valve closed
1/27/2013	8:58:18 PM	Helium valve opened
1/27/2013	8:58:18 PM	Main Vac valve opened
1/27/2013	8:58:18 PM	Helium MFC set to  20.000000
1/27/2013	8:58:18 PM	H2 MFC set to  0.000000
1/27/2013	8:58:18 PM	BCl3 MFC set to  0.000000
1/27/2013	8:58:18 PM	PH3 MFC set to  0.000000
1/27/2013	8:58:18 PM	SiCl4 MFC set to  0.000000
1/27/2013	8:58:18 PM	Bypass solenoid MFC set to  0.000000
1/27/2013	8:58:18 PM	Tube furnace set to 150
1/27/2013	8:58:48 PM	Helium valve closed
1/27/2013	8:58:48 PM	H2 valve closed
1/27/2013	8:58:48 PM	BCl3 valve closed
1/27/2013	8:58:48 PM	PH3 valve closed
1/27/2013	8:58:48 PM	SiCl4 pre valve closed
1/27/2013	8:58:48 PM	SiCl4 post valve closed
1/27/2013	8:58:48 PM	Bypass valve closed
1/27/2013	8:58:48 PM	Bubbler valve closed
1/27/2013	8:58:48 PM	Main Vac valve opened
1/27/2013	8:58:48 PM	Helium MFC set to  0.000000
1/27/2013	8:58:48 PM	H2 MFC set to  0.000000
1/27/2013	8:58:48 PM	BCl3 MFC set to  0.000000
1/27/2013	8:58:48 PM	PH3 MFC set to  0.000000
1/27/2013	8:58:48 PM	SiCl4 MFC set to  0.000000
1/27/2013	8:58:48 PM	Bypass solenoid MFC set to  0.000000
1/27/2013	8:58:49 PM	Tube furnace set to 150
1/27/2013	8:59:19 PM	H2 valve closed
1/27/2013	8:59:19 PM	BCl3 valve closed
1/27/2013	8:59:19 PM	PH3 valve closed
1/27/2013	8:59:19 PM	SiCl4 pre valve closed
1/27/2013	8:59:19 PM	SiCl4 post valve closed
1/27/2013	8:59:19 PM	Bypass valve closed
1/27/2013	8:59:19 PM	Bubbler valve closed
1/27/2013	8:59:19 PM	Helium valve opened
1/27/2013	8:59:19 PM	Main Vac valve opened
1/27/2013	8:59:19 PM	Helium MFC set to  20.000000
1/27/2013	8:59:19 PM	H2 MFC set to  0.000000
1/27/2013	8:59:19 PM	BCl3 MFC set to  0.000000
1/27/2013	8:59:19 PM	PH3 MFC set to  0.000000
1/27/2013	8:59:19 PM	SiCl4 MFC set to  0.000000
1/27/2013	8:59:19 PM	Bypass solenoid MFC set to  0.000000
1/27/2013	8:59:19 PM	Tube furnace set to 150
1/27/2013	9:01:19 PM	Helium valve closed
1/27/2013	9:01:19 PM	H2 valve closed
1/27/2013	9:01:19 PM	BCl3 valve closed
1/27/2013	9:01:19 PM	PH3 valve closed
1/27/2013	9:01:19 PM	SiCl4 pre valve closed
1/27/2013	9:01:19 PM	SiCl4 post valve closed
1/27/2013	9:01:19 PM	Bypass valve closed
1/27/2013	9:01:19 PM	Bubbler valve closed
1/27/2013	9:01:19 PM	Main Vac valve opened
1/27/2013	9:01:19 PM	Helium MFC set to  0.000000
1/27/2013	9:01:19 PM	H2 MFC set to  0.000000
1/27/2013	9:01:19 PM	BCl3 MFC set to  0.000000
1/27/2013	9:01:19 PM	PH3 MFC set to  0.000000
1/27/2013	9:01:19 PM	SiCl4 MFC set to  0.000000
1/27/2013	9:01:19 PM	Bypass solenoid MFC set to  0.000000
1/27/2013	9:01:19 PM	Tube furnace set to 150
1/27/2013	9:01:49 PM	H2 valve closed
1/27/2013	9:01:49 PM	BCl3 valve closed
1/27/2013	9:01:49 PM	PH3 valve closed
1/27/2013	9:01:49 PM	SiCl4 pre valve closed
1/27/2013	9:01:49 PM	SiCl4 post valve closed
1/27/2013	9:01:49 PM	Bypass valve closed
1/27/2013	9:01:49 PM	Bubbler valve closed
1/27/2013	9:01:49 PM	Helium valve opened
1/27/2013	9:01:49 PM	Main Vac valve opened
1/27/2013	9:01:49 PM	Helium MFC set to  20.000000
1/27/2013	9:01:49 PM	H2 MFC set to  0.000000
1/27/2013	9:01:49 PM	BCl3 MFC set to  0.000000
1/27/2013	9:01:49 PM	PH3 MFC set to  0.000000
1/27/2013	9:01:49 PM	SiCl4 MFC set to  0.000000
1/27/2013	9:01:49 PM	Bypass solenoid MFC set to  0.000000
1/27/2013	9:01:49 PM	Tube furnace set to 150
1/27/2013	9:02:19 PM	Helium valve closed
1/27/2013	9:02:19 PM	H2 valve closed
1/27/2013	9:02:19 PM	BCl3 valve closed
1/27/2013	9:02:19 PM	PH3 valve closed
1/27/2013	9:02:19 PM	SiCl4 pre valve closed
1/27/2013	9:02:19 PM	SiCl4 post valve closed
1/27/2013	9:02:19 PM	Bypass valve closed
1/27/2013	9:02:19 PM	Bubbler valve closed
1/27/2013	9:02:19 PM	Main Vac valve opened
1/27/2013	9:02:19 PM	Helium MFC set to  0.000000
1/27/2013	9:02:19 PM	H2 MFC set to  0.000000
1/27/2013	9:02:19 PM	BCl3 MFC set to  0.000000
1/27/2013	9:02:19 PM	PH3 MFC set to  0.000000
1/27/2013	9:02:19 PM	SiCl4 MFC set to  0.000000
1/27/2013	9:02:19 PM	Bypass solenoid MFC set to  0.000000
1/27/2013	9:02:19 PM	Tube furnace set to 150
1/27/2013	9:02:50 PM	H2 valve closed
1/27/2013	9:02:50 PM	BCl3 valve closed
1/27/2013	9:02:50 PM	PH3 valve closed
1/27/2013	9:02:50 PM	SiCl4 pre valve closed
1/27/2013	9:02:50 PM	SiCl4 post valve closed
1/27/2013	9:02:50 PM	Bypass valve closed
1/27/2013	9:02:50 PM	Bubbler valve closed
1/27/2013	9:02:50 PM	Helium valve opened
1/27/2013	9:02:50 PM	Main Vac valve opened
1/27/2013	9:02:50 PM	Helium MFC set to  20.000000
1/27/2013	9:02:50 PM	H2 MFC set to  0.000000
1/27/2013	9:02:50 PM	BCl3 MFC set to  0.000000
1/27/2013	9:02:50 PM	PH3 MFC set to  0.000000
1/27/2013	9:02:50 PM	SiCl4 MFC set to  0.000000
1/27/2013	9:02:50 PM	Bypass solenoid MFC set to  0.000000
1/27/2013	9:02:50 PM	Tube furnace set to 150
1/27/2013	9:03:20 PM	Helium valve closed
1/27/2013	9:03:20 PM	H2 valve closed
1/27/2013	9:03:20 PM	BCl3 valve closed
1/27/2013	9:03:20 PM	PH3 valve closed
1/27/2013	9:03:20 PM	SiCl4 pre valve closed
1/27/2013	9:03:20 PM	SiCl4 post valve closed
1/27/2013	9:03:20 PM	Bypass valve closed
1/27/2013	9:03:20 PM	Bubbler valve closed
1/27/2013	9:03:20 PM	Main Vac valve opened
1/27/2013	9:03:20 PM	Helium MFC set to  0.000000
1/27/2013	9:03:20 PM	H2 MFC set to  0.000000
1/27/2013	9:03:20 PM	BCl3 MFC set to  0.000000
1/27/2013	9:03:20 PM	PH3 MFC set to  0.000000
1/27/2013	9:03:20 PM	SiCl4 MFC set to  0.000000
1/27/2013	9:03:20 PM	Bypass solenoid MFC set to  0.000000
1/27/2013	9:03:20 PM	Tube furnace set to 150
1/27/2013	9:03:50 PM	H2 valve closed
1/27/2013	9:03:50 PM	BCl3 valve closed
1/27/2013	9:03:50 PM	PH3 valve closed
1/27/2013	9:03:50 PM	SiCl4 pre valve closed
1/27/2013	9:03:50 PM	SiCl4 post valve closed
1/27/2013	9:03:50 PM	Bypass valve closed
1/27/2013	9:03:50 PM	Bubbler valve closed
1/27/2013	9:03:50 PM	Helium valve opened
1/27/2013	9:03:50 PM	Main Vac valve opened
1/27/2013	9:03:50 PM	Helium MFC set to  20.000000
1/27/2013	9:03:50 PM	H2 MFC set to  0.000000
1/27/2013	9:03:50 PM	BCl3 MFC set to  0.000000
1/27/2013	9:03:50 PM	PH3 MFC set to  0.000000
1/27/2013	9:03:50 PM	SiCl4 MFC set to  0.000000
1/27/2013	9:03:50 PM	Bypass solenoid MFC set to  0.000000
1/27/2013	9:03:50 PM	Tube furnace set to 150
1/27/2013	9:05:50 PM	Helium valve closed
1/27/2013	9:05:50 PM	H2 valve closed
1/27/2013	9:05:50 PM	BCl3 valve closed
1/27/2013	9:05:50 PM	PH3 valve closed
1/27/2013	9:05:50 PM	SiCl4 pre valve closed
1/27/2013	9:05:50 PM	SiCl4 post valve closed
1/27/2013	9:05:50 PM	Bypass valve closed
1/27/2013	9:05:50 PM	Bubbler valve closed
1/27/2013	9:05:50 PM	Main Vac valve opened
1/27/2013	9:05:50 PM	Helium MFC set to  0.000000
1/27/2013	9:05:50 PM	H2 MFC set to  0.000000
1/27/2013	9:05:50 PM	BCl3 MFC set to  0.000000
1/27/2013	9:05:50 PM	PH3 MFC set to  0.000000
1/27/2013	9:05:50 PM	SiCl4 MFC set to  0.000000
1/27/2013	9:05:50 PM	Bypass solenoid MFC set to  0.000000
1/27/2013	9:05:50 PM	Tube furnace set to 150
1/27/2013	9:06:20 PM	H2 valve closed
1/27/2013	9:06:20 PM	BCl3 valve closed
1/27/2013	9:06:20 PM	PH3 valve closed
1/27/2013	9:06:21 PM	SiCl4 pre valve closed
1/27/2013	9:06:21 PM	SiCl4 post valve closed
1/27/2013	9:06:21 PM	Bypass valve closed
1/27/2013	9:06:21 PM	Bubbler valve closed
1/27/2013	9:06:21 PM	Helium valve opened
1/27/2013	9:06:21 PM	Main Vac valve opened
1/27/2013	9:06:21 PM	Helium MFC set to  20.000000
1/27/2013	9:06:21 PM	H2 MFC set to  0.000000
1/27/2013	9:06:21 PM	BCl3 MFC set to  0.000000
1/27/2013	9:06:21 PM	PH3 MFC set to  0.000000
1/27/2013	9:06:21 PM	SiCl4 MFC set to  0.000000
1/27/2013	9:06:21 PM	Bypass solenoid MFC set to  0.000000
1/27/2013	9:06:21 PM	Tube furnace set to 150
1/27/2013	9:06:51 PM	Helium valve closed
1/27/2013	9:06:51 PM	H2 valve closed
1/27/2013	9:06:51 PM	BCl3 valve closed
1/27/2013	9:06:51 PM	PH3 valve closed
1/27/2013	9:06:51 PM	SiCl4 pre valve closed
1/27/2013	9:06:51 PM	SiCl4 post valve closed
1/27/2013	9:06:51 PM	Bypass valve closed
1/27/2013	9:06:51 PM	Bubbler valve closed
1/27/2013	9:06:51 PM	Main Vac valve opened
1/27/2013	9:06:51 PM	Helium MFC set to  0.000000
1/27/2013	9:06:51 PM	H2 MFC set to  0.000000
1/27/2013	9:06:51 PM	BCl3 MFC set to  0.000000
1/27/2013	9:06:51 PM	PH3 MFC set to  0.000000
1/27/2013	9:06:51 PM	SiCl4 MFC set to  0.000000
1/27/2013	9:06:51 PM	Bypass solenoid MFC set to  0.000000
1/27/2013	9:06:51 PM	Tube furnace set to 150
1/27/2013	9:07:15 PM	Run aborted at 9:07 PM
1/27/2013	9:07:15 PM	Helium valve closed
1/27/2013	9:07:15 PM	H2 valve closed
1/27/2013	9:07:15 PM	BCl3 valve closed
1/27/2013	9:07:15 PM	PH3 valve closed
1/27/2013	9:07:15 PM	SiCl4 pre valve closed
1/27/2013	9:07:15 PM	SiCl4 post valve closed
1/27/2013	9:07:15 PM	Bypass valve closed
1/27/2013	9:07:15 PM	Main Vac valve closed
1/27/2013	9:07:15 PM	Bubbler valve closed
1/27/2013	9:07:15 PM	Helium MFC set to  0.000000
1/27/2013	9:07:15 PM	H2 MFC set to  0.000000
1/27/2013	9:07:15 PM	BCl3 MFC set to  0.000000
1/27/2013	9:07:15 PM	PH3 MFC set to  0.000000
1/27/2013	9:07:15 PM	SiCl4 MFC set to  0.000000
1/27/2013	9:07:15 PM	Tube furnace set to 0
1/27/2013	9:07:21 PM	Main Vac valve opened
1/27/2013	9:07:36 PM	Main Vac valve closed
1/27/2013	9:07:40 PM	Main Vac valve opened
1/27/2013	9:08:21 PM	Recipe started at 9:08 PM
1/27/2013	9:08:21 PM	Helium valve closed
1/27/2013	9:08:21 PM	H2 valve closed
1/27/2013	9:08:21 PM	BCl3 valve closed
1/27/2013	9:08:21 PM	PH3 valve closed
1/27/2013	9:08:21 PM	SiCl4 pre valve closed
1/27/2013	9:08:21 PM	SiCl4 post valve closed
1/27/2013	9:08:21 PM	Main Vac valve closed
1/27/2013	9:08:21 PM	Bypass valve closed
1/27/2013	9:08:21 PM	Bubbler valve closed
1/27/2013	9:08:21 PM	Helium MFC set to  0.000000
1/27/2013	9:08:21 PM	H2 MFC set to  0.000000
1/27/2013	9:08:21 PM	BCl3 MFC set to  0.000000
1/27/2013	9:08:21 PM	PH3 MFC set to  0.000000
1/27/2013	9:08:21 PM	SiCl4 MFC set to  0.000000
1/27/2013	9:08:21 PM	Bypass solenoid MFC set to  0.000000
1/27/2013	9:08:21 PM	Tube furnace set to 0
1/27/2013	9:08:24 PM	Helium valve closed
1/27/2013	9:08:24 PM	BCl3 valve closed
1/27/2013	9:08:24 PM	PH3 valve closed
1/27/2013	9:08:24 PM	SiCl4 pre valve closed
1/27/2013	9:08:24 PM	SiCl4 post valve closed
1/27/2013	9:08:24 PM	Main Vac valve closed
1/27/2013	9:08:24 PM	Bypass valve closed
1/27/2013	9:08:24 PM	Bubbler valve closed
1/27/2013	9:08:24 PM	H2 valve opened
1/27/2013	9:08:24 PM	Helium MFC set to  0.000000
1/27/2013	9:08:24 PM	H2 MFC set to  500.000000
1/27/2013	9:08:24 PM	BCl3 MFC set to  0.000000
1/27/2013	9:08:24 PM	PH3 MFC set to  0.000000
1/27/2013	9:08:24 PM	SiCl4 MFC set to  0.000000
1/27/2013	9:08:24 PM	Bypass solenoid MFC set to  0.000000
1/27/2013	9:08:24 PM	Tube furnace set to 0
1/27/2013	9:09:36 PM	Helium valve closed
1/27/2013	9:09:36 PM	BCl3 valve closed
1/27/2013	9:09:36 PM	PH3 valve closed
1/27/2013	9:09:36 PM	SiCl4 pre valve closed
1/27/2013	9:09:36 PM	SiCl4 post valve closed
1/27/2013	9:09:36 PM	Main Vac valve closed
1/27/2013	9:09:36 PM	Bypass valve closed
1/27/2013	9:09:36 PM	H2 valve opened
1/27/2013	9:09:36 PM	Bubbler valve opened
1/27/2013	9:09:36 PM	Helium MFC set to  0.000000
1/27/2013	9:09:36 PM	H2 MFC set to  500.000000
1/27/2013	9:09:36 PM	BCl3 MFC set to  0.000000
1/27/2013	9:09:36 PM	PH3 MFC set to  0.000000
1/27/2013	9:09:36 PM	SiCl4 MFC set to  0.000000
1/27/2013	9:09:36 PM	Bypass solenoid MFC set to  0.000000
1/27/2013	9:09:36 PM	Tube furnace set to 0
1/27/2013	9:09:37 PM	Helium valve closed
1/27/2013	9:09:37 PM	BCl3 valve closed
1/27/2013	9:09:37 PM	PH3 valve closed
1/27/2013	9:09:37 PM	SiCl4 pre valve closed
1/27/2013	9:09:37 PM	SiCl4 post valve closed
1/27/2013	9:09:37 PM	Main Vac valve closed
1/27/2013	9:09:37 PM	Bypass valve closed
1/27/2013	9:09:37 PM	H2 valve opened
1/27/2013	9:09:37 PM	Bubbler valve opened
1/27/2013	9:09:37 PM	Helium MFC set to  0.000000
1/27/2013	9:09:37 PM	H2 MFC set to  500.000000
1/27/2013	9:09:37 PM	BCl3 MFC set to  0.000000
1/27/2013	9:09:37 PM	PH3 MFC set to  0.000000
1/27/2013	9:09:37 PM	SiCl4 MFC set to  0.000000
1/27/2013	9:09:37 PM	Bypass solenoid MFC set to  0.000000
1/27/2013	9:09:37 PM	Tube furnace set to 1000
1/27/2013	9:29:37 PM	Helium valve closed
1/27/2013	9:29:37 PM	BCl3 valve closed
1/27/2013	9:29:37 PM	PH3 valve closed
1/27/2013	9:29:37 PM	Main Vac valve closed
1/27/2013	9:29:37 PM	Bypass valve closed
1/27/2013	9:29:37 PM	H2 valve opened
1/27/2013	9:29:37 PM	SiCl4 pre valve opened
1/27/2013	9:29:37 PM	SiCl4 post valve opened
1/27/2013	9:29:37 PM	Bubbler valve opened
1/27/2013	9:29:37 PM	Helium MFC set to  0.000000
1/27/2013	9:29:37 PM	H2 MFC set to  500.000000
1/27/2013	9:29:37 PM	BCl3 MFC set to  0.000000
1/27/2013	9:29:37 PM	PH3 MFC set to  0.000000
1/27/2013	9:29:37 PM	SiCl4 MFC set to  50.000000
1/27/2013	9:29:37 PM	Bypass solenoid MFC set to  0.000000
1/27/2013	9:29:37 PM	Tube furnace set to 1000
1/27/2013	9:41:37 PM	Helium valve closed
1/27/2013	9:41:37 PM	BCl3 valve closed
1/27/2013	9:41:37 PM	PH3 valve closed
1/27/2013	9:41:37 PM	SiCl4 pre valve closed
1/27/2013	9:41:37 PM	SiCl4 post valve closed
1/27/2013	9:41:37 PM	Main Vac valve closed
1/27/2013	9:41:37 PM	Bypass valve closed
1/27/2013	9:41:37 PM	H2 valve opened
1/27/2013	9:41:37 PM	Bubbler valve opened
1/27/2013	9:41:37 PM	Helium MFC set to  0.000000
1/27/2013	9:41:37 PM	H2 MFC set to  500.000000
1/27/2013	9:41:37 PM	BCl3 MFC set to  0.000000
1/27/2013	9:41:37 PM	PH3 MFC set to  0.000000
1/27/2013	9:41:37 PM	SiCl4 MFC set to  0.000000
1/27/2013	9:41:37 PM	Bypass solenoid MFC set to  0.000000
1/27/2013	9:41:38 PM	Tube furnace set to 750
1/27/2013	9:46:38 PM	H2 valve closed
1/27/2013	9:46:38 PM	BCl3 valve closed
1/27/2013	9:46:38 PM	PH3 valve closed
1/27/2013	9:46:38 PM	SiCl4 pre valve closed
1/27/2013	9:46:38 PM	SiCl4 post valve closed
1/27/2013	9:46:38 PM	Main Vac valve closed
1/27/2013	9:46:38 PM	Bypass valve closed
1/27/2013	9:46:38 PM	Helium valve opened
1/27/2013	9:46:38 PM	Bubbler valve opened
1/27/2013	9:46:38 PM	Helium MFC set to  500.000000
1/27/2013	9:46:38 PM	H2 MFC set to  0.000000
1/27/2013	9:46:38 PM	BCl3 MFC set to  0.000000
1/27/2013	9:46:38 PM	PH3 MFC set to  0.000000
1/27/2013	9:46:38 PM	SiCl4 MFC set to  0.000000
1/27/2013	9:46:38 PM	Bypass solenoid MFC set to  0.000000
1/27/2013	9:46:38 PM	Tube furnace set to 0
1/27/2013	10:06:38 PM	Helium valve closed
1/27/2013	10:06:38 PM	H2 valve closed
1/27/2013	10:06:38 PM	BCl3 valve closed
1/27/2013	10:06:38 PM	PH3 valve closed
1/27/2013	10:06:38 PM	SiCl4 pre valve closed
1/27/2013	10:06:38 PM	SiCl4 post valve closed
1/27/2013	10:06:38 PM	Main Vac valve closed
1/27/2013	10:06:38 PM	Bypass valve closed
1/27/2013	10:06:38 PM	Bubbler valve closed
1/27/2013	10:06:38 PM	Helium MFC set to  0.000000
1/27/2013	10:06:38 PM	H2 MFC set to  0.000000
1/27/2013	10:06:38 PM	BCl3 MFC set to  0.000000
1/27/2013	10:06:38 PM	PH3 MFC set to  0.000000
1/27/2013	10:06:38 PM	SiCl4 MFC set to  0.000000
1/27/2013	10:06:38 PM	Bypass solenoid MFC set to  0.000000
1/27/2013	10:06:38 PM	Tube furnace set to 0
1/27/2013	10:06:39 PM	Run finished at 10:06 PM
1/27/2013	10:32:23 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/27/2013	10:32:24 PM	Recipe started at 10:32 PM
1/27/2013	10:32:24 PM	Helium valve closed
1/27/2013	10:32:24 PM	H2 valve closed
1/27/2013	10:32:24 PM	BCl3 valve closed
1/27/2013	10:32:24 PM	PH3 valve closed
1/27/2013	10:32:24 PM	SiCl4 pre valve closed
1/27/2013	10:32:24 PM	SiCl4 post valve closed
1/27/2013	10:32:24 PM	Main Vac valve closed
1/27/2013	10:32:24 PM	Bypass valve closed
1/27/2013	10:32:24 PM	Bubbler valve closed
1/27/2013	10:32:24 PM	Helium MFC set to  0.000000
1/27/2013	10:32:24 PM	H2 MFC set to  0.000000
1/27/2013	10:32:24 PM	BCl3 MFC set to  0.000000
1/27/2013	10:32:24 PM	PH3 MFC set to  0.000000
1/27/2013	10:32:24 PM	SiCl4 MFC set to  0.000000
1/27/2013	10:32:24 PM	Bypass solenoid MFC set to  0.000000
1/27/2013	10:32:24 PM	Tube furnace set to 0
1/27/2013	10:32:27 PM	H2 valve closed
1/27/2013	10:32:27 PM	BCl3 valve closed
1/27/2013	10:32:27 PM	PH3 valve closed
1/27/2013	10:32:27 PM	SiCl4 pre valve closed
1/27/2013	10:32:27 PM	SiCl4 post valve closed
1/27/2013	10:32:27 PM	Main Vac valve closed
1/27/2013	10:32:27 PM	Bypass valve closed
1/27/2013	10:32:27 PM	Bubbler valve closed
1/27/2013	10:32:27 PM	Helium valve opened
1/27/2013	10:32:27 PM	Helium MFC set to  500.000000
1/27/2013	10:32:27 PM	H2 MFC set to  0.000000
1/27/2013	10:32:27 PM	BCl3 MFC set to  0.000000
1/27/2013	10:32:27 PM	PH3 MFC set to  0.000000
1/27/2013	10:32:27 PM	SiCl4 MFC set to  0.000000
1/27/2013	10:32:27 PM	Bypass solenoid MFC set to  0.000000
1/27/2013	10:32:27 PM	Tube furnace set to 0
1/27/2013	10:32:28 PM	Helium valve closed
1/27/2013	10:32:28 PM	H2 valve closed
1/27/2013	10:32:28 PM	BCl3 valve closed
1/27/2013	10:32:28 PM	PH3 valve closed
1/27/2013	10:32:28 PM	SiCl4 pre valve closed
1/27/2013	10:32:28 PM	SiCl4 post valve closed
1/27/2013	10:32:28 PM	Main Vac valve closed
1/27/2013	10:32:28 PM	Bypass valve closed
1/27/2013	10:32:28 PM	Bubbler valve closed
1/27/2013	10:32:28 PM	Helium MFC set to  0.000000
1/27/2013	10:32:28 PM	H2 MFC set to  0.000000
1/27/2013	10:32:28 PM	BCl3 MFC set to  0.000000
1/27/2013	10:32:28 PM	PH3 MFC set to  0.000000
1/27/2013	10:32:28 PM	SiCl4 MFC set to  0.000000
1/27/2013	10:32:28 PM	Bypass solenoid MFC set to  0.000000
1/27/2013	10:32:28 PM	Tube furnace set to 0
1/27/2013	10:32:29 PM	Run finished at 10:32 PM
1/27/2013	10:32:29 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/27/2013	10:34:24 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/27/2013	10:34:24 PM	Recipe started at 10:34 PM
1/27/2013	10:34:24 PM	Helium valve closed
1/27/2013	10:34:24 PM	H2 valve closed
1/27/2013	10:34:24 PM	BCl3 valve closed
1/27/2013	10:34:24 PM	PH3 valve closed
1/27/2013	10:34:24 PM	SiCl4 pre valve closed
1/27/2013	10:34:24 PM	SiCl4 post valve closed
1/27/2013	10:34:24 PM	Main Vac valve closed
1/27/2013	10:34:24 PM	Bubbler valve closed
1/27/2013	10:34:24 PM	Bypass valve opened
1/27/2013	10:34:24 PM	Helium MFC set to  0.000000
1/27/2013	10:34:24 PM	H2 MFC set to  0.000000
1/27/2013	10:34:24 PM	BCl3 MFC set to  0.000000
1/27/2013	10:34:24 PM	PH3 MFC set to  0.000000
1/27/2013	10:34:24 PM	SiCl4 MFC set to  0.000000
1/27/2013	10:34:24 PM	Bypass solenoid MFC set to  0.000000
1/27/2013	10:34:24 PM	Tube furnace set to 0
1/27/2013	10:35:25 PM	Helium valve closed
1/27/2013	10:35:25 PM	H2 valve closed
1/27/2013	10:35:25 PM	BCl3 valve closed
1/27/2013	10:35:25 PM	PH3 valve closed
1/27/2013	10:35:25 PM	SiCl4 pre valve closed
1/27/2013	10:35:25 PM	SiCl4 post valve closed
1/27/2013	10:35:25 PM	Main Vac valve closed
1/27/2013	10:35:25 PM	Bubbler valve closed
1/27/2013	10:35:25 PM	Bypass valve opened
1/27/2013	10:35:25 PM	Helium MFC set to  0.000000
1/27/2013	10:35:25 PM	H2 MFC set to  0.000000
1/27/2013	10:35:25 PM	BCl3 MFC set to  0.000000
1/27/2013	10:35:25 PM	PH3 MFC set to  0.000000
1/27/2013	10:35:25 PM	SiCl4 MFC set to  0.000000
1/27/2013	10:35:25 PM	Bypass solenoid MFC set to  0.000000
1/27/2013	10:35:25 PM	Tube furnace set to 0
1/27/2013	10:36:25 PM	Helium valve closed
1/27/2013	10:36:25 PM	H2 valve closed
1/27/2013	10:36:25 PM	BCl3 valve closed
1/27/2013	10:36:25 PM	PH3 valve closed
1/27/2013	10:36:25 PM	SiCl4 pre valve closed
1/27/2013	10:36:25 PM	SiCl4 post valve closed
1/27/2013	10:36:25 PM	Bypass valve closed
1/27/2013	10:36:25 PM	Bubbler valve closed
1/27/2013	10:36:25 PM	Main Vac valve opened
1/27/2013	10:36:25 PM	Helium MFC set to  0.000000
1/27/2013	10:36:25 PM	H2 MFC set to  0.000000
1/27/2013	10:36:25 PM	BCl3 MFC set to  0.000000
1/27/2013	10:36:25 PM	PH3 MFC set to  0.000000
1/27/2013	10:36:25 PM	SiCl4 MFC set to  0.000000
1/27/2013	10:36:25 PM	Bypass solenoid MFC set to  0.000000
1/27/2013	10:36:25 PM	Tube furnace set to 0
1/27/2013	10:36:26 PM	Run finished at 10:36 PM
1/27/2013	10:36:26 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/27/2013	10:37:22 PM	Recipe started at 10:37 PM
1/27/2013	10:37:22 PM	Helium valve closed
1/27/2013	10:37:22 PM	H2 valve closed
1/27/2013	10:37:22 PM	BCl3 valve closed
1/27/2013	10:37:22 PM	PH3 valve closed
1/27/2013	10:37:22 PM	SiCl4 pre valve closed
1/27/2013	10:37:22 PM	SiCl4 post valve closed
1/27/2013	10:37:22 PM	Bypass valve closed
1/27/2013	10:37:22 PM	Bubbler valve closed
1/27/2013	10:37:22 PM	Main Vac valve opened
1/27/2013	10:37:22 PM	Helium MFC set to  0.000000
1/27/2013	10:37:22 PM	H2 MFC set to  0.000000
1/27/2013	10:37:22 PM	BCl3 MFC set to  0.000000
1/27/2013	10:37:22 PM	PH3 MFC set to  0.000000
1/27/2013	10:37:22 PM	SiCl4 MFC set to  0.000000
1/27/2013	10:37:22 PM	Bypass solenoid MFC set to  0.000000
1/27/2013	10:37:22 PM	Tube furnace set to 150
1/27/2013	10:37:52 PM	H2 valve closed
1/27/2013	10:37:52 PM	BCl3 valve closed
1/27/2013	10:37:52 PM	PH3 valve closed
1/27/2013	10:37:52 PM	SiCl4 pre valve closed
1/27/2013	10:37:52 PM	SiCl4 post valve closed
1/27/2013	10:37:52 PM	Bypass valve closed
1/27/2013	10:37:52 PM	Bubbler valve closed
1/27/2013	10:37:52 PM	Helium valve opened
1/27/2013	10:37:52 PM	Main Vac valve opened
1/27/2013	10:37:52 PM	Helium MFC set to  20.000000
1/27/2013	10:37:52 PM	H2 MFC set to  0.000000
1/27/2013	10:37:52 PM	BCl3 MFC set to  0.000000
1/27/2013	10:37:52 PM	PH3 MFC set to  0.000000
1/27/2013	10:37:52 PM	SiCl4 MFC set to  0.000000
1/27/2013	10:37:52 PM	Bypass solenoid MFC set to  0.000000
1/27/2013	10:37:52 PM	Tube furnace set to 150
1/27/2013	10:38:22 PM	Helium valve closed
1/27/2013	10:38:22 PM	H2 valve closed
1/27/2013	10:38:22 PM	BCl3 valve closed
1/27/2013	10:38:22 PM	PH3 valve closed
1/27/2013	10:38:22 PM	SiCl4 pre valve closed
1/27/2013	10:38:22 PM	SiCl4 post valve closed
1/27/2013	10:38:22 PM	Bypass valve closed
1/27/2013	10:38:22 PM	Bubbler valve closed
1/27/2013	10:38:22 PM	Main Vac valve opened
1/27/2013	10:38:22 PM	Helium MFC set to  0.000000
1/27/2013	10:38:22 PM	H2 MFC set to  0.000000
1/27/2013	10:38:22 PM	BCl3 MFC set to  0.000000
1/27/2013	10:38:22 PM	PH3 MFC set to  0.000000
1/27/2013	10:38:22 PM	SiCl4 MFC set to  0.000000
1/27/2013	10:38:22 PM	Bypass solenoid MFC set to  0.000000
1/27/2013	10:38:22 PM	Tube furnace set to 150
1/27/2013	10:38:52 PM	H2 valve closed
1/27/2013	10:38:52 PM	BCl3 valve closed
1/27/2013	10:38:52 PM	PH3 valve closed
1/27/2013	10:38:52 PM	SiCl4 pre valve closed
1/27/2013	10:38:52 PM	SiCl4 post valve closed
1/27/2013	10:38:52 PM	Bypass valve closed
1/27/2013	10:38:52 PM	Bubbler valve closed
1/27/2013	10:38:52 PM	Helium valve opened
1/27/2013	10:38:52 PM	Main Vac valve opened
1/27/2013	10:38:52 PM	Helium MFC set to  20.000000
1/27/2013	10:38:52 PM	H2 MFC set to  0.000000
1/27/2013	10:38:52 PM	BCl3 MFC set to  0.000000
1/27/2013	10:38:52 PM	PH3 MFC set to  0.000000
1/27/2013	10:38:52 PM	SiCl4 MFC set to  0.000000
1/27/2013	10:38:52 PM	Bypass solenoid MFC set to  0.000000
1/27/2013	10:38:53 PM	Tube furnace set to 150
1/27/2013	10:39:23 PM	Helium valve closed
1/27/2013	10:39:23 PM	H2 valve closed
1/27/2013	10:39:23 PM	BCl3 valve closed
1/27/2013	10:39:23 PM	PH3 valve closed
1/27/2013	10:39:23 PM	SiCl4 pre valve closed
1/27/2013	10:39:23 PM	SiCl4 post valve closed
1/27/2013	10:39:23 PM	Bypass valve closed
1/27/2013	10:39:23 PM	Bubbler valve closed
1/27/2013	10:39:23 PM	Main Vac valve opened
1/27/2013	10:39:23 PM	Helium MFC set to  0.000000
1/27/2013	10:39:23 PM	H2 MFC set to  0.000000
1/27/2013	10:39:23 PM	BCl3 MFC set to  0.000000
1/27/2013	10:39:23 PM	PH3 MFC set to  0.000000
1/27/2013	10:39:23 PM	SiCl4 MFC set to  0.000000
1/27/2013	10:39:23 PM	Bypass solenoid MFC set to  0.000000
1/27/2013	10:39:23 PM	Tube furnace set to 150
1/27/2013	10:39:53 PM	H2 valve closed
1/27/2013	10:39:53 PM	BCl3 valve closed
1/27/2013	10:39:53 PM	PH3 valve closed
1/27/2013	10:39:53 PM	SiCl4 pre valve closed
1/27/2013	10:39:53 PM	SiCl4 post valve closed
1/27/2013	10:39:53 PM	Bypass valve closed
1/27/2013	10:39:53 PM	Bubbler valve closed
1/27/2013	10:39:53 PM	Helium valve opened
1/27/2013	10:39:53 PM	Main Vac valve opened
1/27/2013	10:39:53 PM	Helium MFC set to  20.000000
1/27/2013	10:39:53 PM	H2 MFC set to  0.000000
1/27/2013	10:39:53 PM	BCl3 MFC set to  0.000000
1/27/2013	10:39:53 PM	PH3 MFC set to  0.000000
1/27/2013	10:39:53 PM	SiCl4 MFC set to  0.000000
1/27/2013	10:39:53 PM	Bypass solenoid MFC set to  0.000000
1/27/2013	10:39:53 PM	Tube furnace set to 150
1/27/2013	10:41:53 PM	Helium valve closed
1/27/2013	10:41:53 PM	H2 valve closed
1/27/2013	10:41:53 PM	BCl3 valve closed
1/27/2013	10:41:53 PM	PH3 valve closed
1/27/2013	10:41:53 PM	SiCl4 pre valve closed
1/27/2013	10:41:53 PM	SiCl4 post valve closed
1/27/2013	10:41:53 PM	Bypass valve closed
1/27/2013	10:41:53 PM	Bubbler valve closed
1/27/2013	10:41:53 PM	Main Vac valve opened
1/27/2013	10:41:53 PM	Helium MFC set to  0.000000
1/27/2013	10:41:53 PM	H2 MFC set to  0.000000
1/27/2013	10:41:53 PM	BCl3 MFC set to  0.000000
1/27/2013	10:41:53 PM	PH3 MFC set to  0.000000
1/27/2013	10:41:53 PM	SiCl4 MFC set to  0.000000
1/27/2013	10:41:53 PM	Bypass solenoid MFC set to  0.000000
1/27/2013	10:41:53 PM	Tube furnace set to 150
1/27/2013	10:42:23 PM	H2 valve closed
1/27/2013	10:42:23 PM	BCl3 valve closed
1/27/2013	10:42:23 PM	PH3 valve closed
1/27/2013	10:42:23 PM	SiCl4 pre valve closed
1/27/2013	10:42:23 PM	SiCl4 post valve closed
1/27/2013	10:42:23 PM	Bypass valve closed
1/27/2013	10:42:23 PM	Bubbler valve closed
1/27/2013	10:42:23 PM	Helium valve opened
1/27/2013	10:42:23 PM	Main Vac valve opened
1/27/2013	10:42:23 PM	Helium MFC set to  20.000000
1/27/2013	10:42:23 PM	H2 MFC set to  0.000000
1/27/2013	10:42:23 PM	BCl3 MFC set to  0.000000
1/27/2013	10:42:23 PM	PH3 MFC set to  0.000000
1/27/2013	10:42:23 PM	SiCl4 MFC set to  0.000000
1/27/2013	10:42:23 PM	Bypass solenoid MFC set to  0.000000
1/27/2013	10:42:24 PM	Tube furnace set to 150
1/27/2013	10:42:54 PM	Helium valve closed
1/27/2013	10:42:54 PM	H2 valve closed
1/27/2013	10:42:54 PM	BCl3 valve closed
1/27/2013	10:42:54 PM	PH3 valve closed
1/27/2013	10:42:54 PM	SiCl4 pre valve closed
1/27/2013	10:42:54 PM	SiCl4 post valve closed
1/27/2013	10:42:54 PM	Bypass valve closed
1/27/2013	10:42:54 PM	Bubbler valve closed
1/27/2013	10:42:54 PM	Main Vac valve opened
1/27/2013	10:42:54 PM	Helium MFC set to  0.000000
1/27/2013	10:42:54 PM	H2 MFC set to  0.000000
1/27/2013	10:42:54 PM	BCl3 MFC set to  0.000000
1/27/2013	10:42:54 PM	PH3 MFC set to  0.000000
1/27/2013	10:42:54 PM	SiCl4 MFC set to  0.000000
1/27/2013	10:42:54 PM	Bypass solenoid MFC set to  0.000000
1/27/2013	10:42:54 PM	Tube furnace set to 150
1/27/2013	10:43:24 PM	H2 valve closed
1/27/2013	10:43:24 PM	BCl3 valve closed
1/27/2013	10:43:24 PM	PH3 valve closed
1/27/2013	10:43:24 PM	SiCl4 pre valve closed
1/27/2013	10:43:24 PM	SiCl4 post valve closed
1/27/2013	10:43:24 PM	Bypass valve closed
1/27/2013	10:43:24 PM	Bubbler valve closed
1/27/2013	10:43:24 PM	Helium valve opened
1/27/2013	10:43:24 PM	Main Vac valve opened
1/27/2013	10:43:24 PM	Helium MFC set to  20.000000
1/27/2013	10:43:24 PM	H2 MFC set to  0.000000
1/27/2013	10:43:24 PM	BCl3 MFC set to  0.000000
1/27/2013	10:43:24 PM	PH3 MFC set to  0.000000
1/27/2013	10:43:24 PM	SiCl4 MFC set to  0.000000
1/27/2013	10:43:24 PM	Bypass solenoid MFC set to  0.000000
1/27/2013	10:43:24 PM	Tube furnace set to 150
1/27/2013	10:43:54 PM	Helium valve closed
1/27/2013	10:43:54 PM	H2 valve closed
1/27/2013	10:43:54 PM	BCl3 valve closed
1/27/2013	10:43:54 PM	PH3 valve closed
1/27/2013	10:43:54 PM	SiCl4 pre valve closed
1/27/2013	10:43:54 PM	SiCl4 post valve closed
1/27/2013	10:43:54 PM	Bypass valve closed
1/27/2013	10:43:54 PM	Bubbler valve closed
1/27/2013	10:43:54 PM	Main Vac valve opened
1/27/2013	10:43:54 PM	Helium MFC set to  0.000000
1/27/2013	10:43:54 PM	H2 MFC set to  0.000000
1/27/2013	10:43:54 PM	BCl3 MFC set to  0.000000
1/27/2013	10:43:54 PM	PH3 MFC set to  0.000000
1/27/2013	10:43:54 PM	SiCl4 MFC set to  0.000000
1/27/2013	10:43:54 PM	Bypass solenoid MFC set to  0.000000
1/27/2013	10:43:54 PM	Tube furnace set to 150
1/27/2013	10:44:24 PM	H2 valve closed
1/27/2013	10:44:24 PM	BCl3 valve closed
1/27/2013	10:44:24 PM	PH3 valve closed
1/27/2013	10:44:24 PM	SiCl4 pre valve closed
1/27/2013	10:44:24 PM	SiCl4 post valve closed
1/27/2013	10:44:24 PM	Bypass valve closed
1/27/2013	10:44:24 PM	Bubbler valve closed
1/27/2013	10:44:24 PM	Helium valve opened
1/27/2013	10:44:24 PM	Main Vac valve opened
1/27/2013	10:44:24 PM	Helium MFC set to  20.000000
1/27/2013	10:44:24 PM	H2 MFC set to  0.000000
1/27/2013	10:44:24 PM	BCl3 MFC set to  0.000000
1/27/2013	10:44:24 PM	PH3 MFC set to  0.000000
1/27/2013	10:44:24 PM	SiCl4 MFC set to  0.000000
1/27/2013	10:44:24 PM	Bypass solenoid MFC set to  0.000000
1/27/2013	10:44:25 PM	Tube furnace set to 150
1/27/2013	10:46:25 PM	Helium valve closed
1/27/2013	10:46:25 PM	H2 valve closed
1/27/2013	10:46:25 PM	BCl3 valve closed
1/27/2013	10:46:25 PM	PH3 valve closed
1/27/2013	10:46:25 PM	SiCl4 pre valve closed
1/27/2013	10:46:25 PM	SiCl4 post valve closed
1/27/2013	10:46:25 PM	Bypass valve closed
1/27/2013	10:46:25 PM	Bubbler valve closed
1/27/2013	10:46:25 PM	Main Vac valve opened
1/27/2013	10:46:25 PM	Helium MFC set to  0.000000
1/27/2013	10:46:25 PM	H2 MFC set to  0.000000
1/27/2013	10:46:25 PM	BCl3 MFC set to  0.000000
1/27/2013	10:46:25 PM	PH3 MFC set to  0.000000
1/27/2013	10:46:25 PM	SiCl4 MFC set to  0.000000
1/27/2013	10:46:25 PM	Bypass solenoid MFC set to  0.000000
1/27/2013	10:46:25 PM	Tube furnace set to 150
1/27/2013	10:46:55 PM	H2 valve closed
1/27/2013	10:46:55 PM	BCl3 valve closed
1/27/2013	10:46:55 PM	PH3 valve closed
1/27/2013	10:46:55 PM	SiCl4 pre valve closed
1/27/2013	10:46:55 PM	SiCl4 post valve closed
1/27/2013	10:46:55 PM	Bypass valve closed
1/27/2013	10:46:55 PM	Bubbler valve closed
1/27/2013	10:46:55 PM	Helium valve opened
1/27/2013	10:46:55 PM	Main Vac valve opened
1/27/2013	10:46:55 PM	Helium MFC set to  20.000000
1/27/2013	10:46:55 PM	H2 MFC set to  0.000000
1/27/2013	10:46:55 PM	BCl3 MFC set to  0.000000
1/27/2013	10:46:55 PM	PH3 MFC set to  0.000000
1/27/2013	10:46:55 PM	SiCl4 MFC set to  0.000000
1/27/2013	10:46:55 PM	Bypass solenoid MFC set to  0.000000
1/27/2013	10:46:55 PM	Tube furnace set to 150
1/27/2013	10:47:25 PM	Helium valve closed
1/27/2013	10:47:25 PM	H2 valve closed
1/27/2013	10:47:25 PM	BCl3 valve closed
1/27/2013	10:47:25 PM	PH3 valve closed
1/27/2013	10:47:25 PM	SiCl4 pre valve closed
1/27/2013	10:47:25 PM	SiCl4 post valve closed
1/27/2013	10:47:25 PM	Bypass valve closed
1/27/2013	10:47:25 PM	Bubbler valve closed
1/27/2013	10:47:25 PM	Main Vac valve opened
1/27/2013	10:47:25 PM	Helium MFC set to  0.000000
1/27/2013	10:47:25 PM	H2 MFC set to  0.000000
1/27/2013	10:47:25 PM	BCl3 MFC set to  0.000000
1/27/2013	10:47:25 PM	PH3 MFC set to  0.000000
1/27/2013	10:47:25 PM	SiCl4 MFC set to  0.000000
1/27/2013	10:47:25 PM	Bypass solenoid MFC set to  0.000000
1/27/2013	10:47:25 PM	Tube furnace set to 150
1/27/2013	10:47:55 PM	H2 valve closed
1/27/2013	10:47:55 PM	BCl3 valve closed
1/27/2013	10:47:55 PM	PH3 valve closed
1/27/2013	10:47:55 PM	SiCl4 pre valve closed
1/27/2013	10:47:55 PM	SiCl4 post valve closed
1/27/2013	10:47:55 PM	Bypass valve closed
1/27/2013	10:47:55 PM	Bubbler valve closed
1/27/2013	10:47:55 PM	Helium valve opened
1/27/2013	10:47:55 PM	Main Vac valve opened
1/27/2013	10:47:55 PM	Helium MFC set to  20.000000
1/27/2013	10:47:55 PM	H2 MFC set to  0.000000
1/27/2013	10:47:55 PM	BCl3 MFC set to  0.000000
1/27/2013	10:47:55 PM	PH3 MFC set to  0.000000
1/27/2013	10:47:55 PM	SiCl4 MFC set to  0.000000
1/27/2013	10:47:55 PM	Bypass solenoid MFC set to  0.000000
1/27/2013	10:47:56 PM	Tube furnace set to 150
1/27/2013	10:49:56 PM	Helium valve closed
1/27/2013	10:49:56 PM	H2 valve closed
1/27/2013	10:49:56 PM	BCl3 valve closed
1/27/2013	10:49:56 PM	PH3 valve closed
1/27/2013	10:49:56 PM	SiCl4 pre valve closed
1/27/2013	10:49:56 PM	SiCl4 post valve closed
1/27/2013	10:49:56 PM	Bypass valve closed
1/27/2013	10:49:56 PM	Bubbler valve closed
1/27/2013	10:49:56 PM	Main Vac valve opened
1/27/2013	10:49:56 PM	Helium MFC set to  0.000000
1/27/2013	10:49:56 PM	H2 MFC set to  0.000000
1/27/2013	10:49:56 PM	BCl3 MFC set to  0.000000
1/27/2013	10:49:56 PM	PH3 MFC set to  0.000000
1/27/2013	10:49:56 PM	SiCl4 MFC set to  0.000000
1/27/2013	10:49:56 PM	Bypass solenoid MFC set to  0.000000
1/27/2013	10:49:56 PM	Tube furnace set to 150
1/27/2013	10:50:26 PM	H2 valve closed
1/27/2013	10:50:26 PM	BCl3 valve closed
1/27/2013	10:50:26 PM	PH3 valve closed
1/27/2013	10:50:26 PM	SiCl4 pre valve closed
1/27/2013	10:50:26 PM	SiCl4 post valve closed
1/27/2013	10:50:26 PM	Bypass valve closed
1/27/2013	10:50:26 PM	Bubbler valve closed
1/27/2013	10:50:26 PM	Helium valve opened
1/27/2013	10:50:26 PM	Main Vac valve opened
1/27/2013	10:50:26 PM	Helium MFC set to  20.000000
1/27/2013	10:50:26 PM	H2 MFC set to  0.000000
1/27/2013	10:50:26 PM	BCl3 MFC set to  0.000000
1/27/2013	10:50:26 PM	PH3 MFC set to  0.000000
1/27/2013	10:50:26 PM	SiCl4 MFC set to  0.000000
1/27/2013	10:50:26 PM	Bypass solenoid MFC set to  0.000000
1/27/2013	10:50:26 PM	Tube furnace set to 150
1/27/2013	10:50:56 PM	Helium valve closed
1/27/2013	10:50:56 PM	H2 valve closed
1/27/2013	10:50:56 PM	BCl3 valve closed
1/27/2013	10:50:56 PM	PH3 valve closed
1/27/2013	10:50:56 PM	SiCl4 pre valve closed
1/27/2013	10:50:56 PM	SiCl4 post valve closed
1/27/2013	10:50:56 PM	Bypass valve closed
1/27/2013	10:50:56 PM	Bubbler valve closed
1/27/2013	10:50:56 PM	Main Vac valve opened
1/27/2013	10:50:56 PM	Helium MFC set to  0.000000
1/27/2013	10:50:56 PM	H2 MFC set to  0.000000
1/27/2013	10:50:56 PM	BCl3 MFC set to  0.000000
1/27/2013	10:50:56 PM	PH3 MFC set to  0.000000
1/27/2013	10:50:56 PM	SiCl4 MFC set to  0.000000
1/27/2013	10:50:56 PM	Bypass solenoid MFC set to  0.000000
1/27/2013	10:50:56 PM	Tube furnace set to 150
1/27/2013	10:51:26 PM	H2 valve closed
1/27/2013	10:51:26 PM	BCl3 valve closed
1/27/2013	10:51:26 PM	PH3 valve closed
1/27/2013	10:51:26 PM	SiCl4 pre valve closed
1/27/2013	10:51:26 PM	SiCl4 post valve closed
1/27/2013	10:51:26 PM	Bypass valve closed
1/27/2013	10:51:26 PM	Bubbler valve closed
1/27/2013	10:51:26 PM	Helium valve opened
1/27/2013	10:51:26 PM	Main Vac valve opened
1/27/2013	10:51:26 PM	Helium MFC set to  20.000000
1/27/2013	10:51:26 PM	H2 MFC set to  0.000000
1/27/2013	10:51:26 PM	BCl3 MFC set to  0.000000
1/27/2013	10:51:26 PM	PH3 MFC set to  0.000000
1/27/2013	10:51:26 PM	SiCl4 MFC set to  0.000000
1/27/2013	10:51:26 PM	Bypass solenoid MFC set to  0.000000
1/27/2013	10:51:27 PM	Tube furnace set to 150
1/27/2013	10:53:27 PM	Helium valve closed
1/27/2013	10:53:27 PM	H2 valve closed
1/27/2013	10:53:27 PM	BCl3 valve closed
1/27/2013	10:53:27 PM	PH3 valve closed
1/27/2013	10:53:27 PM	SiCl4 pre valve closed
1/27/2013	10:53:27 PM	SiCl4 post valve closed
1/27/2013	10:53:27 PM	Bypass valve closed
1/27/2013	10:53:27 PM	Bubbler valve closed
1/27/2013	10:53:27 PM	Main Vac valve opened
1/27/2013	10:53:27 PM	Helium MFC set to  0.000000
1/27/2013	10:53:27 PM	H2 MFC set to  0.000000
1/27/2013	10:53:27 PM	BCl3 MFC set to  0.000000
1/27/2013	10:53:27 PM	PH3 MFC set to  0.000000
1/27/2013	10:53:27 PM	SiCl4 MFC set to  0.000000
1/27/2013	10:53:27 PM	Bypass solenoid MFC set to  0.000000
1/27/2013	10:53:27 PM	Tube furnace set to 150
1/27/2013	10:53:28 PM	Run finished at 10:53 PM
1/27/2013	10:53:47 PM	Main Vac valve closed
1/27/2013	10:53:51 PM	Main Vac valve opened
1/27/2013	10:54:04 PM	Main Vac valve closed
1/27/2013	10:54:09 PM	Main Vac valve opened
1/27/2013	10:54:18 PM	Main Vac valve closed
1/27/2013	10:54:23 PM	Main Vac valve opened
1/27/2013	10:54:32 PM	Recipe started at 10:54 PM
1/27/2013	10:54:32 PM	Helium valve closed
1/27/2013	10:54:32 PM	H2 valve closed
1/27/2013	10:54:32 PM	BCl3 valve closed
1/27/2013	10:54:32 PM	PH3 valve closed
1/27/2013	10:54:32 PM	SiCl4 pre valve closed
1/27/2013	10:54:32 PM	SiCl4 post valve closed
1/27/2013	10:54:32 PM	Bypass valve closed
1/27/2013	10:54:32 PM	Bubbler valve closed
1/27/2013	10:54:32 PM	Main Vac valve opened
1/27/2013	10:54:32 PM	Helium MFC set to  0.000000
1/27/2013	10:54:32 PM	H2 MFC set to  0.000000
1/27/2013	10:54:32 PM	BCl3 MFC set to  0.000000
1/27/2013	10:54:32 PM	PH3 MFC set to  0.000000
1/27/2013	10:54:32 PM	SiCl4 MFC set to  0.000000
1/27/2013	10:54:32 PM	Bypass solenoid MFC set to  0.000000
1/27/2013	10:54:32 PM	Tube furnace set to 150
1/27/2013	10:55:02 PM	H2 valve closed
1/27/2013	10:55:02 PM	BCl3 valve closed
1/27/2013	10:55:02 PM	PH3 valve closed
1/27/2013	10:55:02 PM	SiCl4 pre valve closed
1/27/2013	10:55:02 PM	SiCl4 post valve closed
1/27/2013	10:55:02 PM	Bypass valve closed
1/27/2013	10:55:02 PM	Bubbler valve closed
1/27/2013	10:55:02 PM	Helium valve opened
1/27/2013	10:55:02 PM	Main Vac valve opened
1/27/2013	10:55:02 PM	Helium MFC set to  20.000000
1/27/2013	10:55:02 PM	H2 MFC set to  0.000000
1/27/2013	10:55:02 PM	BCl3 MFC set to  0.000000
1/27/2013	10:55:02 PM	PH3 MFC set to  0.000000
1/27/2013	10:55:02 PM	SiCl4 MFC set to  0.000000
1/27/2013	10:55:02 PM	Bypass solenoid MFC set to  0.000000
1/27/2013	10:55:02 PM	Tube furnace set to 150
1/27/2013	10:55:32 PM	Helium valve closed
1/27/2013	10:55:32 PM	H2 valve closed
1/27/2013	10:55:32 PM	BCl3 valve closed
1/27/2013	10:55:32 PM	PH3 valve closed
1/27/2013	10:55:32 PM	SiCl4 pre valve closed
1/27/2013	10:55:32 PM	SiCl4 post valve closed
1/27/2013	10:55:32 PM	Bypass valve closed
1/27/2013	10:55:32 PM	Bubbler valve closed
1/27/2013	10:55:32 PM	Main Vac valve opened
1/27/2013	10:55:32 PM	Helium MFC set to  0.000000
1/27/2013	10:55:32 PM	H2 MFC set to  0.000000
1/27/2013	10:55:32 PM	BCl3 MFC set to  0.000000
1/27/2013	10:55:32 PM	PH3 MFC set to  0.000000
1/27/2013	10:55:32 PM	SiCl4 MFC set to  0.000000
1/27/2013	10:55:32 PM	Bypass solenoid MFC set to  0.000000
1/27/2013	10:55:33 PM	Tube furnace set to 150
1/27/2013	10:55:51 PM	Run aborted at 10:55 PM
1/27/2013	10:55:51 PM	Helium valve closed
1/27/2013	10:55:51 PM	H2 valve closed
1/27/2013	10:55:51 PM	BCl3 valve closed
1/27/2013	10:55:51 PM	PH3 valve closed
1/27/2013	10:55:51 PM	SiCl4 pre valve closed
1/27/2013	10:55:51 PM	SiCl4 post valve closed
1/27/2013	10:55:51 PM	Bypass valve closed
1/27/2013	10:55:51 PM	Main Vac valve closed
1/27/2013	10:55:51 PM	Bubbler valve closed
1/27/2013	10:55:51 PM	Helium MFC set to  0.000000
1/27/2013	10:55:51 PM	H2 MFC set to  0.000000
1/27/2013	10:55:51 PM	BCl3 MFC set to  0.000000
1/27/2013	10:55:51 PM	PH3 MFC set to  0.000000
1/27/2013	10:55:51 PM	SiCl4 MFC set to  0.000000
1/27/2013	10:55:51 PM	Tube furnace set to 0
1/27/2013	10:55:56 PM	Main Vac valve opened
1/27/2013	10:56:43 PM	Recipe started at 10:56 PM
1/27/2013	10:56:43 PM	Helium valve closed
1/27/2013	10:56:43 PM	H2 valve closed
1/27/2013	10:56:43 PM	BCl3 valve closed
1/27/2013	10:56:43 PM	PH3 valve closed
1/27/2013	10:56:43 PM	SiCl4 pre valve closed
1/27/2013	10:56:43 PM	SiCl4 post valve closed
1/27/2013	10:56:43 PM	Bypass valve closed
1/27/2013	10:56:43 PM	Bubbler valve closed
1/27/2013	10:56:43 PM	Main Vac valve opened
1/27/2013	10:56:43 PM	Helium MFC set to  0.000000
1/27/2013	10:56:43 PM	H2 MFC set to  0.000000
1/27/2013	10:56:43 PM	BCl3 MFC set to  0.000000
1/27/2013	10:56:43 PM	PH3 MFC set to  0.000000
1/27/2013	10:56:43 PM	SiCl4 MFC set to  0.000000
1/27/2013	10:56:43 PM	Bypass solenoid MFC set to  0.000000
1/27/2013	10:56:43 PM	Tube furnace set to 150
1/27/2013	10:57:13 PM	H2 valve closed
1/27/2013	10:57:13 PM	BCl3 valve closed
1/27/2013	10:57:13 PM	PH3 valve closed
1/27/2013	10:57:13 PM	SiCl4 pre valve closed
1/27/2013	10:57:13 PM	SiCl4 post valve closed
1/27/2013	10:57:13 PM	Bypass valve closed
1/27/2013	10:57:13 PM	Bubbler valve closed
1/27/2013	10:57:13 PM	Helium valve opened
1/27/2013	10:57:13 PM	Main Vac valve opened
1/27/2013	10:57:13 PM	Helium MFC set to  20.000000
1/27/2013	10:57:13 PM	H2 MFC set to  0.000000
1/27/2013	10:57:13 PM	BCl3 MFC set to  0.000000
1/27/2013	10:57:13 PM	PH3 MFC set to  0.000000
1/27/2013	10:57:13 PM	SiCl4 MFC set to  0.000000
1/27/2013	10:57:13 PM	Bypass solenoid MFC set to  0.000000
1/27/2013	10:57:14 PM	Tube furnace set to 150
1/27/2013	10:57:44 PM	Helium valve closed
1/27/2013	10:57:44 PM	H2 valve closed
1/27/2013	10:57:44 PM	BCl3 valve closed
1/27/2013	10:57:44 PM	PH3 valve closed
1/27/2013	10:57:44 PM	SiCl4 pre valve closed
1/27/2013	10:57:44 PM	SiCl4 post valve closed
1/27/2013	10:57:44 PM	Bypass valve closed
1/27/2013	10:57:44 PM	Bubbler valve closed
1/27/2013	10:57:44 PM	Main Vac valve opened
1/27/2013	10:57:44 PM	Helium MFC set to  0.000000
1/27/2013	10:57:44 PM	H2 MFC set to  0.000000
1/27/2013	10:57:44 PM	BCl3 MFC set to  0.000000
1/27/2013	10:57:44 PM	PH3 MFC set to  0.000000
1/27/2013	10:57:44 PM	SiCl4 MFC set to  0.000000
1/27/2013	10:57:44 PM	Bypass solenoid MFC set to  0.000000
1/27/2013	10:57:44 PM	Tube furnace set to 150
1/27/2013	10:58:14 PM	H2 valve closed
1/27/2013	10:58:14 PM	BCl3 valve closed
1/27/2013	10:58:14 PM	PH3 valve closed
1/27/2013	10:58:14 PM	SiCl4 pre valve closed
1/27/2013	10:58:14 PM	SiCl4 post valve closed
1/27/2013	10:58:14 PM	Bypass valve closed
1/27/2013	10:58:14 PM	Bubbler valve closed
1/27/2013	10:58:14 PM	Helium valve opened
1/27/2013	10:58:14 PM	Main Vac valve opened
1/27/2013	10:58:14 PM	Helium MFC set to  20.000000
1/27/2013	10:58:14 PM	H2 MFC set to  0.000000
1/27/2013	10:58:14 PM	BCl3 MFC set to  0.000000
1/27/2013	10:58:14 PM	PH3 MFC set to  0.000000
1/27/2013	10:58:14 PM	SiCl4 MFC set to  0.000000
1/27/2013	10:58:14 PM	Bypass solenoid MFC set to  0.000000
1/27/2013	10:58:14 PM	Tube furnace set to 150
1/27/2013	10:58:44 PM	Helium valve closed
1/27/2013	10:58:44 PM	H2 valve closed
1/27/2013	10:58:44 PM	BCl3 valve closed
1/27/2013	10:58:44 PM	PH3 valve closed
1/27/2013	10:58:44 PM	SiCl4 pre valve closed
1/27/2013	10:58:44 PM	SiCl4 post valve closed
1/27/2013	10:58:44 PM	Bypass valve closed
1/27/2013	10:58:44 PM	Bubbler valve closed
1/27/2013	10:58:44 PM	Main Vac valve opened
1/27/2013	10:58:44 PM	Helium MFC set to  0.000000
1/27/2013	10:58:44 PM	H2 MFC set to  0.000000
1/27/2013	10:58:44 PM	BCl3 MFC set to  0.000000
1/27/2013	10:58:44 PM	PH3 MFC set to  0.000000
1/27/2013	10:58:44 PM	SiCl4 MFC set to  0.000000
1/27/2013	10:58:44 PM	Bypass solenoid MFC set to  0.000000
1/27/2013	10:58:44 PM	Tube furnace set to 150
1/27/2013	10:59:14 PM	H2 valve closed
1/27/2013	10:59:14 PM	BCl3 valve closed
1/27/2013	10:59:14 PM	PH3 valve closed
1/27/2013	10:59:14 PM	SiCl4 pre valve closed
1/27/2013	10:59:14 PM	SiCl4 post valve closed
1/27/2013	10:59:14 PM	Bypass valve closed
1/27/2013	10:59:14 PM	Bubbler valve closed
1/27/2013	10:59:14 PM	Helium valve opened
1/27/2013	10:59:14 PM	Main Vac valve opened
1/27/2013	10:59:14 PM	Helium MFC set to  20.000000
1/27/2013	10:59:14 PM	H2 MFC set to  0.000000
1/27/2013	10:59:14 PM	BCl3 MFC set to  0.000000
1/27/2013	10:59:14 PM	PH3 MFC set to  0.000000
1/27/2013	10:59:14 PM	SiCl4 MFC set to  0.000000
1/27/2013	10:59:14 PM	Bypass solenoid MFC set to  0.000000
1/27/2013	10:59:15 PM	Tube furnace set to 150
1/27/2013	11:01:15 PM	Helium valve closed
1/27/2013	11:01:15 PM	H2 valve closed
1/27/2013	11:01:15 PM	BCl3 valve closed
1/27/2013	11:01:15 PM	PH3 valve closed
1/27/2013	11:01:15 PM	SiCl4 pre valve closed
1/27/2013	11:01:15 PM	SiCl4 post valve closed
1/27/2013	11:01:15 PM	Bypass valve closed
1/27/2013	11:01:15 PM	Bubbler valve closed
1/27/2013	11:01:15 PM	Main Vac valve opened
1/27/2013	11:01:15 PM	Helium MFC set to  0.000000
1/27/2013	11:01:15 PM	H2 MFC set to  0.000000
1/27/2013	11:01:15 PM	BCl3 MFC set to  0.000000
1/27/2013	11:01:15 PM	PH3 MFC set to  0.000000
1/27/2013	11:01:15 PM	SiCl4 MFC set to  0.000000
1/27/2013	11:01:15 PM	Bypass solenoid MFC set to  0.000000
1/27/2013	11:01:15 PM	Tube furnace set to 150
1/27/2013	11:01:45 PM	H2 valve closed
1/27/2013	11:01:45 PM	BCl3 valve closed
1/27/2013	11:01:45 PM	PH3 valve closed
1/27/2013	11:01:45 PM	SiCl4 pre valve closed
1/27/2013	11:01:45 PM	SiCl4 post valve closed
1/27/2013	11:01:45 PM	Bypass valve closed
1/27/2013	11:01:45 PM	Bubbler valve closed
1/27/2013	11:01:45 PM	Helium valve opened
1/27/2013	11:01:45 PM	Main Vac valve opened
1/27/2013	11:01:45 PM	Helium MFC set to  20.000000
1/27/2013	11:01:45 PM	H2 MFC set to  0.000000
1/27/2013	11:01:45 PM	BCl3 MFC set to  0.000000
1/27/2013	11:01:45 PM	PH3 MFC set to  0.000000
1/27/2013	11:01:45 PM	SiCl4 MFC set to  0.000000
1/27/2013	11:01:45 PM	Bypass solenoid MFC set to  0.000000
1/27/2013	11:01:45 PM	Tube furnace set to 150
1/27/2013	11:02:15 PM	Helium valve closed
1/27/2013	11:02:15 PM	H2 valve closed
1/27/2013	11:02:15 PM	BCl3 valve closed
1/27/2013	11:02:15 PM	PH3 valve closed
1/27/2013	11:02:15 PM	SiCl4 pre valve closed
1/27/2013	11:02:15 PM	SiCl4 post valve closed
1/27/2013	11:02:15 PM	Bypass valve closed
1/27/2013	11:02:15 PM	Bubbler valve closed
1/27/2013	11:02:15 PM	Main Vac valve opened
1/27/2013	11:02:15 PM	Helium MFC set to  0.000000
1/27/2013	11:02:15 PM	H2 MFC set to  0.000000
1/27/2013	11:02:15 PM	BCl3 MFC set to  0.000000
1/27/2013	11:02:15 PM	PH3 MFC set to  0.000000
1/27/2013	11:02:15 PM	SiCl4 MFC set to  0.000000
1/27/2013	11:02:15 PM	Bypass solenoid MFC set to  0.000000
1/27/2013	11:02:15 PM	Tube furnace set to 150
1/27/2013	11:02:45 PM	H2 valve closed
1/27/2013	11:02:45 PM	BCl3 valve closed
1/27/2013	11:02:45 PM	PH3 valve closed
1/27/2013	11:02:45 PM	SiCl4 pre valve closed
1/27/2013	11:02:45 PM	SiCl4 post valve closed
1/27/2013	11:02:45 PM	Bypass valve closed
1/27/2013	11:02:45 PM	Bubbler valve closed
1/27/2013	11:02:45 PM	Helium valve opened
1/27/2013	11:02:45 PM	Main Vac valve opened
1/27/2013	11:02:45 PM	Helium MFC set to  20.000000
1/27/2013	11:02:45 PM	H2 MFC set to  0.000000
1/27/2013	11:02:45 PM	BCl3 MFC set to  0.000000
1/27/2013	11:02:45 PM	PH3 MFC set to  0.000000
1/27/2013	11:02:45 PM	SiCl4 MFC set to  0.000000
1/27/2013	11:02:45 PM	Bypass solenoid MFC set to  0.000000
1/27/2013	11:02:46 PM	Tube furnace set to 150
1/27/2013	11:03:16 PM	Helium valve closed
1/27/2013	11:03:16 PM	H2 valve closed
1/27/2013	11:03:16 PM	BCl3 valve closed
1/27/2013	11:03:16 PM	PH3 valve closed
1/27/2013	11:03:16 PM	SiCl4 pre valve closed
1/27/2013	11:03:16 PM	SiCl4 post valve closed
1/27/2013	11:03:16 PM	Bypass valve closed
1/27/2013	11:03:16 PM	Bubbler valve closed
1/27/2013	11:03:16 PM	Main Vac valve opened
1/27/2013	11:03:16 PM	Helium MFC set to  0.000000
1/27/2013	11:03:16 PM	H2 MFC set to  0.000000
1/27/2013	11:03:16 PM	BCl3 MFC set to  0.000000
1/27/2013	11:03:16 PM	PH3 MFC set to  0.000000
1/27/2013	11:03:16 PM	SiCl4 MFC set to  0.000000
1/27/2013	11:03:16 PM	Bypass solenoid MFC set to  0.000000
1/27/2013	11:03:16 PM	Tube furnace set to 150
1/27/2013	11:03:16 PM	H2 valve closed
1/27/2013	11:03:16 PM	BCl3 valve closed
1/27/2013	11:03:16 PM	PH3 valve closed
1/27/2013	11:03:16 PM	SiCl4 pre valve closed
1/27/2013	11:03:16 PM	SiCl4 post valve closed
1/27/2013	11:03:16 PM	Bypass valve closed
1/27/2013	11:03:16 PM	Bubbler valve closed
1/27/2013	11:03:16 PM	Helium valve opened
1/27/2013	11:03:16 PM	Main Vac valve opened
1/27/2013	11:03:16 PM	Helium MFC set to  20.000000
1/27/2013	11:03:16 PM	H2 MFC set to  0.000000
1/27/2013	11:03:16 PM	BCl3 MFC set to  0.000000
1/27/2013	11:03:16 PM	PH3 MFC set to  0.000000
1/27/2013	11:03:16 PM	SiCl4 MFC set to  0.000000
1/27/2013	11:03:16 PM	Bypass solenoid MFC set to  0.000000
1/27/2013	11:03:16 PM	Tube furnace set to 150
1/27/2013	11:03:17 PM	Helium valve closed
1/27/2013	11:03:17 PM	H2 valve closed
1/27/2013	11:03:17 PM	BCl3 valve closed
1/27/2013	11:03:17 PM	PH3 valve closed
1/27/2013	11:03:17 PM	SiCl4 pre valve closed
1/27/2013	11:03:17 PM	SiCl4 post valve closed
1/27/2013	11:03:17 PM	Bypass valve closed
1/27/2013	11:03:17 PM	Bubbler valve closed
1/27/2013	11:03:17 PM	Main Vac valve opened
1/27/2013	11:03:17 PM	Helium MFC set to  0.000000
1/27/2013	11:03:17 PM	H2 MFC set to  0.000000
1/27/2013	11:03:17 PM	BCl3 MFC set to  0.000000
1/27/2013	11:03:17 PM	PH3 MFC set to  0.000000
1/27/2013	11:03:17 PM	SiCl4 MFC set to  0.000000
1/27/2013	11:03:17 PM	Bypass solenoid MFC set to  0.000000
1/27/2013	11:03:18 PM	Tube furnace set to 150
1/27/2013	11:03:38 PM	Run aborted at 11:03 PM
1/27/2013	11:03:38 PM	Helium valve closed
1/27/2013	11:03:38 PM	H2 valve closed
1/27/2013	11:03:38 PM	BCl3 valve closed
1/27/2013	11:03:38 PM	PH3 valve closed
1/27/2013	11:03:38 PM	SiCl4 pre valve closed
1/27/2013	11:03:38 PM	SiCl4 post valve closed
1/27/2013	11:03:38 PM	Bypass valve closed
1/27/2013	11:03:38 PM	Main Vac valve closed
1/27/2013	11:03:38 PM	Bubbler valve closed
1/27/2013	11:03:38 PM	Helium MFC set to  0.000000
1/27/2013	11:03:38 PM	H2 MFC set to  0.000000
1/27/2013	11:03:38 PM	BCl3 MFC set to  0.000000
1/27/2013	11:03:38 PM	PH3 MFC set to  0.000000
1/27/2013	11:03:38 PM	SiCl4 MFC set to  0.000000
1/27/2013	11:03:38 PM	Tube furnace set to 0
1/27/2013	11:03:44 PM	Main Vac valve opened
1/27/2013	11:03:52 PM	Main Vac valve closed
1/27/2013	11:03:57 PM	Main Vac valve opened
1/27/2013	11:04:29 PM	Recipe started at 11:04 PM
1/27/2013	11:04:29 PM	Helium valve closed
1/27/2013	11:04:29 PM	H2 valve closed
1/27/2013	11:04:29 PM	BCl3 valve closed
1/27/2013	11:04:29 PM	PH3 valve closed
1/27/2013	11:04:29 PM	SiCl4 pre valve closed
1/27/2013	11:04:29 PM	SiCl4 post valve closed
1/27/2013	11:04:29 PM	Main Vac valve closed
1/27/2013	11:04:30 PM	Bypass valve closed
1/27/2013	11:04:30 PM	Bubbler valve closed
1/27/2013	11:04:30 PM	Helium MFC set to  0.000000
1/27/2013	11:04:30 PM	H2 MFC set to  0.000000
1/27/2013	11:04:30 PM	BCl3 MFC set to  0.000000
1/27/2013	11:04:30 PM	PH3 MFC set to  0.000000
1/27/2013	11:04:30 PM	SiCl4 MFC set to  0.000000
1/27/2013	11:04:30 PM	Bypass solenoid MFC set to  0.000000
1/27/2013	11:04:30 PM	Tube furnace set to 0
1/27/2013	11:04:33 PM	Helium valve closed
1/27/2013	11:04:33 PM	BCl3 valve closed
1/27/2013	11:04:33 PM	PH3 valve closed
1/27/2013	11:04:33 PM	SiCl4 pre valve closed
1/27/2013	11:04:33 PM	SiCl4 post valve closed
1/27/2013	11:04:33 PM	Main Vac valve closed
1/27/2013	11:04:33 PM	Bypass valve closed
1/27/2013	11:04:33 PM	Bubbler valve closed
1/27/2013	11:04:33 PM	H2 valve opened
1/27/2013	11:04:33 PM	Helium MFC set to  0.000000
1/27/2013	11:04:33 PM	H2 MFC set to  500.000000
1/27/2013	11:04:33 PM	BCl3 MFC set to  0.000000
1/27/2013	11:04:33 PM	PH3 MFC set to  0.000000
1/27/2013	11:04:33 PM	SiCl4 MFC set to  0.000000
1/27/2013	11:04:33 PM	Bypass solenoid MFC set to  0.000000
1/27/2013	11:04:33 PM	Tube furnace set to 0
1/27/2013	11:05:43 PM	Helium valve closed
1/27/2013	11:05:43 PM	BCl3 valve closed
1/27/2013	11:05:43 PM	PH3 valve closed
1/27/2013	11:05:43 PM	SiCl4 pre valve closed
1/27/2013	11:05:43 PM	SiCl4 post valve closed
1/27/2013	11:05:43 PM	Main Vac valve closed
1/27/2013	11:05:43 PM	Bypass valve closed
1/27/2013	11:05:43 PM	H2 valve opened
1/27/2013	11:05:43 PM	Bubbler valve opened
1/27/2013	11:05:43 PM	Helium MFC set to  0.000000
1/27/2013	11:05:43 PM	H2 MFC set to  500.000000
1/27/2013	11:05:43 PM	BCl3 MFC set to  0.000000
1/27/2013	11:05:43 PM	PH3 MFC set to  0.000000
1/27/2013	11:05:43 PM	SiCl4 MFC set to  0.000000
1/27/2013	11:05:43 PM	Bypass solenoid MFC set to  0.000000
1/27/2013	11:05:43 PM	Tube furnace set to 0
1/27/2013	11:05:44 PM	Helium valve closed
1/27/2013	11:05:44 PM	BCl3 valve closed
1/27/2013	11:05:44 PM	PH3 valve closed
1/27/2013	11:05:44 PM	SiCl4 pre valve closed
1/27/2013	11:05:44 PM	SiCl4 post valve closed
1/27/2013	11:05:44 PM	Main Vac valve closed
1/27/2013	11:05:44 PM	Bypass valve closed
1/27/2013	11:05:44 PM	H2 valve opened
1/27/2013	11:05:44 PM	Bubbler valve opened
1/27/2013	11:05:44 PM	Helium MFC set to  0.000000
1/27/2013	11:05:45 PM	H2 MFC set to  500.000000
1/27/2013	11:05:45 PM	BCl3 MFC set to  0.000000
1/27/2013	11:05:45 PM	PH3 MFC set to  0.000000
1/27/2013	11:05:45 PM	SiCl4 MFC set to  0.000000
1/27/2013	11:05:45 PM	Bypass solenoid MFC set to  0.000000
1/27/2013	11:05:45 PM	Tube furnace set to 1000
1/27/2013	11:25:45 PM	Helium valve closed
1/27/2013	11:25:45 PM	BCl3 valve closed
1/27/2013	11:25:45 PM	PH3 valve closed
1/27/2013	11:25:45 PM	Main Vac valve closed
1/27/2013	11:25:45 PM	Bypass valve closed
1/27/2013	11:25:45 PM	H2 valve opened
1/27/2013	11:25:45 PM	SiCl4 pre valve opened
1/27/2013	11:25:45 PM	SiCl4 post valve opened
1/27/2013	11:25:45 PM	Bubbler valve opened
1/27/2013	11:25:45 PM	Helium MFC set to  0.000000
1/27/2013	11:25:45 PM	H2 MFC set to  500.000000
1/27/2013	11:25:45 PM	BCl3 MFC set to  0.000000
1/27/2013	11:25:45 PM	PH3 MFC set to  0.000000
1/27/2013	11:25:45 PM	SiCl4 MFC set to  50.000000
1/27/2013	11:25:45 PM	Bypass solenoid MFC set to  0.000000
1/27/2013	11:25:45 PM	Tube furnace set to 1000
1/27/2013	11:37:45 PM	Helium valve closed
1/27/2013	11:37:45 PM	BCl3 valve closed
1/27/2013	11:37:45 PM	PH3 valve closed
1/27/2013	11:37:45 PM	SiCl4 pre valve closed
1/27/2013	11:37:45 PM	SiCl4 post valve closed
1/27/2013	11:37:45 PM	Main Vac valve closed
1/27/2013	11:37:45 PM	Bypass valve closed
1/27/2013	11:37:45 PM	H2 valve opened
1/27/2013	11:37:45 PM	Bubbler valve opened
1/27/2013	11:37:45 PM	Helium MFC set to  0.000000
1/27/2013	11:37:45 PM	H2 MFC set to  500.000000
1/27/2013	11:37:45 PM	BCl3 MFC set to  0.000000
1/27/2013	11:37:45 PM	PH3 MFC set to  0.000000
1/27/2013	11:37:45 PM	SiCl4 MFC set to  0.000000
1/27/2013	11:37:45 PM	Bypass solenoid MFC set to  0.000000
1/27/2013	11:37:45 PM	Tube furnace set to 750
1/27/2013	11:42:45 PM	H2 valve closed
1/27/2013	11:42:45 PM	BCl3 valve closed
1/27/2013	11:42:45 PM	PH3 valve closed
1/27/2013	11:42:45 PM	SiCl4 pre valve closed
1/27/2013	11:42:45 PM	SiCl4 post valve closed
1/27/2013	11:42:45 PM	Main Vac valve closed
1/27/2013	11:42:45 PM	Bypass valve closed
1/27/2013	11:42:45 PM	Helium valve opened
1/27/2013	11:42:45 PM	Bubbler valve opened
1/27/2013	11:42:45 PM	Helium MFC set to  500.000000
1/27/2013	11:42:45 PM	H2 MFC set to  0.000000
1/27/2013	11:42:45 PM	BCl3 MFC set to  0.000000
1/27/2013	11:42:45 PM	PH3 MFC set to  0.000000
1/27/2013	11:42:45 PM	SiCl4 MFC set to  0.000000
1/27/2013	11:42:45 PM	Bypass solenoid MFC set to  0.000000
1/27/2013	11:42:45 PM	Tube furnace set to 0
